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1. 发明授权

US06745093B1 Vacuum process apparatus and method of operating the same 有权
标题翻译：真空处理装置及其操作方法
公开(公告)号：US06745093B1
公开(公告)日：2004-06-01
申请号：US09526206
申请日：2000-03-15
申请人： Tomoyuki Kawano , Kouji Nishihata , Tetsuya Tahara , Shoji Okiguchi , Hideki Yamasaki
发明人： Tomoyuki Kawano , Kouji Nishihata , Tetsuya Tahara , Shoji Okiguchi , Hideki Yamasaki
IPC分类号： G06F1900
CPC分类号： G05B19/41865 , G05B2219/32265 , G05B2219/45031 , H01L21/67276 , Y02P90/20
摘要： A vacuum process apparatus has a plurality of cassettes for holding samples; a transporting means for transporting the samples; a plurality of vacuum process chambers each for processing samples one by one; an evacuation means for evacuating the vacuum process chambers; a load chamber and an unload chamber communicating with the vacuum process chambers; and an apparatus control means for controlling transporting and processing of the samples. The apparatus control means operates to measure a time period of transporting each of the samples and a time period of processing in each of the vacuum process chambers, and determines a next extracting order of extraction of the samples from the plurality of cassettes based on the measured time periods.
摘要翻译：真空处理装置具有用于保持样品的多个盒; 用于运送样品的运送装置; 多个真空处理室，每个用于一个处理样品; 用于抽真空处理室的抽空装置; 负载室和与真空处理室连通的卸载室; 以及用于控制样品的输送和处理的装置控制装置。装置控制装置用于测量每个样品的运送时间和每个真空处理室中的处理时间段，并且基于测量的样品确定从多个盒中提取样品的下一提取次序时间段

2. 发明授权

US06917844B2 Vacuum process apparatus and method of operating the same 有权
标题翻译：真空处理装置及其操作方法
公开(公告)号：US06917844B2
公开(公告)日：2005-07-12
申请号：US10851079
申请日：2004-05-24
申请人： Tomoyuki Kawano , Kouji Nishihata , Tetsuya Tahara , Shoji Okiguchi , Hideki Yamasaki
发明人： Tomoyuki Kawano , Kouji Nishihata , Tetsuya Tahara , Shoji Okiguchi , Hideki Yamasaki
IPC分类号： H01L21/02 , G05B19/418 , G06F19/00 , H01L21/00
CPC分类号： G05B19/41865 , G05B2219/32265 , G05B2219/45031 , H01L21/67276 , Y02P90/20
摘要： A vacuum process apparatus includes a plurality of cassettes for holding samples, a transporter which transports the samples, a plurality of vacuum process chambers each for processing samples one by one, an evacuator which evacuates the vacuum process chambers, and a load chamber and an unload chamber communicating with the vacuum process chambers. An apparatus controller is provided for controlling transporting and processing of the samples. The apparatus controller measures a time period for transporting each of the samples and a processing time period for processing a sample in each of the vacuum process chambers, and determines a next order of extraction of the samples from the plurality of cassettes based on the measured time periods.
摘要翻译：真空处理装置包括：用于保持样品的多个盒，运送样品的运送器，各个用于一个处理样品的多个真空处理室，抽空真空处理室的抽空器，以及装载室和卸载室与真空处理室连通。提供了一种用于控制样品的运输和处理的设备控制器。设备控制器测量用于运送每个样品的时间段和用于处理每个真空处理室中的样品的处理时间段，并且基于测量的时间确定来自多个盒的样品的下一次提取次数时期。

3. 发明授权

US06941185B2 Operating method of vacuum processing system and vacuum processing system 有权
标题翻译：真空处理系统和真空处理系统的操作方法
公开(公告)号：US06941185B2
公开(公告)日：2005-09-06
申请号：US10140120
申请日：2002-05-08
申请人： Kouji Nishihata , Kazuhiro Joo , Shoji Ikuhara , Tetsuya Tahara , Shoji Okiguchi
发明人： Kouji Nishihata , Kazuhiro Joo , Shoji Ikuhara , Tetsuya Tahara , Shoji Okiguchi
IPC分类号： H01L21/00 , H01L21/677 , G06F19/00
CPC分类号： H01L21/67745 , H01L21/67167 , H01L21/67276 , Y10S414/135 , Y10S414/139 , Y10S414/14 , Y10S438/905 , Y10T29/41
摘要： A vacuum processing apparatus and method wherein a plurality of processing units are for conducting processing, a transfer processing unit is connected with the plurality of processing units for carrying wafers to the processing units, a transfer device is disposed in the transfer processing unit and carries the wafers and cassettes for containing the wafers, and a control unit is provided for conducting transfer control for transferring the wafers from respective cassettes to the transfer processing unit. The wafers are processed by using the plural processing units, and at least two of the cassettes are used. Parallel processing is conducted of applying same processing to the wafers contained on each of the cassettes by applying the same recipe and the wafers, after applying the parallel processing, are returned to the original cassette.
摘要翻译：一种真空处理装置和方法，其中多个处理单元用于进行处理，转移处理单元与用于将晶片运送到处理单元的多个处理单元连接，转移装置设置在转移处理单元中，并携带用于容纳晶片的晶片和盒，以及控制单元，用于进行用于将晶片从相应的盒传送到传送处理单元的传送控制。通过使用多个处理单元处理晶片，并且使用至少两个盒。通过施加相同的配方，对包含在每个盒中的晶片进行相同的处理，并行处理，并且在施加并行处理之后，晶片返回到原始盒。

