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    • 4. 发明申请
    • CHARGED-PARTICLE BEAM DRAWING APPARATUS AND ARTICLE MANUFACTURING METHOD
    • 充电颗粒光束绘图设备和制品制造方法
    • US20120183905A1
    • 2012-07-19
    • US13347981
    • 2012-01-11
    • Shigeru TERASHIMATakahiro NAKAYAMA
    • Shigeru TERASHIMATakahiro NAKAYAMA
    • G03F7/20H01J3/26
    • H01J37/3177B82Y10/00B82Y40/00H01J2237/022H01J2237/0435
    • A drawing apparatus for drawing a pattern on a substrate by using a charged-particle beam comprises: a blanking deflector which deflects the charged-particle beam; a stopping aperture member which can block the charged-particle beam deflected by the blanking deflector; a catalyst which generates, from a gas, an active species for decomposing a deposit formed on the stopping aperture member; and a supply mechanism which supplies the gas to the catalyst. In a removing operation of removing the deposit, while the supply mechanism supplies the gas to the catalyst, the charged-particle beam irradiates a region which is not irradiated with the charged-particle beam in a drawing operation of drawing the pattern, thereby generating the active species from the gas by the catalyst positioned in at least the region, and removing the deposit by decomposing the deposit by the generated active species.
    • 用于通过使用带电粒子束在衬底上绘制图案的绘图装置包括:使带电粒子束偏转的消隐偏转器; 可阻挡由遮光偏转器偏转的带电粒子束的阻止孔径构件; 催化剂,其从气体产生用于分解形成在停止孔部件上的沉积物的活性物质; 以及将气体供给到催化剂的供给机构。 在去除沉积物的去除操作中,当供给机构将气体供应到催化剂时,带电粒子束在绘制图案的绘图操作中照射未被带电粒子束照射的区域,由此产生 通过位于至少该区域的催化剂从气体中活化的物质,以及通过所产生的活性物质分解沉积物来除去沉积物。
    • 9. 发明申请
    • ZOOM LENS, CAMERA APPARATUS, INFORMATION DEVICE AND MOBILE INFORMATION TERMINAL APPARATUS
    • 变焦镜头,相机设备,信息设备和移动信息终端设备
    • US20110141578A1
    • 2011-06-16
    • US12968993
    • 2010-12-15
    • Takahiro NAKAYAMA
    • Takahiro NAKAYAMA
    • G02B15/14
    • G02B15/173G02B27/0062
    • A zoom lens includes a first lens group having a positive refractive power, a second lens group having a negative refractive power, an aperture stop, a third lens group having a positive refractive power, and a fourth lens group having a positive refractive power, which are disposed in order from an object side. The first lens group has a negative lens and a positive lens having a convex surface at an object side, which are disposed in order from the object side. An interval between the first lens group and the second lens group is increased and an interval between the second lens group and the third lens group is decreased when changing a magnification of the zoom lens from a wide angle end to a telephoto end. The first lens group and the third lens group are moved from positions at the wide angle end toward positions, which are at object sides thereof, at the telephoto end, respectively. Parameters are set so as to successfully correct chromatic aberration while achieving compact size, wide half field angle at the wide angle end, good performance, and a high magnification ratio.
    • 变焦透镜包括具有正折光力的第一透镜组,具有负折光力的第二透镜组,孔径光阑,具有正折光力的第三透镜组和具有正折光力的第四透镜组, 从物体侧依次排列。 第一透镜组具有从物体侧依次设置的负透镜和物镜侧具有凸面的正透镜。 当从广角端到望远端改变变焦透镜的倍率时,第一透镜组和第二透镜组之间的间隔增大,并且第二透镜组和第三透镜组之间的间隔减小。 第一透镜组和第三透镜组分别从位于广角端处的位置朝向远摄端的位于其物体侧的位置移动。 设定参数,以便在实现紧凑的尺寸,广角端的宽半场角,良好的性能和高放大倍数的情况下成功地校正色差。