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    • 3. 发明申请
    • METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
    • 制造半导体器件的方法
    • US20100120231A1
    • 2010-05-13
    • US12529073
    • 2009-02-12
    • Hiroyuki KitabayashiKoji KatayamaSatoshi Arakawa
    • Hiroyuki KitabayashiKoji KatayamaSatoshi Arakawa
    • H01L21/20H01L21/28
    • H01L21/3081H01S5/0425H01S5/2086
    • A method for manufacturing a semiconductor device according to the present invention includes the following step: a step (S10) of forming a GaN-based semiconductor layer, a step (S20) of forming an Al film on the GaN-based semiconductor layer, a step (S30, S40) of forming a mask layer composed of a material having a lower etching rate than that of the material constituting the Al film, a step (S50) of partially removing the Al film and the GaN-based semiconductor layer using the mask layer as a mask to form a ridge portion, a step (S60) of retracting the positions of the side walls at the ends of the Al film from the positions of the side walls of the mask layer, a step (S70) of forming a protection film composed of a material having a lower etching rate than that of the material constituting the Al film on the side surfaces of the ridge portion and on the upper surface of the mask layer, and a step (S80) of removing the Al film to remove the mask layer and the protection film formed on the upper surface of the mask layer.
    • 根据本发明的制造半导体器件的方法包括以下步骤:形成GaN基半导体层的步骤(S10),在GaN基半导体层上形成Al膜的步骤(S20), 形成由具有比构成Al膜的材料的蚀刻速率低的材料构成的掩模层的步骤(S30,S40);使用该步骤(S50)部分地除去Al膜和GaN基半导体层 掩模层作为掩模以形成脊部;步骤(S60),从掩模层的侧壁的位置缩回Al膜的端部处的侧壁的位置,形成步骤(S70) 由掩模层的侧表面和掩模层的上表面上的蚀刻速率低于构成Al膜的材料的蚀刻速率低的材料形成的保护膜,以及除去Al膜的步骤(S80) 以去除掩模层和形成的保护膜 n掩模层的上表面。
    • 7. 发明申请
    • RADIOLOGICAL IMAGING APPARATUS, RADIOLOGICAL IMAGING METHOD, AND PROGRAM
    • 放射成像装置,放射成像方法和程序
    • US20080232553A1
    • 2008-09-25
    • US12045383
    • 2008-03-10
    • Toshitaka AganoSatoshi ArakawaAtsushi Fukuda
    • Toshitaka AganoSatoshi ArakawaAtsushi Fukuda
    • H05G1/02
    • A61B6/587A61B6/4429A61B6/547
    • A radiological imaging apparatus is provided that includes a radiation source, a radiation detection section that detects radiation that passes through a subject, a signal detection section that detects signals from a plurality of signal generating sections disposed on the radiation detection section in a manner such that each signal generating section is in a different location, a signal comparison section that compares the signals detected by the signal detection section, a positional relationship judgment section that makes a judgment as to whether a positional relationship between the radiation detection section and the radiation source is a predetermined positional relationship based on a comparison result, a position control section that controls a position of at least one of the radiation source and the radiation detection section to maintain the positional relationship as the predetermined positional relationship based on a judgment result, a position control holding section that holds the radiation source and the radiation detection section in the position set by the position control section after the positional relationship is set to the prescribed positional relationship, and a notification section that provides notification in a case where the positional relationship judgment section makes a judgment that the positional relationship is not the prescribed positional relationship during holding.
    • 提供了一种放射线成像装置,其包括:辐射源,检测通过对象的辐射的放射线检测部;信号检测部,其以设置在所述放射线检测部上的多个信号生成部检测信号, 每个信号产生部分在不同的位置,信号比较部分,其对由信号检测部分检测的信号进行比较;位置关系判断部分,判断辐射检测部分和辐射源之间的位置关系是否为 基于比较结果的预定位置关系;位置控制部分,其基于判断结果控制所述辐射源和所述辐射检测部分中的至少一个的位置,以将所述位置关系保持为所述预定位置关系;位置控制部 持有部分 在将所述位置关系设定为所述规定的位置关系之后,将所述位置控制部所设定的位置处的所述辐射源和所述放射线检测部保持在所述位置关系判断部进行判断的情况下提供通知的通知部 位置关系在保持期间不是规定的位置关系。
    • 9. 发明申请
    • Radiation image signal acquiring method
    • 辐射图像信号采集方法
    • US20060151728A1
    • 2006-07-13
    • US11324296
    • 2006-01-04
    • Satoshi Arakawa
    • Satoshi Arakawa
    • G03B42/08
    • G03B42/08
    • A stimulable phosphor sheet, on which a radiation image of an object has been stored, is scanned with stimulating rays, which cause the stimulable phosphor sheet to emit light in proportion to the amount of energy stored on the stimulable phosphor sheet during exposure of the stimulable phosphor sheet to radiation. The light, which is emitted by the stimulable phosphor sheet when the stimulable phosphor sheet is scanned with the stimulating rays, is detected, and an image signal representing the radiation image of the object is acquired. The scanning of the stimulable phosphor sheet with the stimulating rays is performed from an object image-carrying edge area, in which a radiation image pattern representing the object has been stored, the object image-carrying edge area being one of edge areas of the stimulable phosphor sheet.
    • 用刺激光线扫描其上已经存储有物体的放射线图像的可刺激的荧光粉片,其使得可刺激的荧光体片材在暴露于可刺激的荧光体片材期间与存储在可刺激的磷光体片材上的能量的量成比例地发光 荧光片照射。 检测可刺激的荧光体片用刺激光线扫描时由可刺激的荧光体片发射的光,并且获取表示物体的辐射图像的图像信号。 通过刺激光线对可刺激的荧光体片材的扫描是从存储有表示物体的放射线图像图案的物体图像携带边缘区域进行的,物体图像载体边缘区域是可刺激的边缘区域之一 荧光粉片。
    • 10. 发明申请
    • Method, apparatus and program for image data correction
    • 用于图像数据校正的方法,装置和程序
    • US20050274918A1
    • 2005-12-15
    • US11149218
    • 2005-06-10
    • Satoshi Arakawa
    • Satoshi Arakawa
    • G21K4/00G03B42/02G06T1/00H04N1/401
    • G03B42/02
    • Quality degradation of a radiograph obtained from a stimulable phosphor sheet used repeatedly for radiography can be suppressed by an image data correction apparatus. Light emission characteristic storage means stores light emission change characteristic data and section storage means stores a position and a range of each of areas in the sheet obtained by dividing the sheet. Cumulative radiation dose acquisition means obtains an accumulated radiation dose for each of the areas, and light emission change rate acquisition means finds a light emission change rate representing a change in an amount of emitted light in accordance with the accumulated radiation dose for each of the areas, by using the light emission change characteristic data. Correction means corrects a value of image data obtained by reading each of the areas, for the change in the amount of the light with reference to the light emission change rate.
    • 可以通过图像数据校正装置来抑制从用于放射线照相重复使用的可刺激的磷光体片获得的射线照片的质量劣化。 光发射特性存储装置存储光发射改变特性数据,并且部分存储装置将通过划分片材获得的片材中的每个区域的位置和范围存储。 累积辐射剂量获取装置获得每个区域的累积辐射剂量,并且发光变化率获取装置根据每个区域的累积辐射剂量求出表示发射光量变化的发光变化率 ,通过使用发光变化特性数据。 校正装置参照光发射变化率校正通过读取每个区域获得的图像数据的值,以改变光量的变化。