4. 发明授权

US06885906B2 Operating method of vacuum processing system and vacuum processing system 有权
标题翻译：真空处理系统和真空处理系统的操作方法
公开(公告)号：US06885906B2
公开(公告)日：2005-04-26
申请号：US10140184
申请日：2002-05-08
申请人： Kouji Nishihata , Kazuhiro Joo , Shoji Ikuhara , Tetsuya Tahara , Shoji Okiguchi
发明人： Kouji Nishihata , Kazuhiro Joo , Shoji Ikuhara , Tetsuya Tahara , Shoji Okiguchi
IPC分类号： H01L21/00 , H01L21/677 , G06F19/00
CPC分类号： H01L21/67745 , H01L21/67167 , H01L21/67276 , Y10S414/135 , Y10S414/139 , Y10S414/14 , Y10S438/905 , Y10T29/41
摘要： A vacuum processing method and apparatus having one cassette containing wafers which are to be transferred in a preset transferring order to a processing unit via a transfer unit, and another cassette containing wafers to be processed on an emergency basis. Automatic control of processing a wafer from the one cassette is effected, and in response to a request for emergency processing of a water of the another cassette, the automatic processing control of the one wafer from the one cassette is temporarily stopped while completing processing of the wafer of the one cassette returning the same to the one cassette. Emergency processing is initiated by transferring a wafer from the another cassette to the vacuum processing unit via the transfer unit. The processing of the emergency wafer is completed and the processed emergency wafer is returned to the another cassette.
摘要翻译：一种具有一个盒子的真空处理方法和装置，其中一个盒子包含将以预定的转印顺序经由转印单元传送到处理单元的晶片，以及另一个盒子，其容纳在紧急的基础上处理的晶片。自动控制从一个盒子处理晶片，并且响应于对另一盒的水的紧急处理的请求，一个晶片从一个盒的自动处理控制暂时停止，同时完成一个盒的晶片将其返回到一个盒。通过传送单元将晶片从另一个盒传送到真空处理单元来启动紧急处理。完成紧急晶片的处理，将处理过的应急晶片返回到另一个盒。

5. 发明授权

US06853872B2 Operating method of vacuum processing system and vacuum processing system 有权
标题翻译：真空处理系统和真空处理系统的操作方法
公开(公告)号：US06853872B2
公开(公告)日：2005-02-08
申请号：US10140182
申请日：2002-05-08
申请人： Kouji Nishihata , Kazuhiro Joo , Shoji Ikuhara , Tetsuya Tahara , Shoji Okiguchi
发明人： Kouji Nishihata , Kazuhiro Joo , Shoji Ikuhara , Tetsuya Tahara , Shoji Okiguchi
IPC分类号： H01L21/00 , H01L21/677 , G06F19/00
CPC分类号： H01L21/67745 , H01L21/67167 , H01L21/67276 , Y10S414/135 , Y10S414/139 , Y10S414/14 , Y10S438/905 , Y10T29/41
摘要： A vacuum processing method and apparatus processing units for conducting processing, a transfer processing unit connected with the plurality of processing units for carrying wafers, and a control unit for controlling the processing units. A processing order information storing device stores a processing order of the wafers for the processing units, an operational information signal generating device generates an operational information signal indicating an operable or inoperable state of each of the processing units, an operational information signal storing device stores the operational information signal indicating the state of each of the processing units, and a control device matches and processes the processing order information and the operational information signal, and continues operation without using an inoperable processing unit while using other operable processing units.
摘要翻译：用于进行处理的真空处理方法和装置处理单元，与多个用于承载晶片的处理单元连接的转移处理单元，以及用于控制处理单元的控制单元。处理订单信息存储装置存储用于处理单元的晶片的处理顺序，操作信息信号生成装置生成指示每个处理单元的可操作或不可操作状态的操作信息信号，操作信息信号存储装置将指示每个处理单元的状态的操作信息信号，并且控制设备匹配并处理处理顺序信息和操作信息信号，并且在使用其他可操作的处理单元的同时不使用不可操作的处理单元继续操作。

