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    • 9. 发明申请
    • PLASMA PROCESSING APPARATUS
    • 等离子体加工设备
    • US20100319854A1
    • 2010-12-23
    • US12546783
    • 2009-08-25
    • Kenetsu YOKOGAWAKenji MaedaTomoyuki Tamura
    • Kenetsu YOKOGAWAKenji MaedaTomoyuki Tamura
    • H01L21/3065
    • H01J37/3244H01J37/32091H01J37/32532H01J37/3266
    • In a plasma processing apparatus conducting surface processing on a sample to be processed with plasma, an upper electrode includes a shower plate having first gas holes bored through it, a conductor plate disposed at back of the shower plate and having second gas holes bored through it, an insulation plate disposed in a center part of the conductor plate and having third gas holes bored through it, and an antenna basic member unit disposed at back of the conductor plate and having a temperature control function unit and a gass distribution unit. First and second minute gaps are formed in a radial direction at an interface between the shower plate and the insulation plate, and at an interface between the insulation plate and the conductor plate, respectively. Centers of the first gas holes are shifted from centers of the third gas holes in a circumference or radial direction.
    • 在对等离子体处理的样品进行表面处理的等离子体处理装置中,上部电极包括具有穿过其的第一气孔的喷淋板,布置在喷淋板背面的导体板,并且具有穿过其的第二气孔 设置在导体板的中心部分并具有穿过其的第三气孔的绝缘板,以及设置在导体板背面并具有温度控制功能单元和气体分配单元的天线基座部件单元。 在喷淋板和绝缘板之间的界面处以及在绝缘板和导体板之间的界面处,分别在径向上形成第一和第二微小间隙。 第一气孔的中心在第三气孔的中心沿周向或径向偏移。
    • 10. 发明授权
    • Radiation detecting apparatus, scintillator panel, and radiographing system
    • 辐射检测装置,闪烁体面板和射线照相系统
    • US07256404B2
    • 2007-08-14
    • US11200025
    • 2005-08-10
    • Masato InoueYoshihiro OgawaSatoshi OkadaTomoyuki TamuraShinichi TakedaKazumi Nagano
    • Masato InoueYoshihiro OgawaSatoshi OkadaTomoyuki TamuraShinichi TakedaKazumi Nagano
    • G01T1/20
    • G01T1/2018
    • A radiation detecting apparatus having: a substrate; a phosphor layer which is formed on a principal plane of the substrate and converts a wavelength of a radiation; and a phosphor protective member including a phosphor protective layer which covers the phosphor layer and is adhered to the substrate, wherein the phosphor protective layer is made of a hot melt resin and an upper surface and a side surface of the phosphor layer and at least a part of at least one side surface of the substrate are covered with the phosphor protective layer. Thus, a moisture-proofing effect for penetration of the moisture from an interface between the phosphor layer and the substrate on the side surface side of the substrate can be improved. Further, by using the hot melt resin for the phosphor protective layer, simplification of manufacturing steps, remarkable reduction in the number of working steps, and remarkable reduction in costs of a product can be accomplished.
    • 一种放射线检测装置,具有:基板; 荧光体层,其形成在所述基板的主平面上并转换辐射的波长; 以及荧光体保护层,其包括覆盖所述荧光体层并附着在所述基板上的荧光体保护层,所述荧光体保护层由热熔树脂和所述荧光体层的上表面和侧面形成,并且至少 衬底的至少一个侧表面的一部分被荧光体保护层覆盖。 因此,能够提高从基板的侧面侧的荧光体层和基板的界面渗入水分的防湿效果。 此外,通过使用热熔树脂作为荧光体保护层,可以实现制造步骤的简化,工序数量的显着减少以及产品成本的显着降低。