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    • 4. 发明授权
    • Method of fabricating semiconductor device
    • 制造半导体器件的方法
    • US08309469B2
    • 2012-11-13
    • US12372191
    • 2009-02-17
    • Seiji Kajiwara
    • Seiji Kajiwara
    • H01L21/461
    • H01L21/823456H01L27/11521H01L27/11526H01L27/11543
    • A method of fabricating a semiconductor device includes forming core material patterns comprising first films separated from another above a substrate; modifying surfaces of core material patterns so a second film is formed, selectively etchable, with first films internally remaining, the second film not covering a base layer of core material patterns between core material patterns; covering an upper surface and sides of the second film and forming a third film on the substrate; etching back the third film to expose an upper surface of the second film and the base layer of core material patterns between the patterns, causing the third film to selectively remain; removing the second film more rapidly than the first and third films; and patterning the base layer with the first and third films remaining on the base layer serving as a mask after the second film has been removed, forming a base layer pattern.
    • 制造半导体器件的方法包括:形成芯材图案,其包括在衬底上方与另一膜分离的第一膜; 修改芯材图案的表面,从而形成可选择性蚀刻的第二膜,其中内部保留有第一膜,第二膜不覆盖芯材图案之间的芯材图案的基层; 覆盖第二膜的上表面和侧面并在基板上形成第三膜; 蚀刻第三膜以暴露第二膜的上表面和芯图案的基层之间的图案之间的图案,导致第三膜选择性地保留; 比第一和第三膜更快地去除第二膜; 以及在去除所述第二膜之后,将所述基底层图案化成残留在所述基底层上的所述第一和第三膜作为掩模,形成基底图案。
    • 6. 发明申请
    • METHOD OF FABRICATING SEMICONDUCTOR DEVICE
    • 制造半导体器件的方法
    • US20090298274A1
    • 2009-12-03
    • US12372191
    • 2009-02-17
    • Seiji Kajiwara
    • Seiji Kajiwara
    • H01L21/28H01L21/77
    • H01L21/823456H01L27/11521H01L27/11526H01L27/11543
    • A method of fabricating a semiconductor device includes forming core material patterns comprising first films separated from each other above a substrate, modifying surfaces of the core material patterns so that a second film is formed so as to be selectively etchable with the first films internally remaining, covering an upper surface and sides of the second film and forming a third film on the substrate, etching back the third film so that an upper surface of the second film is exposed and a base layer of the core material patterns is exposed between the patterns, and causing the third film to selectively remain, removing the second film more rapidly than the first and third films, and patterning the base layer with the first and third films remaining on the base layer serving as a mask after the second film has been removed, thereby forming a base layer pattern.
    • 一种制造半导体器件的方法包括形成芯材图案,其包括在基板上方彼此分离的第一膜,修改芯材图案的表面,使得形成第二膜以便可以内部保留第一膜的可选择性蚀刻, 覆盖第二膜的上表面和侧面并在基板上形成第三膜,蚀刻第三膜,使得第二膜的上表面露出,芯材图案的基层在图案之间露出, 并且使所述第三膜选择性地保留,并且比所述第一和第三膜更快地除去所述第二膜,并且在所述第二膜被去除之后,使所述基底层上残留有作为掩模的第一膜和第三膜图案化, 从而形成基层图案。
    • 7. 发明授权
    • Pattern forming method
    • 图案形成方法
    • US08551875B2
    • 2013-10-08
    • US13364624
    • 2012-02-02
    • Seiji Kajiwara
    • Seiji Kajiwara
    • H01L21/3205
    • H01L21/28273H01L21/0337H01L21/0338H01L21/32139H01L27/11519H01L27/11524
    • According to one embodiment, an opening pattern is formed in the core film above a processing target, and a mask film is conformably formed above the processing target. Next, etch-back of the mask film is performed so that the mask film remains on a side surface of the core film. After that, line-and-space shaped core patterns, made of the core film, is formed in an area other than an area forming the opening pattern. Next, sidewall patterns are formed around the core patterns, and the core patterns are removed. Next, the processing target is patterned by using the mask film and the sidewall patterns.
    • 根据一个实施例,在加工对象上方的芯膜中形成开口图案,并且掩模膜顺应地形成在加工对象上方。 接下来,进行掩模膜的回蚀,使得掩模膜保留在芯膜的侧表面上。 之后,形成由芯膜制成的线空间形状的芯图案,形成在除了形成开口图案的区域之外的区域中。 接下来,围绕芯图案形成侧壁图案,并且去除芯图案。 接下来,通过使用掩模膜和侧壁图案对处理对象进行图案化。