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1. 发明申请

WO2003027011A3 CATALYST-INDUCED GROWTH OF CARBON NANOTUBES ON TIPS OF CANTILEVERS AND NANOWIRES 审中-公开
公开(公告)号：WO2003027011A3
公开(公告)日：2003-04-03
申请号：PCT/US2002/017237
申请日：2002-06-03
申请人： UT-BATTELLE, LLC , UNIVERSITY OF TENNESSEE RESEARCH FOUNDATION
发明人： LEE, Ida , LEE, James, Weifu , LOWNDES, Douglas, H. , MERKULOV, Vladimir, I. , ERES, Gyula , WEI, Yayi , GREENBAUM, Elias
IPC分类号： C01B31/02
摘要： A method is described for catalyst-induced growth of carbon nanotubes, nanofibers, and other nanostructures on the tips of nanowires, cantilevers, conductive micro/nanometer structures, wafers and the like. The method can be used for production of carbon nanotube-anchored cantilevers that can significantly improve the performance of scanning probe microscopy (AFM, EFM, etc.). The invention can also be used in many other processes of micro and/or nanofabrication with carbon nanotubes/fibers. Key elements of this invention include: (1) proper selection of a metal catalyst and programmable pulsed electrolytic deposition of the desired specific catalyst precisely at the tip of a substrate; (2) catalyst-induced growth of carbon nanotubes/fibers at the catalyst-deposited tips; (3) control of carbon nanotube/fiber growth pattern by manipulation of tip shape and growth conditions; and (4) automation for mass production.

2. 发明公开

EP1399385A2 CATALYST-INDUCED GROWTH OF CARBON NANOTUBES ON TIPS OF CANTILEVERS AND NANOWIRES 审中-公开
标题翻译： ON繁荣和纳米线的峰值碳纳米管催化剂的影响增长
公开(公告)号：EP1399385A2
公开(公告)日：2004-03-24
申请号：EP02799546.3
申请日：2002-06-03
申请人： UT-Battelle, LLC , University of Tennessee Research Foundation
发明人： LEE, Ida , LEE, James, Weifu , LOWNDES, Douglas, H. , MERKULOV, Vladimir, I. , ERES, Gyula , WEI, Yayi , GREENBAUM, Elias
IPC分类号： C01B31/02
CPC分类号： C25D21/12 , C01B32/162 , C01B32/18 , C01B2202/02 , C01B2202/06 , C25D1/02 , C25D5/18 , C25D7/00 , C25D7/0607 , G01Q70/12 , Y10S977/762 , Y10S977/843 , Y10S977/873 , Y10S977/876 , Y10T428/31504
摘要： A method is described for catalyst-induced growth of carbon nanotubes, nanofibers, and other nanostructures on the tips of nanowires, cantilevers, conductive micro/nanometer structures, wafers and the like. The method can be used for production of carbon nanotube-anchored cantilevers that can significantly improve the performance of scanning probe microscopy (AFM, EFM, etc.). The invention can also be used in many other processes of micro and/or nanofabrication with carbon nanotubes/fibers. Key elements of this invention include: (1) proper selection of a metal catalyst and programmable pulsed electrolytic deposition of the desired specific catalyst precisely at the tip of a substrate; (2) catalyst-induced growth of carbon nanotubes/fibers at the catalyst-deposited tips; (3) control of carbon nanotube/fiber growth pattern by manipulation of tip shape and growth conditions; and (4) automation for mass production.

3. 发明申请

WO2004000003A3 CONTROLLED ALIGNMENT OF CATALYTICALLY GROWN NANOSTRUCTURES IN A LARGE-SCALE SYNTHESIS PROCESS 审中-公开
公开(公告)号：WO2004000003A3
公开(公告)日：2003-12-31
申请号：PCT/US2003/003387
申请日：2003-02-05
申请人： UT-BATTELLE, LLC , MERKULOV, Vladimir, I. , MELECHKO, Anatoli, V. , GUILLORN, Michael, A. , LOWNDES, Douglas, H. , SIMPSON, Michael, L.
发明人： MERKULOV, Vladimir, I. , MELECHKO, Anatoli, V. , GUILLORN, Michael, A. , LOWNDES, Douglas, H. , SIMPSON, Michael, L.
IPC分类号： B82B1/00
摘要： Systems and methods are described for controlled alignment of catalytically grown nanostructures in a large-scale synthesis process. A method includes: generating an electric field proximate an edge of a protruding section of an electrode, the electric field defining a vector; and forming an elongated nanostructure located at a position on a surface of a substrate, the position on the surface of the substrate proximate the edge of the protruding section of the electrode, at least one tangent to the elongated nanostructure i) substantially parallel to the vector defined by the electric field and ii) substantially non-parallel to a normal defined by the surface of the substrate.

