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1. 发明授权

US08635710B2 Scanning probe microscope and method of observing sample using the same 有权
标题翻译：扫描探针显微镜及使用其的观察样品的方法
公开(公告)号：US08635710B2
公开(公告)日：2014-01-21
申请号：US13446279
申请日：2012-04-13
申请人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Toshiaki Morita , Motoyuki Hirooka
发明人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Toshiaki Morita , Motoyuki Hirooka
IPC分类号： G01B11/14 , G01Q60/06
CPC分类号： G01Q60/06 , G01N21/648 , G01Q60/22 , G01Q70/12
摘要： Optical information and topographic information of the surface of a sample are measured at a nanometer-order resolution and with high reproducibility without damaging a probe and the sample by combining a nanometer-order cylindrical structure with a nanometer-order microstructure to form a plasmon intensifying near-field probe having a nanometer-order optical resolution and by repeating approach/retreat of the probe to/from each measurement point on the sample at a low contact force.
摘要翻译：以纳米级分辨率和高重现性测量样品表面的光学信息和地形信息，而不损害探针和样品，通过将纳米级圆柱结构与纳米级微结构组合以形成等离子体激元附近具有纳米级光学分辨率并且以低接触力重复将样品上的每个测量点的探针接近/退回。

2. 发明申请

US20120204297A1 Scanning Probe Microscope and Method of Observing Sample Using the Same 有权
标题翻译：扫描探针显微镜及其使用方法
公开(公告)号：US20120204297A1
公开(公告)日：2012-08-09
申请号：US13446279
申请日：2012-04-13
申请人： Toshihiko NAKATA , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Toshiaki Morita , Motoyuki Hirooka
发明人： Toshihiko NAKATA , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Toshiaki Morita , Motoyuki Hirooka
IPC分类号： G01Q60/06 , G01Q60/18 , B82Y15/00
CPC分类号： G01Q60/06 , G01N21/648 , G01Q60/22 , G01Q70/12
摘要： Optical information and topographic information of the surface of a sample are measured at a nanometer-order resolution and with high reproducibility without damaging a probe and the sample by combining a nanometer-order cylindrical structure with a nanometer-order microstructure to form a plasmon intensifying near-field probe having a nanometer-order optical resolution and by repeating approach/retreat of the probe to/from each measurement point on the sample at a low contact force.
摘要翻译：以纳米级分辨率和高重现性测量样品表面的光学信息和地形信息，而不损害探针和样品，通过将纳米级圆柱结构与纳米级微结构组合以形成等离子体激元附近具有纳米级光学分辨率并且以低接触力重复将样品上的每个测量点的探针接近/退回。

3. 发明授权

US08181268B2 Scanning probe microscope and method of observing sample using the same 有权
标题翻译：扫描探针显微镜及使用其的观察样品的方法
公开(公告)号：US08181268B2
公开(公告)日：2012-05-15
申请号：US12864196
申请日：2008-12-18
申请人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Toshiaki Morita , Motoyuki Hirooka
发明人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Toshiaki Morita , Motoyuki Hirooka
IPC分类号： G01N13/10
CPC分类号： G01Q60/06 , G01N21/648 , G01Q60/22 , G01Q70/12
摘要： Optical information and topographic information of the surface of a sample are measured at a nanometer-order resolution and with high reproducibility without damaging a probe and the sample by combining a nanometer-order cylindrical structure with a nanometer-order microstructure to form a plasmon intensifying near-field probe having a nanometer-order optical resolution and by repeating approach/retreat of the probe to/from each measurement point on the sample at a low contact force.
摘要翻译：以纳米级分辨率和高重现性测量样品表面的光学信息和地形信息，而不损害探针和样品，通过将纳米级圆柱结构与纳米级微结构组合以形成等离子体激元附近具有纳米级光学分辨率并且以低接触力重复将样品上的每个测量点的探针接近/退回。

