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    • 1. 发明申请
    • Flow Sensor, Method for Manufacturing Flow Sensor and Flow Sensor Module
    • 流量传感器,流量传感器和流量传感器模块的制造方法
    • US20110140211A1
    • 2011-06-16
    • US12964935
    • 2010-12-10
    • Tsutomu KONOYuuki OkamotoTakeshi MorinoKeiji Hanzawa
    • Tsutomu KONOYuuki OkamotoTakeshi MorinoKeiji Hanzawa
    • H01L29/84H01L21/50
    • G01F15/16G01F1/684G01F1/6842G01F1/692H01L23/495H01L29/84H01L2224/45144H01L2224/48091H01L2224/48227H01L2224/49171H01L2224/73265H01L2924/00014H01L2924/00
    • The invention provides a flow sensor structure for sealing the surface of an electric control circuit and a part of a semiconductor device via a manufacturing method capable of preventing occurrence of flash or chip crack when clamping the semiconductor device via a mold. The invention provides a flow sensor structure comprising a semiconductor device having an air flow sensing unit and a diaphragm formed thereto, and a board or a lead frame having an electric control circuit for controlling the semiconductor device disposed thereto, wherein a surface of the electric control circuit and a part of a surface of the semiconductor device is covered with resin while having the air flow sensing unit portion exposed. The invention further provides flow sensor structure in which surfaces of a resin mold, a board or a pre-mold component surrounding the semiconductor device are continuously not in contact with three walls of the semiconductor device orthogonal to a side on which the air flow sensing unit portion is disposed, or a manufacturing method for absorbing the dimensional variation of the semiconductor device by the deformation of springs or deformation of an elastic film in the thickness direction.
    • 本发明提供了一种流量传感器结构,用于经由模具夹紧半导体器件时能够防止发生闪光或芯片裂纹的制造方法来密封电气控制电路和半导体器件的一部分的表面。 本发明提供了一种流量传感器结构,其包括具有气流检测单元和形成于其上的隔膜的半导体器件,以及具有用于控制设置在其上的半导体器件的电气控制电路的电路板或引线框架,其中, 电路和半导体器件的表面的一部分被树脂覆盖,同时使空气流感测单元部分暴露。 本发明还提供了一种流量传感器结构,其中围绕半导体器件的树脂模具,板或预模具部件的表面不连续地与半导体器件的三个壁接触,该壁与空气流量检测单元 或者通过弹簧的变形或弹性膜在厚度方向的变形来吸收半导体器件的尺寸变化的制造方法。