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1. 发明授权

US5530673A Flash memory control method and information processing system therewith 失效
标题翻译：闪存控制方法和信息处理系统
公开(公告)号：US5530673A
公开(公告)日：1996-06-25
申请号：US225313
申请日：1994-04-08
申请人： Tsunehiro Tobita , Jun Kitahara , Takashi Tsunehiro , Kunihiro Katayama , Ryuichi Hattori , Yukihiro Seki , Hajime Yamagami , Takashi Totsuka , Takeshi Wada , Yosio Takaya , Manabu Saito , Kenichi Kaki , Takao Okubo , Takashi Kikuchi , Masamichi Kishi , Takeshi Suzuki , Shigeru Kadowaki
发明人： Tsunehiro Tobita , Jun Kitahara , Takashi Tsunehiro , Kunihiro Katayama , Ryuichi Hattori , Yukihiro Seki , Hajime Yamagami , Takashi Totsuka , Takeshi Wada , Yosio Takaya , Manabu Saito , Kenichi Kaki , Takao Okubo , Takashi Kikuchi , Masamichi Kishi , Takeshi Suzuki , Shigeru Kadowaki
IPC分类号： G06F3/06 , G06F11/14 , G06F12/08 , G11C29/00 , G11C16/06 , G06F12/16
CPC分类号： G11C29/765 , G06F11/1433 , G06F11/1441 , G06F12/08 , G06F12/0802 , G06F12/0866 , G06F3/0601 , G06F3/0613 , G06F3/0616 , G06F3/064 , G06F3/0644 , G06F3/0656 , G06F3/0679 , G06F3/068 , G11C29/789 , G11C29/82 , G06F2003/0694 , G06F2212/2022 , G06F2212/312
摘要： A control method and system when a flash memory is used as a semiconductor disk or a main memory in an information processing system. A semiconductor file system comprises a first nonvolatile memory electrically erasable, a second nonvolatile memory not electrically erasable, a volatile memory, a controller which controls the memories, and a control section which controls the controller wherein a physical address corresponding to a logical address specified from an external system is accessed. The first nonvolatile memory stores data for the external system to perform operations, first management information indicating the correspondence between physical addresses at which the data is stored and logical addresses, and second management information indicating a state of the first nonvolatile memory. The second nonvolatile memory previously stores interface information required for inputting and outputting the data from and to the external system and read-only data of the data. The controller comprises control means for determining a physical sector address forming predetermined high-order bits of the physical address when data is output from the first nonvolatile memory or when data is input to the volatile memory, means for storing the determined physical sector address, and means for consecutively generating addresses in a sector determined by the physical sector address.
摘要翻译：当闪存用作信息处理系统中的半导体盘或主存储器时的控制方法和系统。半导体文件系统包括电可擦除的第一非易失性存储器，不电可擦除的第二非易失性存储器，易失性存储器，控制存储器的控制器和控制控制器的控制部分，其中对应于由访问一个外部系统。第一非易失性存储器存储用于执行操作的外部系统的数据，指示存储数据的物理地址与逻辑地址之间的对应关系的第一管理信息，以及指示第一非易失性存储器的状态的第二管理信息。第二非易失性存储器预先存储从外部系统输入和输出数据所需的接口信息以及数据的只读数据。控制器包括控制装置，用于当数据从第一非易失性存储器输出时或当数据被输入到易失性存储器时，确定形成物理地址的预定高位的物理扇区地址，存储确定的物理扇区地址的装置，以及用于连续地产生由物理扇区地址确定的扇区中的地址的装置。

