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1. 发明申请

WO2003025603A1 SCANNING SQUID MICROSCOPE WITH IMPROVED SPATIAL RESOLUTION 审中-公开
标题翻译：具有改进的空间分辨率的扫描SQUID MICROSCOPE
公开(公告)号：WO2003025603A1
公开(公告)日：2003-03-27
申请号：PCT/US2001/026024
申请日：2001-09-14
申请人： UNIVERSITY OF MARYLAND, COLLEGE PARK , WELLSTOOD, Fred , CHATRAPHORN, Sojiphong , FLEET, Erin
发明人： WELLSTOOD, Fred , CHATRAPHORN, Sojiphong , FLEET, Erin
IPC分类号： G01R33/035
CPC分类号： G01R33/0358 , G01Q60/54 , G01R33/0385
摘要： A scanning SQUID microscope (30) for acquiring spatially resolved images of physical properties of an object (84) includes a SQUID sensor (56) arranged in perpendicular to the plane of the object under investigation for detecting tangential component of the magnetic field generated by the object. During scanning of the SQUID sensor (56) over the object (84) under investigation, the position signal from a position interpreting unit, as well as relevant output signals from the SQUID sensor (56) are processed by a processing unit which derives from the data, spatially resolved images of the physical properties of the object. The specific orientation of the SQUID sensor (56) with respect to the plane of the object (84) permits an enlarged area of the SQUID chip on which the modulation and feedback line (100) can be fabricated in the same technological process with the SQUID sensor. Additionally, larger contact pads (120) afforded provide for lower contact resistance and ease in forming contact with bias and read-out wires.
摘要翻译：用于获取物体（84）的物理性质的空间分辨图像的扫描SQUID显微镜（30）包括垂直于所研究对象的平面布置的SQUID传感器（56），用于检测由所述物体（84）产生的磁场的切向分量目的。在被调查的物体（84）上扫描SQUID传感器（56）之前，来自位置解释单元的位置信号以及来自SQUID传感器（56）的相关输出信号由处理单元处理，该处理单元从数据，空间分辨图像的物体的物理属性。 SQUID传感器（56）相对于物体（84）的平面的特定取向允许在与SQUID相同的工艺过程中可以在其上制造调制和反馈线（100）的SQUID芯片的放大区域传感器。此外，提供的更大的接触焊盘（120）提供较低的接触电阻并且容易与偏压和读出导线形成接触。

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