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1. 发明授权

US06461888B1 Lateral polysilicon beam process 失效
标题翻译：横向多晶硅束工艺
公开(公告)号：US06461888B1
公开(公告)日：2002-10-08
申请号：US09880249
申请日：2001-06-14
申请人： Uppili Sridhar , Ranganathan Nagarajan , Yubo Miao
发明人： Uppili Sridhar , Ranganathan Nagarajan , Yubo Miao
IPC分类号： H01L2100
CPC分类号： B81C1/0015 , B81B2203/0136
摘要： A process has been described which makes use of polysilicon beam as the structural material instead of single crystal silicon for the fabrication of MEMS sensors/actuators. The invention describes the process for fabricating suspended polysilicon beams by using deep trenches etched into silicon substrate as a kind of a mould to form polysilicon beams. The polysilicon beams are subsequently released by isotropically etching away the silicon surrounding the polysilicon beams. This results in free standing polysilicon members, which form the MEMS structures. In addition to the general process, three approaches to making electrical contact to the beams are presented.
摘要翻译：已经描述了使用多晶硅束作为结构材料而不是用于制造MEMS传感器/致动器的单晶硅的方法。本发明描述了通过使用蚀刻到硅衬底中的深沟槽作为一种模具来形成多晶硅束来制造悬浮多晶硅束的工艺。随后通过各向同性蚀刻掉多晶硅束周围的硅来释放多晶硅束。这导致形成MEMS结构的自由多晶硅构件。除了一般的过程之外，还提出了三种与光束接触的方法。

2. 发明授权

US06662654B2 Z-axis accelerometer 失效
公开(公告)号：US06662654B2
公开(公告)日：2003-12-16
申请号：US10409421
申请日：2003-04-08
申请人： Yubo Miao , Ranganathan Nagarajan , Uppili Sridhar , Rakesh Kumar , Qinxin Zhang
发明人： Yubo Miao , Ranganathan Nagarajan , Uppili Sridhar , Rakesh Kumar , Qinxin Zhang
IPC分类号： G01P1500
CPC分类号： G01P15/125 , B81B3/0051 , B81B2201/0235 , B81B2203/053 , G01P15/0802 , G01P2015/0814 , Y10T29/49005
摘要： An accelerometer design is described. It operates by measuring a change in capacitance when one plate is fixed and one is mobile (free to accelerate). Unlike prior art designs where such changes are caused by variations in the plate separation distance, in the design of the present invention the plate separation distance is fixed, it being the effective plate area that changes with acceleration. A key feature is that the basic unit is a pair of capacitors. The fixed plates in each case are at the same relative height but the mobile plates are offset relative to the fixed plates, one mobile plate somewhat higher than its fixed plate with the other mobile plate being somewhat lower. Then, when the mobile plates move (in the same direction), one capacitor increases in value while the other decreases by the same amount. This differential design renders the device insensitive to sources of systematic error such as temperature changes. A process for manufacturing the design is described.

3. 发明授权

US06571628B1 Z-axis accelerometer 失效
标题翻译： Z轴加速度计
公开(公告)号：US06571628B1
公开(公告)日：2003-06-03
申请号：US09687161
申请日：2000-10-16
申请人： Yubo Miao , Ranganathan Nagarajan , Uppili Sridhar , Rakesh Kumar , Zhang Qingxin
发明人： Yubo Miao , Ranganathan Nagarajan , Uppili Sridhar , Rakesh Kumar , Zhang Qingxin
IPC分类号： G01P1500
CPC分类号： G01P15/125 , B81B3/0051 , B81B2201/0235 , B81B2203/053 , G01P15/0802 , G01P2015/0814 , Y10T29/49005
摘要： An accelerometer design is described. It operates by measuring a change in capacitance when one plate is fixed and one is mobile (free to accelerate). Unlike prior art designs where such changes are caused by variations in the plate separation distance, in the design of the present invention the plate separation distance is fixed, it being the effective plate area that changes with acceleration. A key feature is that the basic unit is a pair of capacitors. The fixed plates in each case are at the same relative height but the mobile plates are offset relative to the fixed plates, one mobile plate somewhat higher than its fixed plate with the other mobile plate being somewhat lower. Then, when the mobile plates move (in the same direction), one capacitor increases in value while the other decreases by the same amount. This differential design renders the device insensitive to sources of systematic error such as temperature changes. A process for manufacturing the design is described.
摘要翻译：描述加速度计设计。它通过测量一个板固定并且一个是移动的（自由加速）时的电容变化来操作。不同于现有技术设计，其中这种变化是由板间隔距离的变化引起的，在本发明的设计中，板间隔距离是固定的，它是加速度变化的有效板面积。一个关键的特征是基本单元是一对电容器。每种情况下的固定板具有相同的相对高度，但是移动板相对于固定板偏移，一个移动板稍微高于其固定板，另一个移动板稍低。然后，当移动板移动（沿相同方向）时，一个电容器的值增加，而另一个电容器减少相同的量。该差分设计使设备对温度变化等系统误差源不敏感。描述了用于制造设计的过程。