4. 发明申请

US20100325761A1 Scanning Probe Microscope and Method of Observing Sample Using the Same 有权
标题翻译：扫描探针显微镜及其使用方法
公开(公告)号：US20100325761A1
公开(公告)日：2010-12-23
申请号：US12864196
申请日：2008-12-18
申请人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Toshiaki Morita , Motoyuki Hirooka
发明人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Toshiaki Morita , Motoyuki Hirooka
IPC分类号： G01Q60/24
CPC分类号： G01Q60/06 , G01N21/648 , G01Q60/22 , G01Q70/12
摘要： Optical information and topographic information of the surface of a sample are measured at a nanometer-order resolution and with high reproducibility without damaging a probe and the sample by combining a nanometer-order cylindrical structure with a nanometer-order microstructure to form a plasmon intensifying near-field probe having a nanometer-order optical resolution and by repeating approach/retreat of the probe to/from each measurement point on the sample at a low contact force.
摘要翻译：以纳米级分辨率和高重现性测量样品表面的光学信息和地形信息，而不损害探针和样品，通过将纳米级圆柱结构与纳米级微结构组合以形成等离子体激元附近具有纳米级光学分辨率并且以低接触力重复将样品上的每个测量点的探针接近/退回。

5. 发明申请

US20100218287A1 SCANNING PROBE MICROSCOPE AND METHOD OF OBSERVING SAMPLE USING THE SAME 有权
标题翻译：扫描探针显微镜及其使用方法观察样品
公开(公告)号：US20100218287A1
公开(公告)日：2010-08-26
申请号：US12712745
申请日：2010-02-25
申请人： Toshihiko NAKATA , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Motoyuki Hirooka
发明人： Toshihiko NAKATA , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Motoyuki Hirooka
IPC分类号： G01Q20/02 , G01Q60/18
CPC分类号： G01Q60/22 , G01Q70/12
摘要： In a scanning probe microscope, a nanotube and metal nano-particles are combined together to configure a plasmon-enhanced near-field probe having an optical resolution on the order of nanometers as a measuring probe in which a metal structure is embedded, and this plasmon-enhanced near-field probe is installed in a highly-efficient plasmon exciting unit to repeat approaching to and retracting from each measuring point on a sample with a low contact force, so that optical information and profile information of the surface of the sample are measured with a resolution on the order of nanometers, a high S/N ratio, and high reproducibility without damaging both of the probe and the sample.
摘要翻译：在扫描探针显微镜中，将纳米管和金属纳米粒子组合在一起构成具有纳米数量级的光学分辨率的等离子体增强型近场探针作为嵌入金属结构的测量探针，该等离子体激元增强的近场探头安装在高效的等离子体激元单元中，以低接触力重复接近和缩回样品上的每个测量点，从而测量样品表面的光学信息和轮廓信息分辨率为纳米级，高S / N比，高重现性，不损伤探头和样品。

6. 发明授权

US08407811B2 Scanning probe microscope and method of observing sample using the same 有权
标题翻译：扫描探针显微镜及使用其的观察样品的方法
公开(公告)号：US08407811B2
公开(公告)日：2013-03-26
申请号：US12712745
申请日：2010-02-25
申请人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Motoyuki Hirooka
发明人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Motoyuki Hirooka
IPC分类号： G01Q60/24
CPC分类号： G01Q60/22 , G01Q70/12
摘要： In a scanning probe microscope, a nanotube and metal nano-particles are combined together to configure a plasmon-enhanced near-field probe having an optical resolution on the order of nanometers as a measuring probe in which a metal structure is embedded, and this plasmon-enhanced near-field probe is installed in a highly-efficient plasmon exciting unit to repeat approaching to and retracting from each measuring point on a sample with a low contact force, so that optical information and profile information of the surface of the sample are measured with a resolution on the order of nanometers, a high S/N ratio, and high reproducibility without damaging both of the probe and the sample.
摘要翻译：在扫描探针显微镜中，将纳米管和金属纳米粒子组合在一起构成具有纳米数量级的光学分辨率的等离子体增强型近场探针作为嵌入金属结构的测量探针，该等离子体激元增强的近场探头安装在高效的等离子体激元单元中，以低接触力重复接近和缩回样品上的每个测量点，从而测量样品表面的光学信息和轮廓信息分辨率为纳米级，高S / N比，高重现性，不损伤探头和样品。

