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    • 1. 发明授权
    • Mass spectrometer
    • 质谱仪
    • US07053367B2
    • 2006-05-30
    • US10494335
    • 2001-11-07
    • Tomoyuki TobitaToshihiro IshizukaMasaru TomiokaKiyomi YoshinariMasami Sakamoto
    • Tomoyuki TobitaToshihiro IshizukaMasaru TomiokaKiyomi YoshinariMasami Sakamoto
    • H01J49/00
    • H01J49/067H01J49/044
    • In a mass spectrometer utilizing an atmospheric pressure ion source, the amount of un-vaporized droplets that reach a mass spectrometric section is reduced. A mass spectrometer comprises: an ionization section for ionizing a sample at substantially atmospheric pressure; a first and a second intermediate pressure section in which the pressure is maintained lower than the pressure in said ionization section; a high vacuum section in which the pressure is maintained lower than the pressure in said intermediate pressure section and in which a mass spectrometric means for subjecting ions to mass spectrometry is disposed; a first pore electrode disposed between said ionization section and said first intermediate pressure section; an intermediate pore electrode disposed between said first intermediate pressure section and said second intermediate pressure section; and a second pore electrode disposed between said second intermediate pressure section and said high vacuum section. A first converging electrode is provided in the first intermediate pressure section, the first converging electrode having an opening towards the first pore electrode and another opening towards the intermediate pore electrode. The opening towards the first pore electrode has a larger diameter than the opening towards the intermediate pore electrode, such that the first converging electrode has a tapered shape.
    • 在使用大气压离子源的质谱仪中,达到质谱分析的未汽化液滴的量减少。 质谱仪包括:用于在基本上大气压下电离样品的电离部分; 第一和第二中间压力段,其中所述压力保持低于所述电离部分中的压力; 其中压力保持低于所述中压部分中的压力并且其中设置用于使离子进行质谱分析的质谱装置的高真空部分; 设置在所述电离部和所述第一中间压部之间的第一孔电极; 设置在所述第一中间压力部分和所述第二中间压力部分之间的中间孔电极; 以及设置在所述第二中间压力部分和所述高真空部分之间的第二孔电极。 第一会聚电极设置在第一中间压力部分中,第一会聚电极具有朝向第一孔电极的开口和朝向中间孔电极的另一开口。 朝向第一孔电极的开口具有比朝向中间孔电极的开口更大的直径,使得第一会聚电极具有锥形形状。
    • 2. 发明授权
    • Ion trap mass spectrometer
    • 离子阱质谱仪
    • US6157030A
    • 2000-12-05
    • US143398
    • 1998-08-28
    • Minoru SakairiTadao MimuraToshihiro IshizukaMasaru TomiokaYasuaki TakadaTakayuki Nabeshima
    • Minoru SakairiTadao MimuraToshihiro IshizukaMasaru TomiokaYasuaki TakadaTakayuki Nabeshima
    • H01J49/42
    • H01J49/424
    • Disclosed is an ion trap mass spectrometer improved to obtain a high sensitivity without the lowering of resolution. By fitting a mesh electrode to an aperture (an ion sampling aperture or an ion extracting aperture) made in endcap electrodes constituting an ion trap mass analysis region, a radio frequency electric field in the mass analysis region is not disturbed even if the diameter of the aperture is set to a large value to heighten ion transmission efficiency. By fitting a shield electrode for preventing collision of ions with an insulated ring constituting an outer wall of the mass analysis region, charging up of the insulated ring is prevented to improve stability of detection signals. Furthermore, by arranging a shield member for shielding stray charged particles detouring through the circumference of the mass analysis region to approach an ion detector, generation of noises based on these stray charged particles is prevented.
    • 公开了一种改进的离子阱质谱仪,可以在不降低分辨率的情况下获得高灵敏度。 通过将网状电极装配到构成离子阱质量分析区域的端盖电极中的孔(离子取样孔或离子提取孔)上,即使直径为 孔径被设定为大的值以提高离子传输效率。 通过安装用于防止离子与构成质量分析区域的外壁的绝缘环碰撞的屏蔽电极,防止了绝缘环的充电以提高检测信号的稳定性。 此外,通过设置用于屏蔽通过质量分析区域的圆周去除杂散带电粒子的屏蔽构件以接近离子检测器,防止了基于这些杂散带电粒子的噪声的产生。
    • 5. 发明申请
    • Probe, probe card, and testing device
    • 探头,探针卡和测试装置
    • US20070229097A1
    • 2007-10-04
    • US11439227
    • 2006-05-24
    • Toshihiro Ishizuka
    • Toshihiro Ishizuka
    • G01R31/02
    • G01R1/07342G01R1/06738
    • An object is to provide a probe, a probe card, and a testing device which can precisely perform a test for conductive state of a conductive wiring in, for example, a through hole or a contact hole provided in a circuit board. Provided is a probe (10) for performing a test for conductivity of a conductive wiring in a hole such as a through hole or a contact hole provided in a circuit board. The probe (10) is provided with an elastically deformable leg portion (11) and a contact portion (13) provided on a tip side of the leg portion (11) to be brought into contact with the conductive wiring (21) provided in a through hole (22). The contact portion (13) is formed to be in a shape and size so as to be prevented from entering the through hole (22).
