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    • 2. 发明专利
    • Method for producing formed article with diamond-like carbon hard multilayer film
    • 用金刚石硬质多层膜生产成型制品的方法
    • JP2011225995A
    • 2011-11-10
    • JP2011096890
    • 2011-04-25
    • Kobe Steel Ltd株式会社神戸製鋼所
    • AKARI KOICHIROOTA AKITOSHI
    • C23C14/06B23B27/14
    • PROBLEM TO BE SOLVED: To provide a method for producing a DLC (diamond like carbon) formed article which is provided with excellent adhesiveness to both of a substrate and a DLC film even when a DLC multilayer film including a high hardness DLC film on the uppermost surface side is formed in a thickness of about 3 μm or more on substrates made of a wide range of materials from a high hardness material to a low hardness material, and which also has excellent abrasion resistance.SOLUTION: The method for producing a formed article 10 with a DLC hard multilayer film includes: a step (a) for preparing a substrate 1; a step (b) for forming an intermediate layer 2a on the substrate by a sputtering method; a step (c) for forming a first DLC-based film 3a on the intermediate layer by a sputtering method; and a step (d) for forming a second DLC-based film 3b having a surface hardness higher than that of the first DLC-based film on the first DLC-based film by a cathode discharge type arc ion plating method.
    • 要解决的问题:为了提供一种制备DLC(类金刚石碳)成型体的方法,即使在包含高硬度DLC膜的DLC多层膜时,其对基材和DLC膜都具有优异的粘着性 在由高硬度材料到低硬度材料的各种材料制成的基片上,在最上表面侧形成约3μm以上的厚度,并且也具有优异的耐磨性。 解决方案:用DLC硬质多层膜制造成形品10的方法包括:制备基片1的步骤(a); 用于通过溅射法在所述衬底上形成中间层2a的步骤(b); 用于通过溅射法在中间层上形成第一DLC基膜3a的步骤(c); 以及用于通过阴极放电型电弧离子镀法在第一DLC基膜上形成表面硬度高于第一DLC基膜的第二DLC基膜3b的步骤(d)。 版权所有(C)2012,JPO&INPIT
    • 9. 发明公开
    • LAMINATED COATING FILM HAVING EXCELLENT ABRASION RESISTANCE
    • LAMINIERTE BESCHICHTUNGSFOLIE MIT HERVORRAGENDER ABRIEBFESTIGKEIT
    • EP2949776A4
    • 2016-08-24
    • EP14743313
    • 2014-01-24
    • KOBE STEEL LTD
    • ABE MAIKOYAMAMOTO KENJIAKARI KOICHIRO
    • C23C14/06C23C14/34C23C28/00C23C28/04
    • C23C28/044C23C14/0641C23C14/0647C23C14/3464C23C28/04C23C28/042C23C28/42
    • A laminated coating film according to the present invention comprises at least one coating film (A) and at least one coating film (B) laminated on each other and has excellent abrasion resistance. [Coating film (A)] The compositional formula is (M 1-a Si a )(B x C y N 1-x-y ) (wherein M represents at least one element selected from the group consisting of a Group-4 element, a Group-5 element, a Group-6 element and Al; and a, x and y respectively represent the atomic ratios of Si, B and C), wherein a, x and y respectively fulfil the formulae: 0.05 ‰¤ a ‰¤ 0.35, 0 ‰¤ x ‰¤ 0.15 and 0 ‰¤ y ‰¤ 0.5. [Coating film (B)] The compositional formula is L(B x C y N 1-x-y ) (wherein L represents at least one element selected from the group consisting of W, Mo and V; and x and y respectively represent the atomic ratios of B and C), wherein x and y respectively fulfil the formulae: 0 ‰¤ x ‰¤ 0.15 and 0 ‰¤ y ‰¤ 0.5.
    • 根据本发明的层压涂膜包括至少一层涂布膜(A)和至少一层涂布膜(B),并且具有优异的耐磨性。 [涂膜(A)]组成式为(M 1-a Si a)(B x C y N 1-xy)(其中,M表示选自第4族元素, 第5族元素,第6族元素和Al; a,x和y分别表示Si,B和C的原子比,其中a,x和y分别满足下列公式:0.05‰¤‰¤0.35 ,0‰¤x‰¤0.15和0‰¤‰¤0.5。 [涂膜(B)]组成式为L(B x C y N 1-xy)(其中L表示选自W,Mo和V中的至少一种元素; x和y分别表示原子 B和C的比率),其中x和y分别满足公式:0‰¤x‰¤0.15和0‰¤‰¤0.5。
    • 10. 发明公开
    • SPUTTER DEVICE
    • SPUTTERVORRICHTUNG
    • EP1375698A4
    • 2006-09-27
    • EP02707236
    • 2002-03-28
    • KOBE STEEL LTD
    • KOHARA TOSHIMITSUAKARI KOICHIRO
    • B01J19/08H01J37/34C23C14/35H01L21/203
    • H01J37/3455C23C14/352H01J37/3408
    • The invention is intended to easily change the shape of a magnetic field when auxiliary poles are to be provided in a sputter device. A sputter device, in which one or more magnetron type sputter evaporation sources (3) and one or more auxiliary poles (9) are disposed in a chamber (1) in such a manner as to surround an evaporation subject (2), comprises an angle changing mechanism for changing the angle of the auxiliary poles (9) with respect to the evaporation subject (2) in order to change the shape of a magnetic field which is formed by cooperation between the magnetron type sputter evaporation sources (3) and the auxiliary poles (9).
    • 本发明的目的是在辅助磁极的状态下容易地在溅射装置中改变磁场的形状。 在根据本发明的溅射装置中,一个或多个磁控溅射蒸发源3和一个或多个辅助磁极9设置在室1中,以围绕要沉积的固体物质2,其中 用于改变辅助磁极9相对于待沉积的固体物质2的对准角度以改变由磁控溅射蒸镀源3和辅助磁极9形成的磁场的形状的角度改变机构。