6. 发明授权

US06714832B1 Operating method of vacuum processing system and vacuum processing system 有权
标题翻译：真空处理系统和真空处理系统的操作方法
公开(公告)号：US06714832B1
公开(公告)日：2004-03-30
申请号：US09535753
申请日：2000-03-27
申请人： Kouji Nishihata , Kazuhiro Joo , Shoji Ikuhara , Tetsuya Tahara , Shoji Okiguchi
发明人： Kouji Nishihata , Kazuhiro Joo , Shoji Ikuhara , Tetsuya Tahara , Shoji Okiguchi
IPC分类号： G06F1900
CPC分类号： H01L21/67745 , H01L21/67167 , H01L21/67276 , Y10S414/135 , Y10S414/139 , Y10S414/14 , Y10S438/905 , Y10T29/41
摘要： A method of operating a vacuum processing system including a plurality of processing units for processing wafers, a transferring unit for carrying the wafers and a control unit for controlling the processing units and the transferring unit. At least two of the plurality of processing units are connected to the transferring unit and wafers are processed using the processing units. The method includes the steps of judging whether each of the processing units is operable or inoperable, isolating inoperable ones of the processing units judged in the judging step from wafer processing, carrying wafers to operable ones of the processing units using the transferring unit and processing the wafers using only the operable processing units.
摘要翻译：一种操作真空处理系统的方法，该真空处理系统包括用于处理晶片的多个处理单元，用于承载晶片的转印单元和用于控制处理单元和转印单元的控制单元。多个处理单元中的至少两个连接到传送单元，并且使用处理单元处理晶片。该方法包括以下步骤：判断每个处理单元是否可操作或不可操作，将在判断步骤中判断的不可操作的处理单元与晶片处理隔离，使用转移单元将晶片运送到可操作的处理单元，并处理晶片仅使用可操作的处理单元。

7. 发明授权

US6069096A Operating method of vacuum processing system and vacuum processing system 失效
标题翻译：真空处理系统和真空处理系统的操作方法
公开(公告)号：US6069096A
公开(公告)日：2000-05-30
申请号：US925190
申请日：1997-09-08
申请人： Kouji Nishihata , Kazuhiro Joo , Shoji Ikuhara , Tetsuya Tahara , Shoji Okiguchi
发明人： Kouji Nishihata , Kazuhiro Joo , Shoji Ikuhara , Tetsuya Tahara , Shoji Okiguchi
IPC分类号： H01L21/68 , H01L21/00 , H01L21/677 , H01L21/50
CPC分类号： H01L21/67167 , H01L21/67745 , Y10S414/135 , Y10S414/139 , Y10T29/41
摘要： A vacuum processing system including two or more processing units for processing wafers and a transferring unit for carrying the wafers. In this system, even when any one of the processing units becomes inoperable because of a failure, the operation of the system can be continued, and even when a processing unit in the system requires repair or maintenance at the time of the start of operation, the system can be operated using other operable processing units without subjecting the operator to danger due to improper operation. As a result, the working efficiency of the system can be increased and the safety of the operator can be secured. In this system, the cleaning of the interior of each processing unit is performed by carrying a cleaning dummy wafer into each processing unit using the transferring unit, followed by recovery of the dummy wafer after cleaning, so that processing of wafers in the processing unit can be carried out once again.
摘要翻译：包括用于处理晶片的两个或多个处理单元和用于承载晶片的转印单元的真空处理系统。在该系统中，即使任何一个处理单元由于故障而变得不可操作，系统的操作可以继续，并且即使当系统中的处理单元在开始操作时需要修理或维护时，该系统可以使用其他可操作的处理单元操作，而不会由于操作不当而导致操作者的危险。结果，可以提高系统的工作效率，并确保操作者的安全。在该系统中，通过使用转印单元将清洁虚设晶片装载到各个处理单元中，然后在清洁之后恢复虚设晶片来进行每个处理单元的内部的清洁，从而处理单元中的晶片的处理可以再次进行。