2. 发明授权

US06275436B1 Flash memory control method and apparatus processing system therewith 有权
公开(公告)号：US06275436B1
公开(公告)日：2001-08-14
申请号：US09577371
申请日：2000-05-23
申请人： Tsunehiro Tobita , Jun Kitahara , Takashi Tsunehiro , Kunihiro Katayama , Ryuichi Hattori , Yukihiro Seki , Hajime Yamagami , Takashi Totsuka , Takeshi Wada , Yosio Takaya , Manabu Saito , Kenichi Kaki , Takao Okubo , Takashi Kikuchi , Masamichi Kishi , Takeshi Suzuki , Shigeru Kadowaki
发明人： Tsunehiro Tobita , Jun Kitahara , Takashi Tsunehiro , Kunihiro Katayama , Ryuichi Hattori , Yukihiro Seki , Hajime Yamagami , Takashi Totsuka , Takeshi Wada , Yosio Takaya , Manabu Saito , Kenichi Kaki , Takao Okubo , Takashi Kikuchi , Masamichi Kishi , Takeshi Suzuki , Shigeru Kadowaki
IPC分类号： G11C800
CPC分类号： G11C29/765 , G06F3/0601 , G06F3/0613 , G06F3/0616 , G06F3/064 , G06F3/0644 , G06F3/0656 , G06F3/0679 , G06F3/068 , G06F11/1433 , G06F11/1441 , G06F12/08 , G06F12/0802 , G06F12/0866 , G06F2003/0694 , G06F2212/2022 , G06F2212/312 , G11C29/789 , G11C29/82
摘要： A control method and system when a flash memory is used. as a semiconductor disk or a main memory in an information processing system. A semiconductor file system comprises a first nonvolatile memory electrically erasable, a second nonvolatile memory not electrically erasable, a volatile memory, a controller which controls the memories, and a control section which controls the controller wherein a physical address corresponding to a logical address specified from an external system is accessed. The first nonvolatile memory stores data for the external system to perform operations, first management information indicating the correspondence between physical addresses at which the data is stored and logical addresses, and second management information indicating a state of the first nonvolatile memory. The second nonvolatile memory previously stores interface information required for inputting and outputting the data from and to the external system and read-only data of the data. The controller comprises control means for determining a physical sector address forming predetermined high-order bits of the physical address when data is output from the first nonvolatile memory or when data is input to the volatile memory, means for storing the determined physical sector address, and means for consecutively generating addresses in a sector determined by the physical sector address. The control section is responsive to the interface information, the first management information, and the second management information for controlling input/output of data from/to the external system and for temporarily storing write data into the first nonvolatile memory from the external system in the volatile memory and then transferring the write data from the volatile memory to the first nonvolatile memory. The consecutive address generation means and the sector address storage means output the physical sector address and the consecutively generated addresses to the first nonvolatile memory and the volatile memory when data at the physical sector address is output from the first nonvolatile memory or when data at the physical sector address is input to the volatile memory.

3. 发明授权

US5973964A Flash memory control method and information processing system therewith 有权
公开(公告)号：US5973964A
公开(公告)日：1999-10-26
申请号：US182630
申请日：1998-10-30
申请人： Tsunehiro Tobita , Jun Kitahara , Takashi Tsunehiro , Kunihiro Katayama , Ryuichi Hattori , Yukihiro Seki , Hajime Yamagami , Takashi Totsuka , Takeshi Wada , Yosio Takaya , Manabu Saito , Kenichi Kaki , Takao Okubo , Takashi Kikuchi , Masamichi Kishi , Takeshi Suzuki , Shigeru Kadowaki
发明人： Tsunehiro Tobita , Jun Kitahara , Takashi Tsunehiro , Kunihiro Katayama , Ryuichi Hattori , Yukihiro Seki , Hajime Yamagami , Takashi Totsuka , Takeshi Wada , Yosio Takaya , Manabu Saito , Kenichi Kaki , Takao Okubo , Takashi Kikuchi , Masamichi Kishi , Takeshi Suzuki , Shigeru Kadowaki
IPC分类号： G06F3/06 , G06F11/14 , G06F12/08 , G11C29/00 , G11C7/00
CPC分类号： G11C29/765 , G06F11/1433 , G06F11/1441 , G06F12/08 , G06F12/0802 , G06F12/0866 , G06F3/0601 , G06F3/0613 , G06F3/0616 , G06F3/064 , G06F3/0644 , G06F3/0656 , G06F3/0679 , G06F3/068 , G11C29/789 , G11C29/82 , G06F2003/0694 , G06F2212/2022 , G06F2212/312
摘要： A control method and system when a flash memory is used as a semiconductor disk or a main memory in an information processing system. A semiconductor file system comprises a first nonvolatile memory electrically erasable, a second nonvolatile memory not electrically erasable, a volatile memory, a controller which controls the memories, and a control section which controls the controller wherein a physical address corresponding to a logical address specified from an external system is accessed. The first nonvolatile memory stores data for the external system to perform operations, first management information indicating the correspondence between physical addresses at which the data is stored and logical addresses, and second management information indicating a state of the first nonvolatile memory. The second nonvolatile memory previously stores interface information required for inputting and outputting the data from and to the external system and read-only data of the data. The controller has a control means for determining a physical sector address forming predetermined high-order bits of the physical address when data is output from the first nonvolatile memory or when data is input to the volatile memory, means for storing the determined physical sector address, and means for consecutively generating addresses in a sector determined by the physical sector address.

