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    • 1. 发明专利
    • Vacuum pump apparatus
    • 真空泵设备
    • JP2011202535A
    • 2011-10-13
    • JP2010068457
    • 2010-03-24
    • Toyota Industries Corp株式会社豊田自動織機
    • NAGANO HIROKIYAMAMOTO SHINYABAN TAKASHIHAYASHI GENKI
    • F04C29/02F04C18/18F04C25/02
    • PROBLEM TO BE SOLVED: To provide a vacuum pump apparatus in which the scraping-up direction of a lubricating oil scraped up by a scraping-up body is adjusted by changing the direction according to the rotational speed of a rotating shaft.SOLUTION: The vacuum pump apparatus includes a drive shaft 28, a first rotor 26 which is stored in a rotor chamber R inside a housing and rotated when the drive shaft 28 is rotated, a timing gear which is stored in a gear chamber inside the housing and which includes the drive gears of the drive shaft 28 and driven gears, a driven shaft 29 having the driven gears, a second rotor 27 rotated when the driven shaft 29 is rotated, a drive side bearing 30 installed between the rotor chamber R and the gear chamber, a driven side bearing 34 for supporting the driven shaft 29, and a scraping-up body for scraping up the lubricating oil. The timing gear is disposed between at least the drive side bearing 30 and/or the driven side bearing 34 and the scraping-up body. The scraping-up body includes, on the timing gear side, first scraping-up pieces 50 and second scraping-up pieces 51. The inclination angles of the first scraping piece 50 and the second scraping piece 51 to a reference plane at right angle to the rotating axis direction P are differentiated from each other.
    • 要解决的问题:提供一种真空泵装置,其中通过根据旋转轴的转速改变方向来调节通过刮削体刮下的润滑油的刮擦方向。解决方案:真空 泵装置包括驱动轴28,第一转子26,其存储在壳体内的转子室R中并且当驱动轴28旋转时旋转;定时齿轮,其存储在壳体内的齿轮室中,并且包括 驱动轴28和从动齿轮的驱动齿轮,具有从动齿轮的从动轴29,当从动轴29旋转时旋转的第二转子27,安装在转子室R和齿轮室之间的驱动侧轴承30, 用于支撑从动轴29的从动侧轴承34和用于刮除润滑油的刮削体。 正时齿轮设置在至少驱动侧轴承30和/或从动侧轴承34与刮取体之间。 刮削体在正时齿轮侧包括第一刮削片50和第二刮削片51.第一刮片50和第二刮片51的倾斜角度与参考平面成直角 旋转轴方向P彼此不同。
    • 2. 发明专利
    • Swash plate type compressor
    • 洗板式压缩机
    • JP2013209910A
    • 2013-10-10
    • JP2012080029
    • 2012-03-30
    • Toyota Industries Corp株式会社豊田自動織機
    • HAYASHI GENKISAKANO MASATOSHIINUKAI HITOSHIGOTO HISANORI
    • F04B27/08F04B39/12
    • F04B27/1081F04B27/0891F04B27/1036F04B39/122F04B39/125F04B53/007
    • PROBLEM TO BE SOLVED: To provide a swash plate type compressor capable of restraining a lubricating oil of a swash plate chamber from being agitated by a swash plate, while securing airtightness inside of a housing, without enlarging a diameter of the housing.SOLUTION: In a double-ended piston type swash plate type compressor 10, a plurality of bolts B are penetrated through the inside of the swash plate chamber 24, and the plurality of bolts B are respectively positioned at an interval between a plurality of double-ended pistons around a rotary shaft 21. A plurality of ribs 12f extending in the axial direction of the rotary shaft 21 are projected from a wall surface of the swash plate chamber 24 with every interval between the double-ended piston and the bolt B. In a wall surface of the swash plate chamber 24, a piston sidewall surface Fa sandwiched by the two ribs 12f existing in both nearest neighbors while sandwiching the double-ended piston is positioned outside along the radial direction of the rotary shaft 21 more than a bolt sidewall surface T sandwiched by the two ribs 12f existing in both nearest neighbors while sandwiching the bolt B in the wall surface of the swash plate chamber 24.
