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    • 6. 发明申请
    • Fluorescent X-ray analyzer, fluorescent X-ray analysis method, and fluorescent X-ray analysis program
    • 荧光X射线分析仪,荧光X射线分析法和荧光X射线分析程序
    • US20060215810A1
    • 2006-09-28
    • US11192140
    • 2005-07-29
    • Yasuhiro Usui
    • Yasuhiro Usui
    • G01N23/223G01T1/36
    • G01N23/223G01N2223/076
    • The present invention has been made to obtain a fluorescent X-ray analyzer and the like capable of easily performing analysis of a sample including materials in the form of a multiple layer in the depth direction of the sample at low cost without a need of a skilled technique and time. A fluorescent X-ray analysis method according to the present invention that performs analysis of materials in a sample including different materials in the form of a multiple layer analyzes the materials by irradiating the sample with an X-ray to detect an fluorescent X-ray; estimates a processing amount for the sample based on a result of the analysis; and applies processing to the sample based on the processing amount estimated in the processing amount estimation step.
    • 本发明是为了获得荧光X射线分析仪等,能够容易地以低成本在样品深度方向上进行包含多层形式的材料的样品的分析,而不需要熟练的 技术和时间。 根据本发明的荧光X射线分析方法,其进行包含多层形式的不同材料的样品中的材料的分析,通过用X射线照射样品来检测材料,以检测荧光X射线; 基于分析结果估计样品的处理量; 并且基于在处理量估计步骤中估计的处理量对样本进行处理。