4. 发明授权

US5862083A Information processing system 失效
标题翻译：信息处理系统
公开(公告)号：US5862083A
公开(公告)日：1999-01-19
申请号：US640998
申请日：1996-04-30
申请人： Tsunehiro Tobita , Jun Kitahara , Takashi Tsunehiro , Kunihiro Katayama , Ryuichi Hattori , Yukihiro Seki , Hajime Yamagami , Takashi Totsuka , Takeshi Wada , Yosio Takaya , Manabu Saito , Kenichi Kaki , Takao Okubo , Takashi Kikuchi , Masamichi Kishi , Takeshi Suzuki , Shigeru Kadowaki
发明人： Tsunehiro Tobita , Jun Kitahara , Takashi Tsunehiro , Kunihiro Katayama , Ryuichi Hattori , Yukihiro Seki , Hajime Yamagami , Takashi Totsuka , Takeshi Wada , Yosio Takaya , Manabu Saito , Kenichi Kaki , Takao Okubo , Takashi Kikuchi , Masamichi Kishi , Takeshi Suzuki , Shigeru Kadowaki
IPC分类号： G06F3/06 , G06F11/14 , G06F12/08 , G11C29/00 , G11C16/06
CPC分类号： G11C29/765 , G06F11/1433 , G06F11/1441 , G06F12/08 , G06F12/0802 , G06F12/0866 , G06F3/0601 , G06F3/0613 , G06F3/0616 , G06F3/064 , G06F3/0644 , G06F3/0656 , G06F3/0679 , G06F3/068 , G11C29/789 , G11C29/82 , G06F2003/0694 , G06F2212/2022 , G06F2212/312
摘要： A control method and system when a flash memory is used as a semiconductor disk or a main memory in an information processing system. A semiconductor file system comprises a first nonvolatile memory electrically erasable, a second nonvolatile memory not electrically erasable, a volatile memory, a controller which controls the memories, and a control section which controls the controller wherein a physical address corresponding to a logical address specified from an external system is accessed. The first nonvolatile memory stores data for the external system to perform operations, first management information indicating the correspondence between physical addresses at which the data is stored and logical addresses, and second management information indicating a state of the first nonvolatile memory. The second nonvolatile memory previously stores interface information required for inputting and outputting the data from and to the external system and read-only data of the data. The controller comprises control means for determining a physical sector address forming predetermined high-order bits of the physical address when data is output from the first nonvolatile memory or when data is input to the volatile memory, means for storing the determined physical sector address, and means for consecutively generating addresses in a sector determined by the physical sector address.
摘要翻译：当闪存用作信息处理系统中的半导体盘或主存储器时的控制方法和系统。半导体文件系统包括电可擦除的第一非易失性存储器，不电可擦除的第二非易失性存储器，易失性存储器，控制存储器的控制器和控制控制器的控制部分，其中对应于由访问一个外部系统。第一非易失性存储器存储用于执行操作的外部系统的数据，指示存储数据的物理地址与逻辑地址之间的对应关系的第一管理信息，以及指示第一非易失性存储器的状态的第二管理信息。第二非易失性存储器预先存储从外部系统输入和输出数据所需的接口信息以及数据的只读数据。控制器包括控制装置，用于当数据从第一非易失性存储器输出时或当数据被输入到易失性存储器时，确定形成物理地址的预定高位的物理扇区地址，存储确定的物理扇区地址的装置，以及用于连续地产生由物理扇区地址确定的扇区中的地址的装置。