    • 要解决的问题:提供一种斜盘式压缩机,其能够限制旋转斜盘室的润滑油被旋转斜盘搅拌,同时确保气密性在壳体内部,而不会增大壳体的直径。解决方案:在 双端活塞式斜盘式压缩机10,多个螺栓B穿过旋转斜盘室24的内部,多个螺栓B分别位于多个双端活塞周围的间隔 旋转轴21.沿着旋转轴21的轴向延伸的多个肋12f从双端活塞和螺栓B之间的每个间隔从斜板室24的壁面突出。在壁面 在斜盘室24中,夹着双端活塞的两个最邻近的两个肋12f所夹持的活塞侧壁面Fa位于径向d的外侧 旋转轴21的方向比夹在两个最近邻处的两个肋12f夹持的螺栓侧壁表面T同时将螺栓B夹在旋转斜盘室24的壁表面中。
    • 3. 发明专利
    • Vacuum pump apparatus
    • 真空泵设备
    • JP2011202534A
    • 2011-10-13
    • JP2010068456
    • 2010-03-24
    • Toyota Industries Corp株式会社豊田自動織機
    • NAGANO HIROKIYAMAMOTO SHINYABAN TAKASHIHAYASHI GENKI
    • F04C29/02F04C18/18
    • PROBLEM TO BE SOLVED: To provide a vacuum pump apparatus that allows a scraped-up lubricating oil to reach a sliding element, even when a device for scraping up the lubricating oil is separated from the sliding element such as a bearing.SOLUTION: The vacuum pump apparatus includes a first rotor 26 which is stored in a rotor chamber R inside a housing and rotated when a drive shaft 28 is rotated, a timing gear which is stored in a gear chamber inside the housing and which includes drive gears attached to the drive shaft 28 and driven gears meshed with the drive gears, a second rotor 27 rotated when the driven shaft 29 having the driven gears is rotated, and a scraping-up body which is installed on the drive shaft 28 or the driven shaft 29 and which scrapes up the lubricating oil. The scraping-up body includes, on the drive side bearing 30 side, scraping-up pieces 50 and spattering restraining pieces 51 for restraining the spattering of the lubricating oil scraped up by the scraping pieces 50 radially outward of the scraping-up body.
    • 要解决的问题:即使当用于刮除润滑油的装置与诸如轴承的滑动元件分离时,提供允许刮掉的润滑油到达滑动元件的真空泵装置。解决方案:真空 泵装置包括第一转子26,其在壳体内存储在转子室R中并且当驱动轴28旋转时旋转;定时齿轮,其存储在壳体内的齿轮室中,并且包括连接到驱动器的驱动齿轮 轴28和与驱动齿轮啮合的从动齿轮,当具有从动齿轮的从动轴29旋转时旋转的第二转子27和安装在驱动轴28或从动轴29上的刮削体, 润滑油。 刮削体在驱动侧轴承30侧具有刮削片50和防溅片51,用于抑制由刮削片50向刮削体的径向外侧刮除的润滑油的飞溅。
    • 4. 发明专利
    • Hydrogen gas exhaust method and vacuum pump device
    • 氢气排放方法和真空泵装置
    • JP2011163150A
    • 2011-08-25
    • JP2010024177
    • 2010-02-05
    • Toyota Industries Corp株式会社豊田自動織機
    • YAMAMOTO SHINYAINAGAKI MASAHIROHAYASHI GENKI
    • F04C25/02F04B37/16
    • Y02P70/521
    • PROBLEM TO BE SOLVED: To provide a hydrogen gas exhaust method capable of improving hydrogen gas exhausting efficiency, and a vacuum pump device. SOLUTION: In this vacuum pump device S, a main pump 10, a second booster pump 27, and a first booster pump 55 are serially connected with each other, and the first booster pump 55 and the second booster pump 27 are arranged to an upstream side of the main pump 10 in a hydrogen gas exhausting direction in an exhaust passage. While the vacuum pump device S is being driven, nitrogen gas with higher viscosity coefficient than that of the hydrogen gas is supplied to an exhaust port 56b of the first booster pump 55, in which the hydrogen gas from a semiconductor manufacturing device is first sucked, via an introduction port 56c and an introduction pipe 70, so as to improve a transferring property of the hydrogen gas using the viscosity of the nitrogen gas. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:提供一种能够提高氢气排出效率的氢气排气方法和真空泵装置。 解决方案:在该真空泵装置S中,主泵10,第二增压泵27和第一增压泵55彼此串联连接,第一增压泵55和第二增压泵27布置 在排气通道中以氢气排出方向连接到主泵10的上游侧。 在驱动真空泵装置S的同时,将来自半导体制造装置的氢气首先吸入的第一增压泵55的排气口56b供给具有比氢气高的粘度系数的氮气, 通过导入口56c和导入管70,利用氮的粘度来提高氢气的转移性。 版权所有(C)2011,JPO&INPIT