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1. 发明申请

WO2010120765A2 IMPLANT MASK WITH MOVEABLE MASK SEGMENTS 审中-公开
标题翻译：植物面膜与可移动的面膜部分
公开(公告)号：WO2010120765A2
公开(公告)日：2010-10-21
申请号：PCT/US2010/030874
申请日：2010-04-13
申请人： VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. , VOPAT, Robert, B. , CARLSON, Charles , WEAVER, William, T.
发明人： VOPAT, Robert, B. , CARLSON, Charles , WEAVER, William, T.
IPC分类号： H01L21/265 , H01L21/266 , H01L31/18
CPC分类号： H01L21/266 , H01J37/3171 , H01J2237/31711
摘要： This apparatus has two mask segments. Each mask segment has apertures that an ion beam may pass through. These mask segments can move between a first and second position using hinges. One or more workpieces are disposed behind the mask segments when these mask segments are in a second position. The two mask segments are configured to cover the one or more workpieces in one instance. Ions are implanted into the one or more workpieces through the apertures in the mask segments.
摘要翻译：该装置具有两个掩模段。每个掩模段具有离子束可能通过的孔。这些掩模段可以使用铰链在第一和第二位置之间移动。当这些掩模段处于第二位置时，一个或多个工件设置在掩模段后面。两个掩模段被配置为在一个实例中覆盖一个或多个工件。离子通过掩模段中的孔注入到一个或多个工件中。

2. 发明申请

WO2011057247A2 SYSTEM AND METHOD FOR HANDLING MULTIPLE WORKPIECES FOR MATRIX CONFIGURATION PROCESSING 审中-公开
标题翻译：用于处理矩阵配置处理的多个工件的系统和方法
公开(公告)号：WO2011057247A2
公开(公告)日：2011-05-12
申请号：PCT/US2010/055986
申请日：2010-11-09
申请人： VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. , WEAVER, William, T. , CARRERA, Jamie, A. , VOPAT, Robert, B. , WEBB, Aaron , CARLSON, Charles, T.
发明人： WEAVER, William, T. , CARRERA, Jamie, A. , VOPAT, Robert, B. , WEBB, Aaron , CARLSON, Charles, T.
IPC分类号： H01L21/677
CPC分类号： H01L21/67739 , G21K5/10 , H01L21/67742 , H01L21/67766 , H01L21/68707
摘要： A system for loading workpieces into a process chamber for processing in a matrix configuration includes a conveyor configured to transport multiple workpieces in a linear fashion. A workpiece hotel is configured to receive the multiple workpieces from the conveyor. The workpiece hotel comprises a matrix of cells arranged in N columns and M floors. A pick blade is configured to insert into the hotel and retract from the hotel in order to unload a plurality of substrates from a first floor into a single row of the pick blade, and to repeat the unloading operation to form a matrix comprising a plurality of rows of substrates disposed on the pick blade. In one example, the workpiece hotel has a staggered configuration that provides individual accessibility of each hotel cell.
摘要翻译：用于将工件装载到处理室中以用于以矩阵配置进行处理的系统包括配置成以线性方式输送多个工件的输送机。工件酒店被配置为从传送机接收多个工件。工件酒店包括布置在N列和M层中的单元矩阵。拾取刀片被构造为插入酒店并从酒店收回以便将多个基底从第一地板卸载到拾取叶片的单排中并且重复卸载操作以形成包括多个设置在拾取刀片上的多行衬底。在一个示例中，工件酒店具有交错的配置，其提供每个酒店小区的单独可访问性。

3. 发明申请

WO2014189788A1 SYSTEM AND METHOD FOR QUICK-SWAP OF MULTIPLE SUBSTRATES 审中-公开
标题翻译：多基板快速切换系统及方法
公开(公告)号：WO2014189788A1
公开(公告)日：2014-11-27
申请号：PCT/US2014/038452
申请日：2014-05-16
申请人： VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
发明人： VOPAT, Robert, B. , SCHALLER, Jason, M. , WEAVER, William, T.
IPC分类号： H01L21/677
CPC分类号： B25J15/0052 , B25J11/0095 , H01L21/67201 , H01L21/67742 , H01L21/67757
摘要： A system and method are disclosed for substrate handling. The system can include a robot adapter configured to connect to a robot, and first and second end effectors connected to the robot adapter. The robot adapter is configured to move the first and second end effectors from a first, retracted, position to a second, extended, position. In the extended position, the first or second end effector is disposed within a top entry load lock for picking or dropping a plurality of substrates therein. The first and second end effectors can be selectively and independently movable. The robot adapter can be rotatable so as to selectively position one of the end effectors over the top entry load lock. Methods for quickly swapping processed and unprocessed substrates in the top entry load lock are also disclosed and claimed.
摘要翻译：公开了用于基板处理的系统和方法。该系统可以包括被配置为连接到机器人的机器人适配器，以及连接到机器人适配器的第一和第二端部执行器。机器人适配器被配置为将第一和第二末端执行器从第一缩回位置移动到第二延伸位置。在延伸位置中，第一或第二末端执行器设置在顶部入口装载锁中，用于在其中拾取或掉落多个基板。第一和第二端部执行器可以选择性地和独立地移动。机器人适配器可以是可旋转的，以便选择性地将其中一个末端执行器定位在顶部入口装载锁定上。还公开并要求保护在顶部入口加载锁中快速交换处理和未处理的基板的方法。

4. 发明公开

EP2499666A2 SYSTEM AND METHOD FOR HANDLING MULTIPLE WORKPIECES FOR MATRIX CONFIGURATION PROCESSING 审中-公开
标题翻译：系统和方法用于处理对矩阵结构型加工多个工件
公开(公告)号：EP2499666A2
公开(公告)日：2012-09-19
申请号：EP10787598.1
申请日：2010-11-09
申请人： Varian Semiconductor Equipment Associates, Inc.
发明人： WEAVER, William, T. , CARRERA, Jamie, A. , VOPAT, Robert, B. , WEBB, Aaron , CARLSON, Charles, T.
IPC分类号： H01L21/677
CPC分类号： H01L21/67739 , G21K5/10 , H01L21/67742 , H01L21/67766 , H01L21/68707
摘要： A system for loading workpieces into a process chamber for processing in a matrix configuration includes a conveyor configured to transport multiple workpieces in a linear fashion. A workpiece hotel is configured to receive the multiple workpieces from the conveyor. The workpiece hotel comprises a matrix of cells arranged in N columns and M floors. A pick blade is configured to insert into the hotel and retract from the hotel in order to unload a plurality of substrates from a first floor into a single row of the pick blade, and to repeat the unloading operation to form a matrix comprising a plurality of rows of substrates disposed on the pick blade. In one example, the workpiece hotel has a staggered configuration that provides individual accessibility of each hotel cell.

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