5. 发明授权

US06421279B1 Flash memory control method and apparatus processing system therewith 有权
标题翻译：闪存控制方法和装置处理系统
公开(公告)号：US06421279B1
公开(公告)日：2002-07-16
申请号：US09927493
申请日：2001-08-13
申请人： Tsunehiro Tobita , Jun Kitahara , Takashi Tsunehiro , Kunihiro Katayama , Ryuichi Hattori , Yukihiro Seki , Hajime Yamagami , Takashi Totsuka , Takeshi Wada , Yosio Takaya , Manabu Saito , Kenichi Kaki , Takao Okubo , Takashi Kikuchi , Masamichi Kishi , Takeshi Suzuki , Shigeru Kadowaki
发明人： Tsunehiro Tobita , Jun Kitahara , Takashi Tsunehiro , Kunihiro Katayama , Ryuichi Hattori , Yukihiro Seki , Hajime Yamagami , Takashi Totsuka , Takeshi Wada , Yosio Takaya , Manabu Saito , Kenichi Kaki , Takao Okubo , Takashi Kikuchi , Masamichi Kishi , Takeshi Suzuki , Shigeru Kadowaki
IPC分类号： G11C800
CPC分类号： G11C29/765 , G06F3/0601 , G06F3/0613 , G06F3/0616 , G06F3/064 , G06F3/0644 , G06F3/0656 , G06F3/0679 , G06F3/068 , G06F11/1433 , G06F11/1441 , G06F12/08 , G06F12/0802 , G06F12/0866 , G06F2003/0694 , G06F2212/2022 , G06F2212/312 , G11C29/789 , G11C29/82
摘要： A semiconductor file system features a first nonvolatile memory electrically erasable, a second nonvolatile memory not electrically erasable, a volatile memory, a controller, and a control section which controls the controller wherein a physical address corresponding to a logical address specified from an external system is accessed. The first nonvolatile memory stores data for the external system to perform operations, first management information indicating correspondence between physical and logical addresses, and second management information indicating a state of the first nonvolatile memory. The second nonvolatile memory previously stores interface information. The controller determines a physical sector address. The control section is for controlling input/output of data from/to the external system and for temporarily storing write data into the first nonvolatile memory from the external system in the volatile memory and then transferring the write data from the volatile memory to the first nonvolatile memory.
摘要翻译：半导体文件系统具有电可擦除的第一非易失性存储器，不电可擦除的第二非易失性存储器，易失性存储器，控制器和控制部分，其控制控制器，其中对应于从外部系统指定的逻辑地址的物理地址是访问。第一非易失性存储器存储用于执行操作的外部系统的数据，指示物理和逻辑地址之间的对应关系的第一管理信息以及指示第一非易失性存储器的状态的第二管理信息。第二非易失性存储器先前存储接口信息。控制器确定物理扇区地址。控制部分用于控制来自/外部系统的数据的输入/输出，并用于从易失性存储器中的外部系统暂时将写数据存储到第一非易失性存储器中，然后将写入数据从易失性存储器传送到第一非易失性存储器记忆。

6. 发明授权

US6078520A Flash memory control method and information processing system therewith 有权
标题翻译：闪存控制方法和信息处理系统
公开(公告)号：US6078520A
公开(公告)日：2000-06-20
申请号：US357931
申请日：1999-07-21
申请人： Tsunehiro Tobita , Jun Kitahara , Takashi Tsunehiro , Kunihiro Katayama , Ryuichi Hattori , Yukihiro Seki , Hajime Yamagami , Takashi Totsuka , Takeshi Wada , Yosio Takaya , Manabu Saito , Kenichi Kaki , Takao Okubo , Takashi Kikuchi , Masamichi Kishi , Takeshi Suzuki , Shigeru Kadowaki
发明人： Tsunehiro Tobita , Jun Kitahara , Takashi Tsunehiro , Kunihiro Katayama , Ryuichi Hattori , Yukihiro Seki , Hajime Yamagami , Takashi Totsuka , Takeshi Wada , Yosio Takaya , Manabu Saito , Kenichi Kaki , Takao Okubo , Takashi Kikuchi , Masamichi Kishi , Takeshi Suzuki , Shigeru Kadowaki
IPC分类号： G06F11/14 , G06F12/08 , G11C29/00 , G11C17/00
CPC分类号： G11C29/765 , G06F11/1433 , G06F12/08 , G06F12/0802 , G06F12/0866 , G11C29/789 , G11C29/82 , G06F2212/2022 , G06F2212/312
摘要： A control method and system when a flash memory is used as a semiconductor disk or a main memory in an information processing system. A semiconductor file system comprises a first nonvolatile memory electrically erasable, a second nonvolatile memory not electrically erasable, a volatile memory, a controller which controls the memories, and a control section which controls the controller wherein a physical address corresponding to a logical address specified from an external system is accessed. The first nonvolatile memory stores data for the external system to perform operations, first management information indicating the correspondence between physical addresses at which the data is stored and logical addresses, and second management information indicating a state of the first nonvolatile memory. The second nonvolatile memory previously stores interface information required for inputting and outputting the data from and to the external system and read-only data of the data. The controller has a control means for determining a physical sector address forming predetermined high-order bits of the physical address when data is output from the first nonvolatile memory or when data is input to the volatile memory, means for storing the determined physical sector address, and means for consecutively generating addresses in a sector determined by the physical sector address.
摘要翻译：当闪存用作信息处理系统中的半导体盘或主存储器时的控制方法和系统。半导体文件系统包括电可擦除的第一非易失性存储器，不电可擦除的第二非易失性存储器，易失性存储器，控制存储器的控制器和控制控制器的控制部分，其中对应于由访问一个外部系统。第一非易失性存储器存储用于执行操作的外部系统的数据，指示存储数据的物理地址与逻辑地址之间的对应关系的第一管理信息，以及指示第一非易失性存储器的状态的第二管理信息。第二非易失性存储器预先存储从外部系统输入和输出数据所需的接口信息以及数据的只读数据。控制器具有控制装置，用于当数据从第一非易失性存储器输出时或当数据被输入到易失性存储器时，确定形成物理地址的预定高位的物理扇区地址，用于存储确定的物理扇区地址的装置，以及用于在由所述物理扇区地址确定的扇区中连续生成地址的装置。