4. 发明授权

US07442542B2 Shallow multi-well plastic chip for thermal multiplexing 失效
标题翻译：浅多芯塑料芯片用于热复用
公开(公告)号：US07442542B2
公开(公告)日：2008-10-28
申请号：US10613599
申请日：2003-07-03
申请人： Yubo Miao , Yu Chen , Tit Meng Lim , Chew Kiat Heng
发明人： Yubo Miao , Yu Chen , Tit Meng Lim , Chew Kiat Heng
IPC分类号： C12M1/02 , C12M1/40 , C12P19/34 , B28B7/30 , B29C43/56 , B29C51/14 , G01N1/44
CPC分类号： B29C51/082 , B01L3/50851 , B01L7/52 , B01L2200/0642 , B01L2200/0684 , B01L2200/12 , B01L2300/0819 , B01L2300/1805 , B29C33/40 , B29K2023/12 , B29K2033/12 , B29K2067/00 , B29K2069/00 , B29K2883/00 , B29L2031/756 , Y10S435/809 , Y10S436/809 , Y10T436/25
摘要： Disposable units in current use for performing PCR are limited by their heat block ramping rates and by the thermal diffusion delay time through the plastic wall as well as by the sample itself. This limitation has been overcome by forming a disposable plastic chip using a simple deformation process wherein one or more plastic sheets are caused, through hydrostatic pressure, to conform to the surface of a suitable mold. After a given disposable chip has been filled with liquid samples, it is brought into close contact with an array of heating blocks that seals each sample within its own chamber, allowing each sample to then be heat treated as desired.
摘要翻译：当前用于进行PCR的一次性单元受到其热阻斜率和通过塑料壁以及样品本身的热扩散延迟时间的限制。通过使用简单的变形过程形成一次性塑料芯片已经克服了这种限制，其中通过静水压力使一个或多个塑料片材与合适的模具的表面一致。在给定的一次性芯片已经充满液体样品之后，它与一个加热块阵列紧密接触，该加热块在其自己的室内密封每个样品，然后根据需要对每个样品进行热处理。

5. 发明授权

US07804969B2 Silicon microphone with impact proof structure 有权
标题翻译：硅胶麦克风带防冲击结构
公开(公告)号：US07804969B2
公开(公告)日：2010-09-28
申请号：US11500114
申请日：2006-08-07
申请人： Zhe Wang , Yubo Miao
发明人： Zhe Wang , Yubo Miao
IPC分类号： H04R25/00
CPC分类号： H04R19/005 , B81B3/0051 , B81B2201/0257 , H04R1/086 , H04R2499/11
摘要： Improved impact proof capability of a silicon microphone sensing element is achieved with a stopper element that limits the maximum vibration of moveable parts. The stopper has a lower anchor portion and upper finger portion that is elevated a certain distance above the diaphragm and overhangs the outer edges of the perforated plates. The stopper is formed on a stack consisting of a lower substrate, a middle dielectric layer, and an upper membrane layer. There is a back hole in the substrate and an air gap in the dielectric layer to allow sound to impinge on the diaphragm. The number of fingers and composition of the stopper is variable. Optionally, the stopper has a center support design and is formed on a center anchor within an opening in the diaphragm. An upper finger region overhangs the diaphragm near the center opening and thereby prevents breakage due to large vibrations.
摘要翻译：通过限制可移动部件的最大振动的止动元件来实现硅麦克风感测元件的改进的防冲击能力。止动器具有下锚固部分和上指部分，其在隔膜上方提升一定距离并且突出多孔板的外边缘。止动件形成在由下基板，中间介电层和上膜层组成的堆叠上。在衬底中有一个后孔，并且介质层中有一个气隙，以允许声音撞击到隔膜上。手指的数量和塞子的组成是可变的。可选地，止动件具有中心支撑设计，并且形成在隔膜中的开口内的中心锚固件上。上手指区域在中心开口附近悬挂隔膜，从而防止由于大的振动导致的破损。