4. 发明申请

WO2002068754A2 CARBON TIPS WITH EXPANDED BASES 审中-公开
标题翻译：碳扩展基础的小贴士
公开(公告)号：WO2002068754A2
公开(公告)日：2002-09-06
申请号：PCT/US2002/005848
申请日：2002-02-27
申请人： UT BATTELLE, LLC , MERKULOV, Vladimir, I. , LOWNDES, Douglas, H. , GUILLORN, Michael, A. , SIMPSON, Michael, L.
发明人： MERKULOV, Vladimir, I. , LOWNDES, Douglas, H. , GUILLORN, Michael, A. , SIMPSON, Michael, L.
IPC分类号： D21F
CPC分类号： H01J1/3044 , B82Y15/00 , H01J9/025 , H01J2201/30446 , Y10S977/939
摘要： Systems and methods are described for carbon tips with expanded bases. A method includes producing an expanded based carbon containing tip including: fabricating a carbon containing expanded base on a substrate; and then fabricating a carbon containing fiber on the expanded base. An apparatus includes a carbon containing expanded base coupled to a substrate; and a carbon containing fiber coupled to said carbon containing expanded base.
摘要翻译：描述了具有扩展的碱基的碳尖端的系统和方法。一种方法包括：制造膨胀型含碳尖端，所述尖端包括：在基底上制造含碳膨胀基底; 然后在膨胀基底上制造含碳纤维。一种装置包括：与基底偶联的含碳膨胀基底; 和与所述含碳膨胀碱结合的含碳纤维。

5. 发明申请

WO2004006278A3 NANOSTRUCTURE FIELD EMISSION CATHODE 审中-公开
公开(公告)号：WO2004006278A3
公开(公告)日：2004-01-15
申请号：PCT/US2002/016423
申请日：2002-05-28
申请人： UT-BATTELLE, LLC , GUILLORN, Michael, A. , SIMPSON, Michael, L. , MERKULOV, Vladimir, I. , MELECHKO, Anatoli, V. , LOWNDES, Douglas, H.
发明人： GUILLORN, Michael, A. , SIMPSON, Michael, L. , MERKULOV, Vladimir, I. , MELECHKO, Anatoli, V. , LOWNDES, Douglas, H.
IPC分类号： H01K1/02
摘要： Gated field emission devices and systems and methods for their fabrication are described. A method includes growing a substantially vertically aligned carbon nanostructure (720), the substantially vertically aligned carbon nanostructure (720) coupled to a substrate; covering at least a portion of the substantially vertically aligned carbon nanostructure (720) with a dielectric; forming a gate, the gate coupled to the dielectric; and releasing the substantially vertically aligned carbon nanostructure (720) by forming an aperture in the gate and removing a portion of the dielectric.