7. 发明授权

US08695110B2 Scanning probe microscope and sample observing method using the same 有权
标题翻译：扫描探针显微镜及使用其的样品观察方法
公开(公告)号：US08695110B2
公开(公告)日：2014-04-08
申请号：US13586754
申请日：2012-08-15
申请人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Motoyuki Hirooka
发明人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Motoyuki Hirooka
IPC分类号： G01Q70/00 , G01Q70/16 , G01N13/00
CPC分类号： G01Q60/18 , G01Q60/22
摘要： In a near-field scanning microscope using an aperture probe, the upper limit of the aperture formation is at most several ten nm in practice. In a near-field scanning microscope using a scatter probe, the resolution ability is limited to at most several ten nm because of the external illuminating light serving as background noise. Moreover, measurement reproducibility is seriously lowered by a damage or abrasion of a probe. Optical data and unevenness data of the surface of a sample can be measured at a nm-order resolution ability and a high reproducibility while damaging neither the probe nor the sample by fabricating a plasmon-enhanced near-field probe having a nm-order optical resolution ability by combining a nm-order cylindrical structure with nm-order microparticles and repeatedly moving the probe toward the sample and away therefrom at a low contact force at individual measurement points on the sample.
摘要翻译：在使用孔径探针的近场扫描显微镜中，实际上孔径形成的上限为至多几十nm。在使用散射探针的近场扫描显微镜中，由于外部照明光作为背景噪声，分辨能力被限制在至多几十nm。此外，通过探针的损伤或磨损，测量再现性被严重降低。可以以nm级分辨能力和高再现性测量样品表面的光学数据和不均匀性数据，同时通过制造具有nm级光学分辨率的等离子体增强近场探针而不损害探针和样品通过将nm级圆柱形结构与nm级微粒组合，并在样品上的各个测量点处以低接触力将探针重复地移动到样品并从中离开它们的能力。

8. 发明申请

US20100064396A1 SCANNING PROBE MICROSCOPE AND SAMPLE OBSERVING METHOD USING THE SAME 有权
标题翻译：扫描探针显微镜和使用其的样品观察方法
公开(公告)号：US20100064396A1
公开(公告)日：2010-03-11
申请号：US12523369
申请日：2008-02-26
申请人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Motoyuki Hirooka
发明人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Motoyuki Hirooka
IPC分类号： G01Q60/18 , G01Q60/24
CPC分类号： G01Q60/18 , G01Q60/22
摘要： In a near-field scanning microscope using an aperture probe, the upper limit of the aperture formation is at most several ten nm in practice. In a near-field scanning microscope using a scatter probe, the resolution ability is limited to at most several ten nm because of the external illuminating light serving as background noise. Moreover, measurement reproducibility is seriously lowered by a damage or abrasion of a probe. Optical data and unevenness data of the surface of a sample can be measured at a nm-order resolution ability and a high reproducibility while damaging neither the probe nor the sample by fabricating a plasmon-enhanced near-field probe having a nm-order optical resolution ability by combining a nm-order cylindrical structure with nm-order microparticles and repeatedly moving the probe toward the sample and away therefrom at a low contact force at individual measurement points on the sample.
摘要翻译：在使用孔径探针的近场扫描显微镜中，实际上孔径形成的上限为至多几十nm。在使用散射探针的近场扫描显微镜中，由于外部照明光作为背景噪声，分辨能力被限制在至多几十nm。此外，通过探针的损伤或磨损，测量再现性被严重降低。可以以nm级分辨能力和高再现性测量样品表面的光学数据和不均匀性数据，同时通过制造具有nm级光学分辨率的等离子体增强近场探针而不损害探针和样品通过将nm级圆柱形结构与nm级微粒组合，并在样品上的各个测量点处以低接触力将探针重复地移动到样品并从中离开它们的能力。

