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    • 1. 发明授权
    • Charged particle litography method and apparatus
    • 带电粒子方法和装置
    • US5305225A
    • 1994-04-19
    • US876426
    • 1992-04-30
    • Toshio YamaguchiSatoshi YamasakiTakayuki Abe
    • Toshio YamaguchiSatoshi YamasakiTakayuki Abe
    • H01J37/302G06F15/46H01J37/304
    • H01J37/3026
    • In an electron beam lithography method which irradiates a sample with an electron beam to draw a desired pattern on the sample, figure data representing the shape of an elemental figure, placement data representing placement information of the figure data, and dose data representing dose for each of areas which are obtained by dividing a drawing area which are smaller than the broadening of backscattering of an electron beam are independently stored in a memory as drawing data. On the basis of the drawing data, the figure data is divided into unit figures each of which has a predetermined shape and is smaller than a predetermined size. A represented point of each unit figure is calculated, a dose of an electron beam is obtained from the data set for an area in which the represented point is present, and the quantity of radiation is determined as dose for the unit figure.
    • 在用电子束照射样品以在样品上画出所需图案的电子束光刻方法中,表示基本数字形状的图形数据,表示图形数据的放置信息的放置数据和表示每个 通过划分比电子束的后向散射加宽的绘制区域获得的区域被独立地存储在作为绘图数据的存储器中。 基于图形数据,图形数据被划分为各自具有预定形状且小于预定尺寸的单位图形。 计算每个单位图的表示点,从存在表示点的区域的数据集中获得电子束的剂量,并且将辐射量确定为单位图的剂量。
    • 2. 发明授权
    • Electron beam lithographic method and apparatus
    • 电子束光刻方法和装置
    • US5451487A
    • 1995-09-19
    • US209360
    • 1994-03-14
    • Takayuki AbeSatoshi Yamasaki
    • Takayuki AbeSatoshi Yamasaki
    • H01L21/027H01J37/302G03F7/20
    • H01J37/3026H01J2237/31769Y10S430/143
    • In an electron beam lithographic method including a correction radiation step based on the ghost method, the entire correction region is divided into small regions, each having a size smaller than a spread of backscattering of an electron beam and larger than a minimum figure which can be drawn. Representative figures are set, as radiation unit figures in the respective small regions, to be smaller in number than the number of times of radiation to be performed when the desired patterns in the small regions are drawn as black/white-inverted patterns. Exposure dose are set for the representative figures in the respective small regions. The electron beam is defocused to increase a beam size to a size roughly coinciding with the spread of backscattering, and the representative figures in the respective small regions are drawn with the set exposure dose.
    • 在包括基于重影法的校正辐射步骤的电子束光刻方法中,整个校正区域被划分为小的区域,每个区域的尺寸小于电子束的后向散射的扩展,并且大于可以是 画。 当各小区域中的辐射单元图形数量小于将小区域中的期望图案绘制为黑/白反转图案时要执行的辐射次数,则设置代表性图形。 对各小区域的代表性数字设定曝光剂量。 电子束散焦以将光束尺寸增加到与后向散射的扩展大致一致的尺寸,并且以设定的曝光剂量绘制各个小区域中的代表性图形。
    • 4. 发明授权
    • Information processing apparatus using updated firmware and system setting method
    • 使用更新的固件和系统设置方法的信息处理设备
    • US08930931B2
    • 2015-01-06
    • US12908997
    • 2010-10-21
    • Hiroaki HaramiishiYukiharu YoshimuraTakayuki Abe
    • Hiroaki HaramiishiYukiharu YoshimuraTakayuki Abe
    • G06F9/44G06F9/445
    • G06F8/654
    • In an information processing apparatus, a first processor executes firmware and data processing instructions, a second processor conducts management of firmware updating and system settings, first and second memories store current and updated firmware, a third memory stores system settings information, and a switch changes connections of the first and second memories under control of the second processor, to connect one of the first and second memories to a bus connected to the first processor and to connect the other to the second processor. During firmware execution by the first processor, the second processor reads the system settings information from the third memory and provides it to the first processor. The first processor reflects firmware data from updated firmware in the second memory in the system settings information and the second processor stores the system settings information in which updated firmware data is reflected into the third memory.
