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    • 2. 发明授权
    • Photosensitive composition
    • 感光组合物
    • US5691101A
    • 1997-11-25
    • US644395
    • 1996-05-09
    • Toru UshirogouchiNaomi ShidaTakuya NaitoKoji AsakawaAkinori HonguMakoto NakaseHirokazu Niki
    • Toru UshirogouchiNaomi ShidaTakuya NaitoKoji AsakawaAkinori HonguMakoto NakaseHirokazu Niki
    • G03F7/004G03F7/021G03F7/038G03F7/039G03F7/023
    • G03F7/039G03F7/0045G03F7/0215G03F7/038Y10S430/107Y10S430/11Y10S430/111
    • Disclosed are a safe slurry photosensitive composition superior in image formation capabilities such as resolution and sensitivity and containing no harmful compound, and a safe water-soluble photosensitive composition capable of being dissolved in water without using any organic solvent while maintaining a sufficient sensitivity as a resist and containing no harmful substance. The slurry photosensitive composition contains a compound which generates an acid when irradiated with light or ionizing radiation, at least one type of a resin with acid-crosslinkability or acid-decomposability, and a powder. Various devices can be manufactured by forming a layer of this photosensitive composition on a substrate, exposing the layer to light in accordance with a desired pattern, and heating the layer. The water-soluble photosensitive composition contains a compound which generates an acid when irradiated with light or ionizing radiation, and an acetal resin. This water-soluble photosensitive composition is coated on a substrate and irradiated with light or ionizing radiation in accordance with a desired pattern. The resultant substrate is chemically amplified by heating and developed with water. This makes it possible to safely form a pattern without using any ventilator.
    • 公开了一种安全的浆料感光性组合物,其成像能力如分辨率和灵敏度优异且不含有害化合物,以及能够在不使用任何有机溶剂的情况下溶解在水中的安全的水溶性光敏组合物,同时保持足够的灵敏度作为抗蚀剂 不含有害物质。 浆料光敏组合物含有当用光或电离辐射照射时产生酸的化合物,至少一种具有酸交联性或酸分解性的树脂和粉末。 可以通过在基板上形成这种感光性组合物的层来制造各种装置,根据期望的图案将该层曝光,并加热该层。 水溶性光敏组合物含有当用光或电离辐射照射时产生酸的化合物和缩醛树脂。 将该水溶性感光性组合物涂布在基材上,并根据期望的图案用光或电离辐射照射。 所得到的底物通过加热化学放大并用水显影。 这使得可以安全地形成图案而不使用任何呼吸机。