6. 发明申请

US20080031476A1 Silicon microphone with impact proof structure 有权
标题翻译：硅胶麦克风带防冲击结构
公开(公告)号：US20080031476A1
公开(公告)日：2008-02-07
申请号：US11500114
申请日：2006-08-07
申请人： Zhe Wang , Yubo Miao
发明人： Zhe Wang , Yubo Miao
IPC分类号： H04R25/00 , H04R17/02 , H04R19/04 , H04R21/02 , H04R11/04 , H04R9/08
CPC分类号： H04R19/005 , B81B3/0051 , B81B2201/0257 , H04R1/086 , H04R2499/11
摘要： Improved impact proof capability of a silicon microphone sensing element is achieved with a stopper element that limits the maximum vibration of moveable parts. The stopper has a lower anchor portion and upper finger portion that is elevated a certain distance above the diaphragm and overhangs the outer edges of the perforated plates. The stopper is formed on a stack consisting of a lower substrate, a middle dielectric layer, and an upper membrane layer. There is a back hole in the substrate and an air gap in the dielectric layer to allow sound to impinge on the diaphragm. The number of fingers and composition of the stopper is variable. Optionally, the stopper has a center support design and is formed on a center anchor within an opening in the diaphragm. An upper finger region overhangs the diaphragm near the center opening and thereby prevents breakage due to large vibrations
摘要翻译：通过限制可移动部件的最大振动的止动元件来实现硅麦克风感测元件的改进的防冲击能力。止动器具有下锚固部分和上指部分，其在隔膜上方提升一定距离并且突出多孔板的外边缘。止动件形成在由下基板，中间介电层和上膜层组成的堆叠上。在衬底中有一个后孔，并且介质层中有一个气隙，以允许声音撞击到隔膜上。手指的数量和塞子的组成是可变的。可选地，止动件具有中心支撑设计，并且形成在隔膜中的开口内的中心锚固件上。上手指区域在中心开口附近悬挂隔膜，从而防止由于大的振动导致的破损

7. 发明申请

US20090053801A1 Shallow multi-well plastic chip for thermal multiplexing 失效
标题翻译：浅多芯塑料芯片用于热复用
公开(公告)号：US20090053801A1
公开(公告)日：2009-02-26
申请号：US12288373
申请日：2008-10-20
申请人： Yubo Miao , Yu Chen , Tit Meng Lim , Chew Kiat Heng
发明人： Yubo Miao , Yu Chen , Tit Meng Lim , Chew Kiat Heng
IPC分类号： C12M1/40
CPC分类号： B29C51/082 , B01L3/50851 , B01L7/52 , B01L2200/0642 , B01L2200/0684 , B01L2200/12 , B01L2300/0819 , B01L2300/1805 , B29C33/40 , B29K2023/12 , B29K2033/12 , B29K2067/00 , B29K2069/00 , B29K2883/00 , B29L2031/756 , Y10S435/809 , Y10S436/809 , Y10T436/25
摘要： Disposable units in current use for performing PCR are limited by their heat block ramping rates and by the thermal diffusion delay time through the plastic wall as well as by the sample itself. This limitation has been overcome by forming a disposable plastic chip using a simple deformation process wherein one or more plastic sheets are caused, through hydrostatic pressure, to conform to the surface of a suitable mold. After a given disposable chip has been filled with liquid samples, it is brought into close contact with an array of heating blocks that seals each sample within its own chamber, allowing each sample to then be heat treated as desired.
摘要翻译：当前用于进行PCR的一次性单元受到其热阻斜率和通过塑料壁以及样品本身的热扩散延迟时间的限制。通过使用简单的变形过程形成一次性塑料芯片已经克服了这种限制，其中通过静水压力使一个或多个塑料片材与合适的模具的表面一致。在给定的一次性芯片已经充满液体样品之后，它与一个加热块阵列紧密接触，该加热块在其自己的室内密封每个样品，然后根据需要对每个样品进行热处理。

8. 发明授权

US08080411B2 Shallow multi-well plastic chip for thermal multiplexing 失效
标题翻译：浅多芯塑料芯片用于热复用
公开(公告)号：US08080411B2
公开(公告)日：2011-12-20
申请号：US12288373
申请日：2008-10-20
申请人： Yubo Miao , Yu Chen , Tit Meng Lim , Chew Kiat Heng
发明人： Yubo Miao , Yu Chen , Tit Meng Lim , Chew Kiat Heng
IPC分类号： C12M1/02 , C12M1/40 , G01N1/44
CPC分类号： B29C51/082 , B01L3/50851 , B01L7/52 , B01L2200/0642 , B01L2200/0684 , B01L2200/12 , B01L2300/0819 , B01L2300/1805 , B29C33/40 , B29K2023/12 , B29K2033/12 , B29K2067/00 , B29K2069/00 , B29K2883/00 , B29L2031/756 , Y10S435/809 , Y10S436/809 , Y10T436/25
摘要： Disposable units in current use for performing PCR are limited by their heat block ramping rates and by the thermal diffusion delay time through the plastic wall as well as by the sample itself. This limitation has been overcome by forming a disposable plastic chip using a simple deformation process wherein one or more plastic sheets are caused, through hydrostatic pressure, to conform to the surface of a suitable mold. After a given disposable chip has been filled with liquid samples, it is brought into close contact with an array of heating blocks that seals each sample within its own chamber, allowing each sample to then be heat treated as desired.
摘要翻译：当前用于进行PCR的一次性单元受到其热阻斜率和通过塑料壁以及样品本身的热扩散延迟时间的限制。通过使用简单的变形过程形成一次性塑料芯片已经克服了这种限制，其中通过静水压力使一个或多个塑料片材与合适的模具的表面一致。在给定的一次性芯片已经充满液体样品之后，它与一个加热块阵列紧密接触，该加热块在其自己的室内密封每个样品，然后根据需要对每个样品进行热处理。

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