    • 在信息处理装置中,第一处理器执行固件和数据处理指令,第二处理器执行固件更新和系统设置的管理,第一和第二存储器存储当前和更新的固件,第三存储器存储系统设置信息和开关改变 在第二处理器的控制下的第一和第二存储器的连接,将第一和第二存储器之一连接到连接到第一处理器的总线,并将另一个连接到第二处理器。 在由第一处理器执行固件期间,第二处理器从第三存储器读取系统设置信息并将其提供给第一处理器。 第一处理器在系统设置信息中反映第二存储器中更新的固件的固件数据,而第二处理器将更新的固件数据反映到第三存储器中的系统设置信息存储。
    • 6. 发明申请
    • FLEXIBLE COUPLING AND VEHICLE MOTIVE POWER TRANSMISSION APPARATUS
    • 柔性联轴器和车辆动力传动装置
    • US20120283028A1
    • 2012-11-08
    • US13518408
    • 2010-12-08
    • Takayuki Abe
    • Takayuki Abe
    • F16D3/62
    • F16D3/78F16D3/62
    • A flexible coupling includes: spool members disposed equidistantly on a circumference; torque transmission lines disposed around adjacent pairs of the spool members; and an annular elastic body in which the spool members and the torque transmission lines are embedded. The torque transmission lines consist of first torque transmission lines, and second torque transmission lines whose total sum of cross-sectional area is a half of that of the first torque transmission lines. The flexible coupling is constructed so that the first torque transmission lines transmit positive torque and the second torque transmission lines transmit negative torque, and is incorporated into a vehicle motive power transmission apparatus that has a hypoid gear whose mesh transmission error is greater during transmission of negative torque than during transmission of positive torque.
    • 柔性联轴器包括:在圆周上等距地设置的线轴构件; 设置在相邻成对的卷轴构件周围的扭矩传输线; 以及其中嵌入有卷轴构件和扭矩传递线的环形弹性体。 转矩传输线由第一转矩传输线和横截面积的总和为第一转矩传输线的总和的第二转矩传输线组成。 柔性联轴器被构造成使得第一扭矩传递线传递正扭矩并且第二扭矩传输线传递负扭矩,并且被并入车辆动力传动装置中,该传动装置具有在传递负片时网格传输误差较大的准双曲面齿轮 扭矩比传递正转矩时。
    • 8. 发明授权
    • Apparatus and method for pattern inspection
    • 模式检查的装置和方法
    • US07973918B2
    • 2011-07-05
    • US12552108
    • 2009-09-01
    • Hideo TsuchiyaTakayuki Abe
    • Hideo TsuchiyaTakayuki Abe
    • G01N21/00
    • G01N21/956G01N2021/95676
    • A pattern inspection apparatus includes a pulsed light source configured to emit pulsed light; a stage configured to mount thereon an inspection target object with a pattern formed thereon; a time delay integration (TDI) sensor configured to detect, a plurality of times with a time delay, each pixel value of an optical image of the inspection target object, wherein the optical image is acquired by emitting the pulsed light onto the inspection target object, and to integrate a detected each pixel value for each pixel of the optical image; a light quantity sensor configured to detect a light quantity of the pulsed light after emitting the pulsed light onto the inspection target object; a light quantity measurement circuit configured to input the light quantity detected by the light quantity sensor, and to measure a light quantity of each pulse while being synchronized with a period of the pulsed light; a correction unit configured to input the light quantity of each pulse and an integrated pixel value output from the TDI sensor, and to correct the integrated pixel value output from the TDI sensor, for each pixel of the optical image, using a total light quantity of the light quantity of corresponding each pulse; and an inspection unit configured to inspect whether there is a defect of the pattern, using the integrated pixel value corrected.