6. 发明授权

EP1314176B1 FIELD EMISSION DEVICES HAVING CARBON CONTAINING TIPS 有权
标题翻译：与现场炭素TIPS发射装置
公开(公告)号：EP1314176B1
公开(公告)日：2006-08-30
申请号：EP01962116.8
申请日：2001-08-09
申请人： UT Battelle, LLC
发明人： MERKULOV, Vladimir, I. , LOWNDES, Douglas, H. , GUILLORN, Michael, A. , SIMPSON, Michael, L. , BRITTON, Charles, L.
IPC分类号： H01J9/02
CPC分类号： B82Y10/00 , H01J3/022 , H01J9/025 , H01J2201/30469 , Y10S977/843 , Y10S977/847 , Y10S977/891
摘要： Systems and methods are described for field emission devices having carbon nanofiber emitters. A method, includes: providing a substance; depositing a catalyst, the catalyst coupled to the substrate; depositing a dielectric layer, the dielectric layer coupled to the substrate; depositing an a dielectric layer, the dielectric layer coupled to the substrate; depositing an extractor layer, the extractor layer coupled to the dielectric layer; forming an extractor aperture in the extractor layer; forming dielectric well in the dielectric layer to uncover at least a portion of the catalyst; and then fabricating a carbon containing tip (i) having a base located substantially at the bottom of the dielectric well and (ii) extending substantially away from the substrate. An apparatus, includes: a substrate; an electrode structure coupled to the substrate, the electrode structure including a dielectric layer coupled to the substrate, the dielectric layer including a dielectric well that is formed in the dielectric layer after the dielectric layer is deposited; and an extractor layer coupled to the dielectric layer, the extractor layer including an extractor aperture; and a carbon containing tip coupled to the substrate, the carbon containing tip having a base located substantially at a bottom of the dielectric well and extending substantially away form the substrate, the carbon containing tip being grown from the bottom of the dielectric well using a catalyst that is introduced at the bottom of the dielectric well is formed. A method, includes: providing a substrate on a heater plate in a vacuum chamber; providing a carbon source gas and an etchant gas; heating the substrate with the heater plate; and then fabricating a carbon tip on the substrate with the carbon source gas and the etchant gas using plasma enhanced chemical vapor.

7. 发明公开

EP1515700A2 CONTROLLED ALIGNMENT OF CATALYTICALLY GROWN NANOSTRUCTURES IN A LARGE-SCALE SYNTHESIS PROCESS 审中-公开
标题翻译：催化的受控调整而产生性纳米结构合成程序规模较大
公开(公告)号：EP1515700A2
公开(公告)日：2005-03-23
申请号：EP03751736.4
申请日：2003-02-05
申请人： UT-Battelle, LLC
发明人： MELECHKO, Anatoli, V. , GUILLORN, Michael, A. , LOWNDES, Douglas, H. , SIMPSON, Michael, L. , MERKULOV, Vladimir I.
IPC分类号： A61K9/14
CPC分类号： G01N33/5438 , B82Y30/00 , B82Y40/00 , C01B32/162 , C01B2202/08 , D01F9/127 , Y10S977/843 , Y10S977/891 , Y10S977/943 , Y10T428/24628
摘要： Systems and methods are described for controlled alignment of catalytically grown nanostructures in a large-scale synthesis process. A method includes: generating an electric field proximate an edge of a protruding section of an electrode, the electric field defining a vector; and forming an elongated nanostructure located at a position on a surface of a substrate, the position on the surface of the substrate proximate the edge of the protruding section of the electrode, at least one tangent to the elongated nanostructure i) substantially parallel to the vector defined by the electric field and ii) substantially non-parallel to a normal defined by the surface of the substrate.

8. 发明公开

EP1314176A2 FIELD EMISSION DEVICES HAVING CARBON CONTAINING TIPS 有权
标题翻译：与现场炭素TIPS发射装置
公开(公告)号：EP1314176A2
公开(公告)日：2003-05-28
申请号：EP01962116.8
申请日：2001-08-09
申请人： UT Battelle, LLC
发明人： MERKULOV, Vladimir, I. , LOWNDES, Douglas, H. , GUILLORN, Michael, A. , SIMPSON, Michael, L. , BRITTON, Charles, L.
IPC分类号： H01J9/02
CPC分类号： B82Y10/00 , H01J3/022 , H01J9/025 , H01J2201/30469 , Y10S977/843 , Y10S977/847 , Y10S977/891
摘要： Systems and methods are described for field emission devices having carbon nanofiber emitters. A method, includes: providing a substance; depositing a catalyst, the catalyst coupled to the substrate; depositing a dielectric layer, the dielectric layer coupled to the substrate; depositing an a dielectric layer, the dielectric layer coupled to the substrate; depositing an extractor layer, the extractor layer coupled to the dielectric layer; forming an extractor aperture in the extractor layer; forming dielectric well in the dielectric layer to uncover at least a portion of the catalyst; and then fabricating a carbon containing tip (i) having a base located substantially at the bottom of the dielectric well and (ii) extending substantially away from the substrate. An apparatus, includes: a substrate; an electrode structure coupled to the substrate, the electrode structure including a dielectric layer coupled to the substrate, the dielectric layer including a dielectric well that is formed in the dielectric layer after the dielectric layer is deposited; and an extractor layer coupled to the dielectric layer, the extractor layer including an extractor aperture; and a carbon containing tip coupled to the substrate, the carbon containing tip having a base located substantially at a bottom of the dielectric well and extending substantially away form the substrate, the carbon containing tip being grown from the bottom of the dielectric well using a catalyst that is introduced at the bottom of the dielectric well is formed. A method, includes: providing a substrate on a heater plate in a vacuum chamber; providing a carbon source gas and an etchant gas; heating the substrate with the heater plate; and then fabricating a carbon tip on the substrate with the carbon source gas and the etchant gas using plasma enhanced chemical vapor.

