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    • 7. 发明授权
    • Composition and method for forming Ba.sub.1-X Sr.sub.x Ti.sub.y O.sub.3
thin films
    • Ba1-XSrxTiyO3薄膜的组成和方法
    • US5645634A
    • 1997-07-08
    • US661115
    • 1996-06-10
    • Katumi OgiTadashi YonezawaTsutomu AtsukiKeiko Endo
    • Katumi OgiTadashi YonezawaTsutomu AtsukiKeiko Endo
    • C01G23/00C04B35/465C04B35/46
    • C23C18/1216C04B35/465
    • A composition comprising Ba and Sr salts of carboxylic acids represented by the formula: C.sub.n H.sub.2n+1 COOH wherein 3.ltoreq.n.ltoreq.7, and having structures represented by the following formula (I): ##STR1## wherein R.sup.1, R.sup.2, R.sup.3, R.sup.4, R.sup.5 and R.sup.6 each represent a hydrogen atom, a methyl group or an ethyl group, and M represents Ba or Sr, can be used to form thin films of Ba.sub.1-x Sr.sub.x Ti.sub.y O.sub.3. A composition comprising a barium carboxylate, a strontium carboxylate and a titanium alkoxide in a mixed solvent of a carboxylic acid and an ester, can also be used to form Ba.sub.1-x Sr.sub.x Ti.sub.y O.sub.3 thin films. The proportion of the mixed solvent is 2-11 molar times as much as the Ti. A composition comprising salts of carboxylic acids represented by R.sup.a COOH wherein R.sup.a is a linear or branched alkyl group having 3-7 carbon atoms, as the Ba and Sr sources, and Ti(OR.sup.b).sub.4 wherein R.sup.b is a linear or branched alkyl group having 1-7 carbon atoms, as the Ti source, can also be used to form thin films of Ba.sub.1-x Sr.sub.x TiO.sub.3.
    • 一种组合物,其包含由式CnH2n + 1COOH表示的羧酸的Ba和Sr盐,其中3≤n≤7,并具有由下式(I)表示的结构:其中R1, R2,R3,R4,R5和R6各自表示氢原子,甲基或乙基,M表示Ba或Sr可用于形成Ba1-xSrxTiyO3的薄膜。 在羧酸和酯的混合溶剂中,包含羧酸钡,羧酸锶和烷氧化钛的组合物也可用于形成Ba1-xSrxTiyO3薄膜。 混合溶剂的比例为Ti的2-11摩尔倍。 一种组合物,其包含由RaCOOH表示的羧酸盐,其中Ra是具有3-7个碳原子的直链或支链烷基作为Ba和Sr源,以及Ti(ORb)4,其中Rb是具有1个直链或支链烷基的直链或支链烷基 -7碳原子作为Ti源也可用于形成Ba1-xSrxTiO3的薄膜。