    • 本发明的目的是提供一种探针,探针卡和测试装置,其可以精确地对例如设置在电路板中的通孔或接触孔中的导电布线的导电状态进行测试。 提供一种用于对设置在电路板中的通孔或接触孔等孔中的导电配线进行导电性试验的探针(10)。 探针(10)设置有可弹性变形的腿部(11)和设置在腿部(11)的末端侧的接触部分(13),以与设置在其中的导电布线(21)接触 通孔(22)。 接触部分(13)形成为防止其进入通孔(22)的形状和尺寸。
    • 8. 发明授权
    • Strobo electron beam apparatus
    • Strobo电子束装置
    • US4755749A
    • 1988-07-05
    • US897857
    • 1986-08-19
    • Kazuo OokuboAkio ItoYoshiro GotoToshihiro IshizukaKazuyuki Ozaki
    • Kazuo OokuboAkio ItoYoshiro GotoToshihiro IshizukaKazuyuki Ozaki
    • H01L21/66G01Q30/02G01R31/302G01R31/305H01J37/28G01N23/00
    • G01R31/305
    • A strobo electron beam apparatus is provided having an energy analyzer, which: measures the voltage in the integrated circuit; samples a secondary electron signal by setting and connecting a retarding voltage of the energy analyzer to the measured phase; obtains the waveform of the secondary electron signal by a one time or several times phase scanning; and adds the product of a suitable coefficient and a difference between the secondary electron signal waveform, and a slice level to the retarding voltage and corrects the same. Multiple units are provided for: judging the conversion of the retarding voltage, from the value of the dispersion for the slice level of the secondary electron signal waveform; for adding and giving a mean of the retarding voltage, for obtaining a measured value of retarding voltage having a desired S/N ratio; and for random phase scanning so that the measured value having a desired S/N ratio can be easily obtained.
    • 提供了一种频闪电子束装置,其具有:能量分析器,其测量集成电路中的电压; 通过将能量分析仪的延迟电压设置并连接到测量相位来对二次电子信号进行采样; 通过一次或多次相位扫描获得二次电子信号的波形; 并将二次电子信号波形和限幅电平之间的适当系数和差值的乘积加到延迟电压上并进行校正。 提供多个单元,用于从二次电子信号波形的限幅电平的色散值判断延迟电压的转换; 为了获得具有期望S / N比的延迟电压的测量值,用于添加和给出平均延迟电压; 并进行随机相位扫描,从而可以容易地获得具有期望S / N比的测量值。
    • 10. 发明申请
    • Probe, probe card, and testing device
    • 探头,探针卡和测试装置
    • US20080157797A1
    • 2008-07-03
    • US12073114
    • 2008-02-29
    • Toshihiro Ishizuka
    • Toshihiro Ishizuka
    • G01R1/067
    • G01R1/07342G01R1/06738
    • An object is to provide a probe, a probe card, and a testing device which can precisely perform a test for conductive state of a conductive wiring in, for example, a through hole or a contact hole provided in a circuit board. Provided is a probe (10) for performing a test for conductivity of a conductive wiring in a hole such as a through hole or a contact hole provided in a circuit board. The probe (10) is provided with an elastically deformable leg portion (11) and a contact portion (13) provided on a tip side of the leg portion (11) to be brought into contact with the conductive wiring (21) provided in a through hole (22). The contact portion (13) is formed to be in a shape and size so as to be prevented from entering the through hole (22).
    • 本发明的目的是提供一种探针,探针卡和测试装置,其可以精确地对例如设置在电路板中的通孔或接触孔中的导电布线的导电状态进行测试。 提供一种用于对设置在电路板中的通孔或接触孔等孔中的导电配线进行导电性试验的探针(10)。 探针(10)设置有可弹性变形的腿部(11)和设置在腿部(11)的末端侧的接触部分(13),以与设置在其中的导电布线(21)接触 通孔(22)。 接触部分(13)形成为防止其进入通孔(22)的形状和尺寸。