9. 发明授权

US08272068B2 Scanning probe microscope and sample observing method using the same 有权
标题翻译：扫描探针显微镜及使用其的样品观察方法
公开(公告)号：US08272068B2
公开(公告)日：2012-09-18
申请号：US12523369
申请日：2008-02-26
申请人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Motoyuki Hirooka
发明人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Motoyuki Hirooka
IPC分类号： G01N13/00 , G01B11/30
CPC分类号： G01Q60/18 , G01Q60/22
摘要： In a near-field scanning microscope using an aperture probe, the upper limit of the aperture formation is at most several ten nm in practice. In a near-field scanning microscope using a scatter probe, the resolution ability is limited to at most several ten nm because of the external illuminating light serving as background noise. Moreover, measurement reproducibility is seriously lowered by a damage or abrasion of a probe. Optical data and unevenness data of the surface of a sample can be measured at a nm-order resolution ability and a high reproducibility while damaging neither the probe nor the sample by fabricating a plasmon-enhanced near-field probe having a nm-order optical resolution ability by combining a nm-order cylindrical structure with nm-order microparticles and repeatedly moving the probe toward the sample and away therefrom at a low contact force at individual measurement points on the sample.
摘要翻译：在使用孔径探针的近场扫描显微镜中，实际上孔径形成的上限为至多几十nm。在使用散射探针的近场扫描显微镜中，由于外部照明光作为背景噪声，分辨能力被限制在至多几十nm。此外，通过探针的损伤或磨损，测量再现性被严重降低。可以以nm级分辨能力和高再现性测量样品表面的光学数据和不均匀性数据，同时通过制造具有nm级光学分辨率的等离子体增强近场探针而不损害探针和样品通过将nm级圆柱形结构与nm级微粒组合，并在样品上的各个测量点处以低接触力将探针重复地移动到样品并从中离开它们的能力。

10. 发明授权

US08629985B2 Displacement measurement method and apparatus thereof, stage apparatus, and probe microscope 失效
标题翻译：位移测量方法及其装置，平台装置和探针显微镜
公开(公告)号：US08629985B2
公开(公告)日：2014-01-14
申请号：US13605395
申请日：2012-09-06
申请人： Toshihiko Nakata , Masahiro Watanabe , Shuichi Baba , Mineo Nomoto
发明人： Toshihiko Nakata , Masahiro Watanabe , Shuichi Baba , Mineo Nomoto
IPC分类号： G01B9/02
CPC分类号： G01Q20/02 , G01B9/02014 , G01B9/02057 , G01B9/02058 , G01B9/02076 , G01B2290/45 , G01B2290/70 , G01S17/50
摘要： A displacement measurement method, an apparatus thereof, and a probe microscope. which enable stable measure an amount of displacement and a moving distance of an object under measurement with an accuracy of the sub-nanometer order or below without being affected by disturbances such as fluctuations of air and mechanical vibration. A pulsed beam is split into two; one beam is reflected by an object under measurement and then inputted to a delay optical path equivalent to one pulse period; and the other beam is sent through the same delay optical path in the opposite direction up to the object under measurement with a delay of one pulse period, and then reflected by the object under measurement. An optical phase variation caused by the movement of the object under measurement is obtained by subjecting the two pulsed beams to interference.
摘要翻译：位移测量方法，其装置和探针显微镜。这使得能够以亚纳米级或更低的精度稳定地测量被测物体的位移量和移动距离，而不受诸如空气波动和机械振动之类的扰动的影响。脉冲束被分成两部分; 一个光束被测量对象反射，然后输入到等于一个脉冲周期的延迟光路; 并且另一个光束在相对的方向上通过相同的延迟光路被发送到被测物体的一个脉冲周期的延迟，然后被测量对象反射。通过对两束脉冲光束进行干涉而获得由测量对象的运动引起的光学相位变化。

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