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1. 发明授权

US09298106B1 Wafer stage with reciprocating wafer stage actuation control 有权
标题翻译：晶圆台采用往复式晶片台致动控制
公开(公告)号：US09298106B1
公开(公告)日：2016-03-29
申请号：US13606951
申请日：2012-09-07
申请人： Upendra Ummethala , Marek Zywno , Layton Hale
发明人： Upendra Ummethala , Marek Zywno , Layton Hale
IPC分类号： G03F7/20 , H01L21/68
CPC分类号： G03F7/70758 , G03F7/70725 , G03F7/70775 , H01L21/68
摘要： A wafer stage system with reciprocating wafer stage actuation control may include a wafer stage, a motor configured to actuate the wafer stage in a first and/or second direction along an axis, a first reciprocating mechanism configured to decelerate the wafer stage after the wafer stage is actuated to a desired position in the first direction, the first reciprocating mechanism configured to store energy captured while decelerating the wafer stage in the first direction, the first reciprocating mechanism configured to accelerate the wafer stage in the second direction, and a second reciprocating mechanism configured to decelerate the wafer stage after the wafer stage is actuated to a desired position in the second direction, the second reciprocating mechanism configured to store energy captured while decelerating the wafer stage in the second direction, the second reciprocating mechanism further configured to accelerate the wafer stage in the first direction.
摘要翻译：具有往复式晶片台致动控制的晶片台系统可以包括晶片台，被配置为沿着轴线沿第一和/或第二方向致动晶片台的电动机，第一往复运动机构，其被配置为在晶片台之后减速晶片台所述第一往复运动机构被配置为在第一方向减速晶片台时存储捕获的能量，所述第一往复运动机构构造成在第二方向上加速所述晶片台;以及第二往复运动机构被配置为在所述晶片台被致动到所述第二方向上的期望位置之后使所述晶片台减速，所述第二往复运动机构构造成存储在第二方向减速所述晶片台时所捕获的能量，所述第二往复运动机构进一步构造成加速所述晶片在第一个方向的阶段。

2. 发明授权

US09690213B2 Linear Stage for reflective electron beam lithography 有权
公开(公告)号：US09690213B2
公开(公告)日：2017-06-27
申请号：US13824079
申请日：2012-09-06
申请人： Upendra Ummethala , Layton Hale , Joshua Clyne , Samir Nayfeh , Mark Williams , Joseph A. Di Regolo , Andrew Wilson
发明人： Upendra Ummethala , Layton Hale , Joshua Clyne , Samir Nayfeh , Mark Williams , Joseph A. Di Regolo , Andrew Wilson
IPC分类号： G03F7/20 , H01J37/20 , H01J37/317 , B82Y10/00 , B82Y40/00
CPC分类号： G03F7/70716 , B82Y10/00 , B82Y40/00 , G03F7/70758 , G03F7/70766 , H01J37/20 , H01J37/3174 , H01J2237/20221 , H01J2237/31774 , H01J2237/31789
摘要： A linear stacked stage suitable for REBL may include a first upper fast stage configured to translate a first plurality of wafers in a first direction along a first axis, the first upper fast stage configured to secure a first plurality of wafers; a second upper fast stage configured to translate a second plurality of wafers in a second direction along the first axis, the second upper fast stage configured to secure the second plurality of wafers, the second direction opposite to the first direction, wherein the translation of the first upper fast stage and the translation of the second upper fast stage are configured to substantially eliminate inertial reaction forces generated by motion of the first upper fast stage and the second upper fast stage; and a carrier stage configured to translate the first and second upper fast stages along a second axis.

3. 发明申请

US20130293865A1 Linear Stage for Reflective Electron Beam Lithography 有权
标题翻译：反射电子束光刻线性阶段
公开(公告)号：US20130293865A1
公开(公告)日：2013-11-07
申请号：US13824079
申请日：2012-09-06
申请人： Upendra Ummethala , Layton Hale , Joshua Clyne , Samir Nayfeh , Mark Williams , Joseph A. Di Regolo , Andrew Wilson
发明人： Upendra Ummethala , Layton Hale , Joshua Clyne , Samir Nayfeh , Mark Williams , Joseph A. Di Regolo , Andrew Wilson
IPC分类号： G03F7/20
CPC分类号： G03F7/70716 , B82Y10/00 , B82Y40/00 , G03F7/70758 , G03F7/70766 , H01J37/20 , H01J37/3174 , H01J2237/20221 , H01J2237/31774 , H01J2237/31789
摘要： A linear stacked stage suitable for REBL may include a first upper fast stage configured to translate a first plurality of wafers in a first direction along a first axis, the first upper fast stage configured to secure a first plurality of wafers; a second upper fast stage configured to translate a second plurality of wafers in a second direction along the first axis, the second upper fast stage configured to secure the second plurality of wafers, the second direction opposite to the first direction, wherein the translation of the first upper fast stage and the translation of the second upper fast stage are configured to substantially eliminate inertial reaction forces generated by motion of the first upper fast stage and the second upper fast stage; and a carrier stage configured to translate the first and second upper fast stages along a second axis.
摘要翻译：适用于REBL的线性堆叠级可以包括第一上部快速级，其被配置为沿着第一轴沿第一方向平移第一多个晶片，所述第一上部快速级被配置为固定第一多个晶片; 第二上快速级，被配置为沿第一轴在第二方向上平移第二多个晶片，第二上快速级被配置为固定第二多个晶片，第二方向与第一方向相反，其中，第一上快速阶段和第二上快速阶段的平移被配置为基本上消除由第一上快速阶段和第二上快速阶段的运动产生的惯性反作用力; 以及载体台，其构造成沿着第二轴平移所述第一和第二上部快速级。

