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    • 3. 发明申请
    • MONOLITHICALLY COMPATIBLE IMPEDANCE MEASUREMENT
    • 单一相容阻抗测量
    • WO0188519A2
    • 2001-11-22
    • PCT/US0114534
    • 2001-05-07
    • UT BATTELLE LLC
    • ERICSON MILTON NANCEHOLCOMB DAVID EUGENE
    • G01N27/02G01N27/04G01N27/22G01N27/00
    • G01N27/221G01N33/28
    • A monolithic sensor includes a reference channel and at least one sensing channel. Each sensing channel has an oscillator and a counter driven by the oscillator. The reference channel and the at least one sensing channel being formed integrally with a substrate and intimately nested with one another on the substrate. Thus, the oscillator and the counter have matched component values and temperature coefficients. A frequency determining component of the sensing oscillator is formed integrally with the substrate and has an impedance parameter which varies with an environmental parameter to be measured by the sensor. A gating control is responsive to an output signal generated by the reference channel, for terminating counting in the at least one sensing channel at an output count, whereby the output count is indicative of the environmental parameter, and successive ones of the output counts are indicative of changes in the environmental parameter.
    • 单片传感器包括参考通道和至少一个感测通道。 每个感测通道都有一个振荡器和一个由振荡器驱动的计数器。 所述参考通道和所述至少一个感测通道与基底一体地形成并且在所述基底上彼此紧密地嵌套。 因此,振荡器和计数器具有匹配的分量值和温度系数。 感测振荡器的频率确定部件与基板一体形成,并且具有随传感器要测量的环境参数而变化的阻抗参数。 选通控制响应于由参考通道产生的输出信号,用于以输出计数终止在至少一个感测通道中的计数,由此输出计数指示环境参数,并且输出计数中的连续输出计数是指示 的环境参数变化。