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1. 发明授权

US08766185B2 Charged particle beam device 有权
标题翻译：带电粒子束装置
公开(公告)号：US08766185B2
公开(公告)日：2014-07-01
申请号：US12688095
申请日：2010-01-15
申请人： Tomokazu Shimakura , Masaki Hasegawa
发明人： Tomokazu Shimakura , Masaki Hasegawa
IPC分类号： G01N23/225 , H01J37/02 , H01J37/20 , H01J37/28
CPC分类号： H01J37/026 , H01J37/04 , H01J37/20 , H01J37/28 , H01J2237/0455 , H01J2237/153 , H01J2237/1536 , H01J2237/2008
摘要： The charged particle beam device has an unlimitedly rotatable sample stage and an electric field control electrode for correcting electric field distortion at a sample peripheral part. A voltage is applied to a sample on the unlimitedly rotatable sample stage through a retarding electrode that is in contact with a holder receiver at a rotation center of a rotary stage. An equipotential plane on the electric field control electrode is varied by applying a voltage to the electric field control electrode, and following this the equipotential plane at a sample edge is corrected, which enables the sample to be observed as far as its edge.
摘要翻译：带电粒子束装置具有无限旋转的样品台和用于校正样品周边部分的电场失真的电场控制电极。通过在旋转台的旋转中心处与保持器接收器接触的延迟电极将电压施加到无限可旋转的样品台上的样品。通过向电场控制电极施加电压来改变电场控制电极上的等电位面，并且在此之后校正样品边缘处的等电位面，使得可以将样品观察到其边缘。

2. 发明授权

US08410438B2 Charged particle beam device 有权
标题翻译：带电粒子束装置
公开(公告)号：US08410438B2
公开(公告)日：2013-04-02
申请号：US13099438
申请日：2011-05-03
申请人： Tomokazu Shimakura , Masaki Hasegawa
发明人： Tomokazu Shimakura , Masaki Hasegawa
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： H01J37/29 , H01J37/265 , H01J2237/2482 , H01J2237/2811
摘要： A charged particle beam device has a tilt detection unit that detects a tilt of a sample surface and an E×B deflector in which an electric field and a magnetic field are overlapped with each other and which causes, according to the detected tilt of the sample surface, the sample surface to be perpendicularly irradiated with an irradiation charged particle beam while, at the same time, aligning the trajectory of the charged particle beam with the optical axis centers of an irradiation optical system and an imaging optical system; thereby, the charged particle beam device can prevent problems possibly occurring in cases where a sample stage is tilted or a sample surface is undulating and can enable an accurate image to be acquired.
摘要翻译：带电粒子束装置具有检测样品表面的倾斜的倾斜检测单元和其中电场和磁场彼此重叠的E×B偏转器，并且根据检测到的样品的倾斜表面，待照射带电粒子束垂直照射的样品表面，同时使带电粒子束的轨迹与照射光学系统和成像光学系统的光轴中心对准; 因此，带电粒子束装置可以防止在样品台倾斜或样品表面波动的情况下可能发生的问题，并且可以获得准确的图像。

3. 发明申请

US20070194230A1 INSPECTION INSTRUMENT OF A MAGNETIC SPECIMEN 审中-公开
标题翻译：磁性样本检验仪器
公开(公告)号：US20070194230A1
公开(公告)日：2007-08-23
申请号：US11672617
申请日：2007-02-08
申请人： Teruo KOHASHI , Tomokazu Shimakura
发明人： Teruo KOHASHI , Tomokazu Shimakura
IPC分类号： G21K7/00
CPC分类号： H01J37/29 , H01J2237/2067 , H01J2237/24557 , H01J2237/24564 , H01J2237/2538
摘要： An inspection technique capable of observing a magnetic domain configuration which is formed on a magnetic specimen surface with a higher resolution and at a higher speed as never before. The inspection technique includes an SPLEEM observation unit including a spin polarized electron source, an irradiation optics that projects a spin polarized electron beam that is emitted from the spin polarized electron source to a magnetic specimen having a magnetic domain structure, a stage on which the magnetic specimen is mounted, an imaging optics that focuses and detects the electron beam that is reflected from the magnetic specimen; and cleaning means for cleaning the surface of the magnetic specimen to transfer the magnetic specimen to the SPLEEM observation unit, wherein the magnetic domain structure of the magnetic specimen surface is inspected on the basis of the reflected electron beam.
摘要翻译：一种能够以前所未有地观察以高分辨率和高速度形成在磁性试样表面上的磁畴结构的检查技术。检查技术包括：包括自旋极化电子源的SPLEEM观察单元，将从自旋极化电子源发射的自旋极化电子束投射到具有磁畴结构的磁性试样的照射光学系统，安装了样本，成像光学元件，聚焦并检测从磁性样本反射的电子束; 以及用于清洁磁性试样的表面以将磁性样本转移到SPLEEM观察单元的清洁装置，其中基于反射的电子束检查磁性试样表面的磁畴结构。