9. 发明申请

WO2004000003A2 CONTROLLED ALIGNMENT OF CATALYTICALLY GROWN NANOSTRUCTURES IN A LARGE-SCALE SYNTHESIS PROCESS 审中-公开
标题翻译：大规模合成过程中催化还原纳米结构的控制对准
公开(公告)号：WO2004000003A2
公开(公告)日：2003-12-31
申请号：PCT/US2003/003387
申请日：2003-02-05
申请人： UT-BATTELLE, LLC , MERKULOV , MELECHKO, Anatoli, V. , GUILLORN, Michael, A. , LOWNDES, Douglas, H. , SIMPSON, Michael, L.
发明人： MELECHKO, Anatoli, V. , GUILLORN, Michael, A. , LOWNDES, Douglas, H. , SIMPSON, Michael, L.
IPC分类号： A61K9/14 , B82B1/00 , C01B31/02 , C23C16/26 , D01F9/127 , G01N33/543 , H01J1/304 , H01J1/62 , H01J37/32 , H01L21/44 , H01L21/8234 , H01L21/8244 , H01L29/06 , H01L31/0328 , H01L31/0336 , H01L31/072 , H01L31/109
CPC分类号： G01N33/5438 , B82Y30/00 , B82Y40/00 , C01B32/162 , C01B2202/08 , D01F9/127 , Y10S977/843 , Y10S977/891 , Y10S977/943 , Y10T428/24628
摘要： Systems and methods are described for controlled alignment of catalytically grown nanostructures in a large-scale synthesis process. A method includes: generating an electric field proximate an edge of a protruding section of an electrode, the electric field defining a vector; and forming an elongated nanostructure located at a position on a surface of a substrate, the position on the surface of the substrate proximate the edge of the protruding section of the electrode, at least one tangent to the elongated nanostructure i) substantially parallel to the vector defined by the electric field and ii) substantially non-parallel to a normal defined by the surface of the substrate.
摘要翻译：描述了用于在大规模合成过程中催化生长的纳米结构的受控比对的系统和方法。一种方法包括：在电极的突出部分的边缘附近产生电场，所述电场限定矢量; 以及形成位于基底表面上的位置处的细长纳米结构，所述基底表面上靠近所述电极的突出部分的边缘的位置，至少一个细长纳米结构的切线i）基本上平行于所述载体由电场限定，ii）基本上不平行于由衬底的表面限定的法线。

10. 发明申请

WO2002068754A3 CARBON TIPS WITH EXPANDED BASES 审中-公开
公开(公告)号：WO2002068754A3
公开(公告)日：2002-09-06
申请号：PCT/US2002/005848
申请日：2002-02-27
申请人： UT BATTELLE, LLC , MERKULOV, Vladimir, I. , LOWNDES, Douglas, H. , GUILLORN, Michael, A. , SIMPSON, Michael, L.
发明人： MERKULOV, Vladimir, I. , LOWNDES, Douglas, H. , GUILLORN, Michael, A. , SIMPSON, Michael, L.
IPC分类号： H01L51/40
摘要： Systems and methods are described for carbon tips (VACNF) with expanded bases (CNC). A method includes producing an expanded base (CNC) carbon containing tip (VACNF) including: fabricating a carbon containing expanded base (CNC) on a substrate (110); and then fabricating a carbon containing fiber (VACNF) on the expanded base (CNC). An apparatus includes a carbon containing expanded base (CNC) coupled to a substrate (110); and a carbon containing fiber (VACNF) coupled to said carbon containing expanded base (CNC).

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