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1. 发明申请

US20070148798A1 Fabrication Method of Transparent Electrode on Visible Light-Emitting Diode 有权
标题翻译：透明电极在可见光发光二极管上的制作方法
公开(公告)号：US20070148798A1
公开(公告)日：2007-06-28
申请号：US11684540
申请日：2007-03-09
申请人： Tse-Liang YING , Shi-Ming Chen
发明人： Tse-Liang YING , Shi-Ming Chen
IPC分类号： H01L21/00
CPC分类号： H01L33/42 , Y10S438/956
摘要： A method for forming a transparent electrode on a visible light-emitting diode is described. A visible light-emitting diode element is provided, and the visible light-emitting diode element has a substrate, an epitaxial structure and a metal electrode. The metal electrode and the epitaxial structure are located on the same side of the substrate, or located respectively on the different sides of the substrate. An ohmic metal layer is formed on a surface of the epitaxial structure. The ohmic metal layer is annealed. The ohmic metal layer is removed to expose the surface of the epitaxial structure. A transparent electrode layer is formed on the exposed surface. A metal pad is formed on the transparent electrode layer.
摘要翻译：描述了在可见光发光二极管上形成透明电极的方法。提供了可见光发光二极管元件，可见光发光二极管元件具有基板，外延结构和金属电极。金属电极和外延结构位于基板的同一侧，或分别位于基板的不同侧。在外延结构的表面上形成欧姆金属层。欧姆金属层退火。去除欧姆金属层以露出外延结构的表面。在露出的表面上形成透明电极层。在透明电极层上形成金属焊盘。

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