8. 发明授权

US06225742B1 Self-ballasted fluorescent lamp 失效
标题翻译：自镇流荧光灯
公开(公告)号：US06225742B1
公开(公告)日：2001-05-01
申请号：US09640423
申请日：2000-08-17
申请人： Shiro Iida , Tetsuya Tahara , Hiroki Nakagawa
发明人： Shiro Iida , Tetsuya Tahara , Hiroki Nakagawa
IPC分类号： H01J744
CPC分类号： H01J61/325
摘要： A high wattage self-ballasted fluorescent lamp includes a fluorescent tube including a pair of electrodes inside, an electronic ballast circuit portion, an outer bulb, a resin case and a lamp base. (i) The outer bulb has an outer diameter of 60 mm to 70 mm, an outer diameter of a bottom portion of 50 mm to 58 mm, and a total length of 73 mm to 85 mm. (ii) The resin case has an outer diameter of 50 mm to 58 mm. (iii) The total length of the self-ballasted fluorescent lamp is not more than 148 mm. The fluorescent tube has a distance between the electrodes of 450 mm to 540 mm and an inner diameter of 8.0 mm to 10.0 mm, and is operated at a lamp current of not more than 220 mA. Thus, the self-ballasted fluorescent lamp can be compact so that the light fixture application ratio can be improved. Moreover, the self-ballasted fluorescent lamp has a lifetime as long as 6000 hours and a lamp efficiency as high as 66 lm, and the power consumption can be reduced.
摘要翻译：高功率自镇流荧光灯包括内部包括一对电极的荧光管，电子镇流器电路部分，外部灯泡，树脂壳体和灯座。（i）外灯泡具有60mm至70mm的外径，底部的外径为50mm至58mm，总长度为73mm至85mm。（ii）树脂外壳的外径为50mm〜58mm。（iii）自镇流荧光灯的总长度不超过148mm。荧光管的电极间距离为450mm〜540mm，内径为8.0mm〜10.0mm，灯管电流为220mA以下。因此，自镇流荧光灯可以是紧凑的，从而可以提高照明灯具的使用比例。此外，自镇流荧光灯的寿命长达6000小时，灯效率高达66lm，并且能够降低功耗。

9. 发明授权

US4843075A Benzothiopyrano[4,3-c]pyridazine compounds, methods for preparing said compounds and uses of said compounds 失效
标题翻译：苯并噻喃并[4,3-c]哒嗪化合物，所述化合物的制备方法和所述化合物的用途
公开(公告)号：US4843075A
公开(公告)日：1989-06-27
申请号：US87569
申请日：1987-07-17
申请人： Toru Nakao , Minoru Kawakami , Yasuto Morimoto , Shuzo Takehara , Tetsuya Tahara
发明人： Toru Nakao , Minoru Kawakami , Yasuto Morimoto , Shuzo Takehara , Tetsuya Tahara
IPC分类号： A61K31/495 , A61P7/02 , A61P25/20 , C07D495/04
CPC分类号： C07D495/04
摘要： A benzothiopyrano[4,3-c]pyridazine compound of the formula: ##STR1## wherein R.sup.1 and R.sup.2 are the same or different and each is hydrogen, halogen, trifluoromethyl, hydroxy, amino, nitro, cyano, C.sub.1-4 alkyl, C.sub.1-4 alkoxy or C.sub.2-5 alkanoylamido, R.sup.3 is hydrogen, C.sub.1-8 alkyl, hydroxy-C.sub.1-4 alkyl, C.sub.2-5 alkanoyloxy-C.sub.1-4 alkyl, pyridyl, aryl, aryl-C.sub.1-4 alkyl, or aryl or aryl-C.sub.1-4 alkyl substituted by at least one substituent selected from the group consisting of halogen, trifluoromethyl, hydroxy, hydroxy, amino, nitro, cyano, C.sub.1-4 alkyl, C.sub.1-4 alkoxy and C.sub.2-5 alkanoylamido on the aromatic ring, n is 0, 1 or 2, and the bond between the 4-position and the 4a-position is a single bond or double bond, a method for production thereof and a use thereof.The compounds possess anti-anxietic activity and are useful as drugs.

10. 发明授权

US4598093A 4-amino-tetrahydro-2-naphthoic acid derivatives 失效
标题翻译： 4-氨基 - 四氢-2-萘甲酸衍生物
公开(公告)号：US4598093A
公开(公告)日：1986-07-01
申请号：US609083
申请日：1984-05-07
申请人： Tetsuya Tahara , Masafumi Arita , Tsuyoshi Kuroda
发明人： Tetsuya Tahara , Masafumi Arita , Tsuyoshi Kuroda
IPC分类号： C07D209/80 , A61K31/215 , A61K31/165 , A61K31/195 , C07C103/22
CPC分类号： C07D209/80
摘要： 4-Amino-1,2,3,4-tetrahydro-2-naphthoic acid derivative of the formula: ##STR1## wherein X is halogen atom, n is 1 or 2, R.sup.1 is hydroxy group, lower alkoxy group or amino group, and R.sup.2 is hydrogen atom, lower alkanoyl group or carbamoyl group, or their salts, which are useful as hypotensive diuretic.

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