7. 发明授权

US09656328B2 Cutting tool 有权
公开(公告)号：US09656328B2
公开(公告)日：2017-05-23
申请号：US13431218
申请日：2012-03-27
申请人： Manabu Saito , Tatsuo Nakahata , Hideharu Takahashi , Junji Tsuchiya , Masao Watanabe , Eiji Hashimoto , Hirofumi Higashiwaki
发明人： Manabu Saito , Tatsuo Nakahata , Hideharu Takahashi , Junji Tsuchiya , Masao Watanabe , Eiji Hashimoto , Hirofumi Higashiwaki
IPC分类号： B23B51/00
CPC分类号： B23B51/009 , B23B2226/275 , B23B2228/10 , B23B2251/04 , B23B2251/14 , Y10T408/26 , Y10T408/78 , Y10T408/89
摘要： Disclosed is a cutting tool, including: a cutting edge including a coating from a rake face to a flank face, and has a relief angle of not less than 15 degrees, a material of the coating having a higher wear resistance than a base material of the cutting edge, and during cutting of a work, an edge of the coating on the rake face at a top of the cutting edge is worn by friction with the work; with a progress of a wear inward in a radial direction, an edge of the coating on the flank face at the top of the cutting edge is removed by friction with the work to expose the base material thereunder; and the exposed base material is worn by friction with the work to retract the flank face inward in the radial direction.

8. 发明授权

US08876442B2 Rotary cutter 有权
标题翻译：旋转刀
公开(公告)号：US08876442B2
公开(公告)日：2014-11-04
申请号：US12889959
申请日：2010-09-24
申请人： Manabu Saito , Tatsuo Nakahata , Hideharu Takahashi
发明人： Manabu Saito , Tatsuo Nakahata , Hideharu Takahashi
IPC分类号： B23B51/06 , B23B31/20 , B23Q11/10
CPC分类号： B23B31/20 , B23B2231/24 , B23B2250/12 , B23Q11/1023 , B23Q11/103 , Y10T279/17111 , Y10T408/455 , Y10T409/304032
摘要： The object of the invention is to stably spray cutting fluid in a good mist form, when cutting fluid and air are supplied from the surrounding area and cutting fluid is sprayed in a mist form from the tip end section of a rotary cutting tool. The rotary cutter of the present invention sequentially feeds a mixture of cutting fluid and air through a supply pipe 4, first supply path b in a cover 3, second supply paths c, d in a chuck 2, a hollow center cavity (front throttle chamber d, throttle 24a, and rear throttle chamber e) in the chuck, and a third supply path g in a rotary cutting tool 1. The first supply path and second supply path are intermittently connected when the respective openings thereof face each other as the cover and chuck turn relative to each other; the second supply path sprays fluid toward the throttle; the front throttle chamber is formed such the diameter thereof expands from the second supply path; the throttle is formed such that the diameter thereof is less than the smallest diameter of the second supply path; the rear throttle chamber is formed by the rear end surface of the rotary cutting tool and the inner conical surface on the down-flow side of the throttle when that rear end surface and inner conical surface on the down-flow side come in close contact with each other; and the front throttle chamber is formed such that the capacity thereof is greater than that of the rear throttle chamber.
摘要翻译：本发明的目的是在切割流体和从周围区域供应空气并且从旋转切削工具的末端部分以雾状喷射切削流体时，以良好的雾状来稳定地喷射切削液。本发明的旋转切割机通过供给管4，第一供给路径b，盖3，卡盘2的第二供给路径c，d，中空中心腔（前节流室 d，节流阀24a和后节流室e）以及旋转切削工具1中的第三供给路径g。当其各个开口彼此面对时，第一供给路径和第二供给路径间歇地连接，作为盖并相对于卡盘转动; 第二供应路径朝向节气门喷射流体; 前节气门腔形成为其直径从第二供应路径膨胀; 节气门形成为使得其直径小于第二供给路径的最小直径; 后节流室由旋转切削工具的后端面和节流阀的下流侧的内圆锥面形成，该下端面与下流侧的内圆锥面紧密接触彼此; 并且前节气门腔形成为使得其能力大于后节气门腔的容量。