4. 发明申请

US20140136048A1 ACCELEROMETER LEVELING 有权
标题翻译：加速度调节
公开(公告)号：US20140136048A1
公开(公告)日：2014-05-15
申请号：US13676582
申请日：2012-11-14
申请人： Upendra Ummethala , David J. Warkentin
发明人： Upendra Ummethala , David J. Warkentin
IPC分类号： G01P21/00
CPC分类号： G01P21/00
摘要： In an aspect, in general, a system and method compensate for a misalignment characteristic of one or more acceleration sensors fixed to a sprung mass of a vehicle, each acceleration sensor having a location on the vehicle and a desired orientation relative to the vehicle.
摘要翻译：在一方面，一般来说，系统和方法补偿固定在车辆弹簧质量上的一个或多个加速度传感器的不对准特性，每个加速度传感器具有车辆上的位置和相对于车辆的期望取向。

5. 发明申请

US20060095180A1 Active suspending 有权
标题翻译：主动暂停
公开(公告)号：US20060095180A1
公开(公告)日：2006-05-04
申请号：US10978105
申请日：2004-10-29
申请人： Upendra Ummethala , James Parison , Thomas Schroeder , Daniel Opila , Linda Ystueta , Roman Litovsky
发明人： Upendra Ummethala , James Parison , Thomas Schroeder , Daniel Opila , Linda Ystueta , Roman Litovsky
IPC分类号： B60G17/018 , G06F17/00
CPC分类号： B60N2/501 , B60N2/502 , B60N2/505 , B60N2/507 , B60N2/508 , B60N2/509 , B60N2/544 , B60N2002/0212 , F16M13/00
摘要： A method for actively suspending a real plant in a vehicle includes modifying a control signal on the basis of a difference between a property of the real plant, as indicated by the response of the real plant to the control signal, and a property of a nominal plant.
摘要翻译：一种用于主动地将实际工厂悬挂在车辆中的方法包括：根据实际工厂的特性与控制信号的反应，以及正常工厂的特性之间的差异来修改控制信号厂。

6. 发明授权

US06922301B1 Positioner of a disk drive that positions a data transducer with reduced vibration 失效
标题翻译：磁盘驱动器的定位器，其定位具有减小振动的数据传感器
公开(公告)号：US06922301B1
公开(公告)日：2005-07-26
申请号：US10263222
申请日：2002-10-02
申请人： Larry Wittig , Stanislaw Dobosz , Upendra Ummethala
发明人： Larry Wittig , Stanislaw Dobosz , Upendra Ummethala
IPC分类号： G11B5/48 , G11B5/55 , G11B21/02
CPC分类号： G11B5/4833 , G11B5/5569
摘要： A disk drive includes a head stack assembly having a storage disk, a data transducer, an actuator pivot center and a positioner. The positioner includes a magnet assembly, a primary coil array that generates a first rotational displacement of the data transducer, and a secondary coil array that generates a second rotational displacement of the data transducer. The absolute value of the ratio of the first rotational displacement to the second rotational displacement is at least approximately 1.5:1. The primary coil array generates a first vibration displacement that causes the data transducer to move off track, and the secondary coil array generates a second vibration displacement that is out of phase from the first vibration displacement. The absolute value of the sum of the first and second vibration displacements is less than the absolute value of the first vibration displacement. The disk drive can also include a control system that directs a first current to the primary coil array and a second current to the secondary coil array that is out of phase from the first current. The secondary coil array can include a proximal coil and a distal coil, with the proximal coil being positioned closer to the actuator pivot center than the distal coil. Further, only a portion of at least one of the coils is positioned directly between the magnet arrays. In another embodiment, the head stack assembly includes a latitudinal axis that divides the head stack assembly into a positioner region and a transducer region. The secondary coil array is positioned substantially within the positioner region of the head stack assembly. The positioner generates a primary force and a secondary force that combine to generate a constant net force in a direction along the longitudinal axis while the data transducer moves between the inner diameter and the outer diameter.
摘要翻译：磁盘驱动器包括具有存储盘，数据传感器，致动器枢轴中心和定位器的磁头堆叠组件。定位器包括磁体组件，产生数据换能器的第一旋转位移的初级线圈阵列和产生数据换能器的第二旋转位移的次级线圈阵列。第一旋转位移与第二旋转位移的比率的绝对值为至少约1.5:1。初级线圈阵列产生使数据换能器离开轨道的第一振动位移，并且次级线圈阵列产生与第一振动位移异相的第二振动位移。第一和第二振动位移之和的绝对值小于第一振动位移的绝对值。磁盘驱动器还可以包括将第一电流引导到初级线圈阵列的控制系统和与第一电流异相的次级线圈阵列的第二电流。次级线圈阵列可以包括近端线圈和远端线圈，其中近端线圈被定位成比远端线圈更靠近致动器枢转中心。此外，只有至少一个线圈的一部分直接位于磁体阵列之间。在另一个实施例中，头部堆叠组件包括将顶部堆叠组件分成定位器区域和换能器区域的纬向轴线。次级线圈阵列基本位于头部组合组件的定位器区域内。定位器产生一次力和二次力，其组合以在沿着纵向轴线的方向上产生恒定的净力，同时数据换能器在内径和外径之间移动。

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