4. 发明申请

US20070057666A1 Defect inspection system and method for recording media 审中-公开
标题翻译：缺陷检查系统和记录介质的方法
公开(公告)号：US20070057666A1
公开(公告)日：2007-03-15
申请号：US11492964
申请日：2006-07-26
申请人： Tomokazu Shimakura , Teruo Kohashi , Yoshio Takahashi
发明人： Tomokazu Shimakura , Teruo Kohashi , Yoshio Takahashi
IPC分类号： G01R33/12
CPC分类号： G01R33/1207 , G01B15/08 , G11B5/00 , G11B5/012 , G11B5/74 , G11B5/82 , G11B7/00375 , G11B11/10582 , G11B2005/001
摘要： This invention provides a recording media defect inspection technique that makes possible high-speed and high-resolution defect inspection using an electron beam. A spindle motor rotates a recording media while an electron beam is being irradiated on a surface of a recording media, and detectors detect secondary electrons produced from the recording media, whereby unevenness information of the recording media surface is obtained. The obtained unevenness information on the recording media surface is Fourier transformed and a defect is detected. Further, by introducing deposition gas onto the recording media surface by gas introduction means while irradiating the electron beam on the recording media, a component of the deposition gas is deposited in a detected defect position on the recording media surface to form a mark.
摘要翻译：本发明提供一种记录介质缺陷检查技术，其使得能够使用电子束进行高速和高分辨率的缺陷检查。当电子束被照射在记录介质的表面上时，主轴电动机旋转记录介质，并且检测器检测从记录介质产生的二次电子，从而获得记录介质表面的不均匀性信息。在记录介质表面上获得的不均匀性信息被傅里叶变换并且检测到缺陷。此外，通过在将记录介质上的电子束照射的同时通过气体引入装置将沉积气体引入到记录介质表面上，沉积气体的一部分沉积在记录介质表面上的检测到的缺陷位置以形成标记。

5. 发明授权

US06744249B2 Method and instrument for measuring a magnetic field, a method for measuring a current waveform, and method for measuring an electric field 有权
标题翻译：用于测量磁场的方法和仪器，测量电流波形的方法以及测量电场的方法
公开(公告)号：US06744249B2
公开(公告)日：2004-06-01
申请号：US10143895
申请日：2002-05-14
申请人： Hiroshi Suzuki , Tomokazu Shimakura , Kimio Nakamura
发明人： Hiroshi Suzuki , Tomokazu Shimakura , Kimio Nakamura
IPC分类号： G01R3302
CPC分类号： G01R33/0213 , G11B5/455
摘要： A method and instrument for measuring, with a high spatial resolution, a magnetic or electric field that varies repeatedly at high speed. An electron beam is deflected by passage through a magnetic or electric field to be measured and is allowed to pass through a deflection electrode to thereby be deflected in a direction perpendicular to the magnetic or electric field to be measured. A track of the deflected electron beam is detected by a two-dimensional sensor, and a waveform or pattern is displayed wherein a time base and an axis of the magnetic field to be measured are orthogonal to each other.
摘要翻译：用于以高空间分辨率测量高速重复变化的磁场或电场的方法和仪器。电子束通过通过要测量的磁场或电场而偏转，并允许其通过偏转电极，从而在垂直于待测量的磁场或电场的方向上偏转。通过二维传感器检测偏转的电子束的轨道，并且显示其中时间基准和待测量的磁场的轴线彼此正交的波形或图案。

6. 发明授权

US06879152B2 Evaluation system and method of measuring a quantitative magnetic field of a magnetic material 失效
标题翻译：测量磁性材料定量磁场的评估系统和方法
公开(公告)号：US06879152B2
公开(公告)日：2005-04-12
申请号：US10231253
申请日：2002-08-30
申请人： Tomokazu Shimakura , Hiroshi Suzuki
发明人： Tomokazu Shimakura , Hiroshi Suzuki
IPC分类号： G01R33/10 , G01N27/72 , G01Q30/06 , G01Q60/00 , G01Q60/50 , G01R33/038 , G11B5/00 , G11B5/455 , G01R33/12
CPC分类号： G01Q60/50 , G01R33/0385
摘要： The magnetic field intensity distribution of a magnetic material sample, such as a magnetoresistive device, is measured with a probe having a tip portion of a magnetic material to which current is made to flow from a power source to the magnetic material. The probe is scanned relative to the surface of the magnetic material sample in two modes. In a first mode, the probe is scanned by being oscillated in a vertical direction to tap a surface of the sample to be tested. In a second mode, the probe is scanned while being held in contact with the measured surface. Corresponding first and second output signals from the two modes of scanning are processed to calculate the magnetic field intensity distribution of the sample magnetic material.
摘要翻译：磁性材料样品（例如磁阻器件）的磁场强度分布用具有磁性材料的尖端部分的探针测量，电流从电源流向磁性材料。以两种模式相对于磁性材料样品的表面扫描探针。在第一模式中，通过在垂直方向上振荡来扫描探针以敲击要测试的样品的表面。在第二模式中，探头被扫描同时与被测表面保持接触。对来自两种扫描模式的相应的第一和第二输出信号进行处理以计算样品磁性材料的磁场强度分布。

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