9. 发明授权

US07707174B2 Content display control method and content delivery server 失效
标题翻译：内容显示控制方法和内容传递服务器
公开(公告)号：US07707174B2
公开(公告)日：2010-04-27
申请号：US11701483
申请日：2007-02-02
申请人： Manabu Saito , Kaoru Suzuki
发明人： Manabu Saito , Kaoru Suzuki
IPC分类号： G06F17/00
CPC分类号： G06Q30/02
摘要： An object of the present invention is to achieve an efficient and low-cost processing for switching contents on a display according to travel areas, time frames and vehicle attributions of a transportation object. To this end, the present invention provides a system constituted of a content delivery server and the e-paper. The content delivery server includes: an designation receiving unit for storing schedule designation information in a database of content/schedule information; a transportation object specification unit for specifying a transportation object according to attribute information of an e-paper; a travel schedule specification unit for specifying information on a scheduled travel time in an display area; an interval-period computing unit for associating a display period of content with a display area; a travel area specification unit for storing information on a travel area corresponding to the display area; a content setting unit for associating the information on the travel area with attribute information of the content; and a delivery processing unit for transmitting, to the e-paper, display schedule information and the content. The e-paper includes: a data obtaining unit for obtaining contents and display schedule information from the content delivery server; and a display processing unit for switching the contents to be output on a display panel according to the display schedule of the contents.
摘要翻译：本发明的一个目的是实现一种根据运输对象的行驶区域，时间框架和车辆属性来切换显示器上的内容的有效且低成本的处理。为此，本发明提供一种由内容传送服务器和电子纸构成的系统。内容递送服务器包括：指定接收单元，用于将日程表指定信息存储在内容/日程表信息的数据库中; 运输对象指定单元，用于根据电子纸的属性信息指定运输对象; 旅行日程规格单元，用于在显示区域中指定关于预定旅行时间的信息; 间隔期计算单元，用于将内容的显示周期与显示区域相关联; 旅行区域指定单元，用于存储与显示区域相对应的旅行区域的信息; 内容设置单元，用于将旅行区域的信息与内容的属性信息相关联; 以及发送处理单元，用于向电子纸发送显示时间表信息和内容。该电子纸包括：数据获取单元，用于从内容传送服务器获取内容并显示时间表信息; 以及显示处理单元，用于根据内容的显示时间表来切换要在显示面板上输出的内容。

10. 发明授权

US07351971B2 Charged-particle beam instrument and method of detection 失效
标题翻译：带电粒子束仪和检测方法
公开(公告)号：US07351971B2
公开(公告)日：2008-04-01
申请号：US11479975
申请日：2006-06-30
申请人： Yukihiro Tanaka , Manabu Saito
发明人： Yukihiro Tanaka , Manabu Saito
IPC分类号： H01J37/26 , G21K7/00 , G01N23/00
CPC分类号： H01J37/1478 , H01J2237/151
摘要： A charged-particle beam instrument and method are offered which can inspect side and rear surfaces of the outer periphery of a specimen. The instrument has a source of the charged-particle beam and an objective lens for focusing the beam onto the specimen positioned inside a specimen chamber. The instrument further includes an electrostatic electrode and a deflection voltage power supply for applying a deflection voltage to the electrostatic electrode located on a downstream side of the objective lens. The electrostatic electrode reflects or deflects the beam passed through the objective lens such that the beam is directed at the specimen.
摘要翻译：提供一种可以检测试样外周侧面和背面的带电粒子束仪器和方法。仪器具有带电粒子束的源和用于将光束聚焦到位于样品室内的样品上的物镜。该仪器还包括用于向位于物镜下游侧的静电电极施加偏转电压的静电电极和偏转电压电源。静电电极使通过物镜的光束反射或偏转，使得光束被引导到样本。

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