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    • 3. 发明授权
    • Semiconductor device and method of manufacturing the same
    • 半导体装置及其制造方法
    • US07241685B2
    • 2007-07-10
    • US10390413
    • 2003-03-18
    • Hiroshi MoriyaTomio IwasakiHideo MiuraShinji NishiharaMasashi Sahara
    • Hiroshi MoriyaTomio IwasakiHideo MiuraShinji NishiharaMasashi Sahara
    • H01L21/44
    • H01L23/53223H01L2924/0002H01L2924/00
    • There is provided a semiconductor device having a wiring structure which reduces possibility of a short circuit, and method of making the device. Besides, there is provided a semiconductor device having high reliability. Further, there is provided a semiconductor device having high yield. A wiring line is formed at one main surface side of a semiconductor substrate, and has a laminate structure of an adjacent conductor layer and a main wiring layer. The main wiring layer contains an added element to prevent migration. The adjacent conductor layer is formed of a material for preventing a main constituent element and the added element of the main wiring layer from diffusing into the substrate beneath the adjacent conductor layer, and the concentration of the added element at a location close to an interface between the adjacent conductor layer and the main wiring layer is low compared to the concentration of the added element in the main wiring layer spaced from the adjacent conductor layer.
    • 提供一种具有降低短路可能性的布线结构的半导体器件及其制造方法。 此外,提供了具有高可靠性的半导体器件。 此外,提供了一种具有高产率的半导体器件。 在半导体衬底的一个主表面侧形成布线,并且具有相邻导体层和主布线层的叠层结构。 主配线层包含一个添加的元素以防止迁移。 相邻的导体层由用于防止主要构成元素和主配线层的添加元素扩散到相邻导体层下方的基板中的材料形成,并且添加元素在靠近界面处的位置的浓度 与相邻的导体层间隔开的主配线层的添加元素的浓度相比,相邻的导体层和主布线层的电位低。
    • 8. 发明授权
    • Method of designing a semiconductor device
    • 设计半导体器件的方法
    • US06949387B2
    • 2005-09-27
    • US10626718
    • 2003-07-25
    • Hideo MiuraMakoto OgasawaraHiroo MasudaJun MurataNoriaki Okamoto
    • Hideo MiuraMakoto OgasawaraHiroo MasudaJun MurataNoriaki Okamoto
    • H01L21/762H01L27/08H01L21/66
    • H01L21/76205H01L21/76202H01L27/0802
    • A technique for a semiconductor device is provided that includes forming circuit regions on a device formation region and device isolation regions on a semiconductor substrate, a ratio of the width of a device isolation region to the width of adjacent circuit regions thereto is set at 2 to 50. A design method is also provided and includes conducting measurements such as of thicknesses of a pad oxide film and a nitride film, the internal stress of the nitride film, the width of both device formation and isolation regions, the depth of the etched portion of the nitride film for forming the groove in a device isolation region, conducting stress analysis in the proximity of the groove due to thermal oxidation, and setting values pertaining to the width of the device formation region and of the device isolation region which do not lead to occurrence of dislocation.
    • 提供了一种半导体器件的技术,其包括在器件形成区域上形成电路区域和半导体衬底上的器件隔离区域,器件隔离区域的宽度与其相邻电路区域的宽度的比率被设置为2至 还提供了一种设计方法,包括进行测量,例如衬垫氧化膜和氮化物膜的厚度,氮化物膜的内部应力,器件形成和隔离区域的宽度,蚀刻部分的深度 的用于在器件隔离区域中形成沟槽的氮化物膜,由于热氧化而在沟槽附近进行导电应力分析,以及与器件形成区域的宽度和不引导的器件隔离区域的设定值 发生脱位。
    • 9. 发明授权
    • Light wavelength converting module
    • 光波长转换模块
    • US06882665B2
    • 2005-04-19
    • US09972960
    • 2001-10-10
    • Hideo MiuraShinichiro Sonoda
    • Hideo MiuraShinichiro Sonoda
    • H01S5/024H01S5/0683H01S3/10H01S3/30
    • H01S5/02415H01S5/0683
    • A light wavelength converting module is provided in which generation of noise due to return light is prevented and a wave whose wavelength is converted can be obtained stably. The light wavelength converting module is formed by a semiconductor laser from which a fundamental wave exits, and a light wavelength converting element which is optically coupled to the semiconductor laser and which converts a wavelength of the fundamental wave which enters from the semiconductor laser. A wavelength plate is disposed at a light exiting side of the light wavelength converting element. An IR cutting filter, which serves as a removing means for removing the fundamental wave from a second harmonic, is disposed between the wavelength plate and the light wavelength converting element.
    • 提供一种光波长转换模块,其中防止了由返回光产生的噪声,并且可以稳定地获得波长转换的波。 光波长转换模块由基波出射的半导体激光器和与半导体激光器光学耦合并转换从半导体激光器入射的基波的波长的光波长转换元件形成。 波长板设置在光波长转换元件的光出射侧。 作为用于从二次谐波除去基波的去除装置的红外截止滤光器设置在波长板和光波长转换元件之间。