    • 图案检查装置包括被配置为发射脉冲光的脉冲光源; 被配置为在其上安装有形成在其上的图案的检查对象物体的台; 时间延迟积分(TDI)传感器,其被配置为以时间延迟多次检测所述检查对象物体的光学图像的每个像素值,其中通过将所述脉冲光发射到所述检查对象物体上而获取所述光学图像 并且对于所述光学图像的每个像素集成检测到的每个像素值; 光量传感器,被配置为在将所述脉冲光发射到所述检查对象物体上之后检测所述脉冲光的光量; 光量测量电路,被配置为输入由光量传感器检测的光量,并且与脉冲光的周期同步地测量每个脉冲的光量; 校正单元,被配置为输入每个脉冲的光量和从TDI传感器输出的积分像素值,并且对于光学图像的每个像素,校正从TDI传感器输出的积分像素值,使用总光量 相应的每个脉冲的光量; 以及检查单元,被配置为使用校正的积分像素值来检查是否存在图案的缺陷。
    • 9. 发明授权
    • Magnetic resonance imaging apparatus
    • 磁共振成像装置
    • US07847549B2
    • 2010-12-07
    • US12159177
    • 2006-12-26
    • Tetsuhiko TakahashiTakayuki AbeHisako Nagao
    • Tetsuhiko TakahashiTakayuki AbeHisako Nagao
    • G01V3/00
    • G01R33/56375A61B5/0555A61B5/7257G01R33/56383G01R33/5676
    • A magnetic resonance imaging apparatus comprises object placing means for placing an object in an imaging space, translating means for translating the object in a given direction by translating the object placing means in the given direction continuously or step-wise, magnetic field generating means for exciting the desired region of the object by generating a static magnetic field, a gradient magnetic field in the imaging space, and a high-frequency magnetic field in the imaging space, signal detecting means for detecting a magnetic resonance signal from the object, and control unit for controlling the translating means, magnetic field generating means and the signal detecting means, and translating the object continuously or stepwise to a predetermined position at a predetermined speed so as to capture a magnetic resonance image of the object.The magnetic resonance imaging apparatus further comprises translation error detecting means for detecting an error of the position or the set value of the speed, and correcting means for correcting the error detected by the positional error detecting means.
    • 磁共振成像装置包括用于将物体放置在成像空间中的物体放置装置,用于通过沿着给定方向连续或逐步平移物体放置装置在给定方向上平移物体的平移装置,用于激发 通过产生静态磁场,成像空间中的梯度磁场和成像空间中的高频磁场来产生物体的期望区域,用于检测来自物体的磁共振信号的信号检测装置,以及控制单元 用于控制平移装置,磁场产生装置和信号检测装置,并以预定速度将物体连续或逐步地转移到预定位置,以便捕获物体的磁共振图像。 磁共振成像装置还包括用于检测位置误差或速度设定值的平移误差检测装置,以及用于校正由位置误差检测装置检测到的误差的校正装置。
    • 10. 发明申请
    • MAGNETIC RESONANCE IMAGING APPARATUS AND METHOD
    • 磁共振成像装置及方法
    • US20100244823A1
    • 2010-09-30
    • US12295160
    • 2007-03-12
    • Takayuki AbeTetsuhiko Takahashi
    • Takayuki AbeTetsuhiko Takahashi
    • G01R33/48
    • G01R33/56375A61B5/055G01R33/243G01R33/543G01R33/56383G01R33/56563G01R33/58
    • A magnetic resonance imaging apparatus comprising static magnetic field generating means for generating a static magnetic field in an imaging space, measuring means for generating a high-frequency magnetic field and a gradient magnetic field in the imaging space and measuring a nuclear magnetic resonance signal generated from an object to be examined placed in the imaging space, signal processing means for reconstructing a magnetic resonance image according to the nuclear magnetic resonance signal, control means for controlling the measuring means and the signal processing means, and display means for displaying the reconstructed magnetic resonance image obtained by the signal processing means.The magnetic resonance imaging apparatus further comprises storing means for storing a first set of information representing an inhomogeneous distribution of the static magnetic field generated depending on the characteristic of the static magnetic field generating means and a second set of information representing an inhomogeneous distribution of the static magnetic field generated depending on the tissue of the object, setting means for setting a field of view for imaging in a desired region of the object, selecting means for selecting information corresponding to the set field of view for imaging out of the second set of information as a third set of information, and correcting magnetic field generating means for generating a correcting magnetic field according to the third set of information and the first set of the information.
    • 一种磁共振成像设备,包括用于在成像空间中产生静态磁场的静态磁场产生装置,用于在所述成像空间中产生高频磁场和梯度磁场的测量装置,并且测量由 将要检查的物体放置在成像空间中,用于根据核磁共振信号重建磁共振图像的信号处理装置,用于控制测量装置和信号处理装置的控制装置,以及显示重建磁共振 由信号处理装置获得的图像。 磁共振成像装置还包括存储装置,用于存储表示根据静磁场产生装置的特性产生的静态磁场的不均匀分布的第一组信息,以及第二组信息,其表示静态磁场的不均匀分布 根据物体的组织产生的磁场,用于在对象的期望区域中设置用于成像的视野的设置装置,用于从第二组信息中选择与用于成像的设定视野相对应的信息的选择装置 作为第三组信息,以及校正磁场产生装置,用于根据第三组信息和第一组信息产生校正磁场。