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    • 10. 发明申请
    • PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ACTUATOR, LIQUID EJECTING HEAD, AND LIQUID EJECTING APPARATUS
    • 压电元件,压电致动器,液体喷射头和液体喷射装置
    • US20110063377A1
    • 2011-03-17
    • US12880295
    • 2010-09-13
    • Koichi MOROZUMIToshiki HARAJiro KATOSatoshi DENDA
    • Koichi MOROZUMIToshiki HARAJiro KATOSatoshi DENDA
    • B41J2/045H01L41/18
    • B41J2/14233H01L41/1876
    • A piezoelectric element includes a first conductive layer, a second conductive layer facing the first conductive layer, and a piezoelectric layer between the first and second conductive layers, composed of a compound oxide containing at least lead, zirconium, titanium, and oxygen. The piezoelectric layer includes a first crystal layer on the first conductive layer side of the piezoelectric layer and a second crystal layer continued from the first crystal layer, nearer to the second conductive layer side than the first crystal layer. In the piezoelectric layer, the lead concentration in the first conductive layer side of the first crystal layer is lower than that in the second conductive layer side of the second crystal layer. In the piezoelectric layer, the oxygen concentration in the first conductive layer side of the first crystal layer is higher than that in the second conductive layer side of the second crystal layer.
    • 压电元件包括​​第一导电层,与第一导电层相对的第二导电层,以及由至少含有铅,锆,钛和氧的复合氧化物构成的第一和第二导电层之间的压电层。 压电层包括在压电层的第一导电层侧上的第一晶体层和从第一晶体层延续的第二晶体层,比第一晶体层更靠近第二导电层侧。 在压电层中,第一晶体层的第一导电层侧的引线浓度低于第二晶体层的第二导电层侧的引线浓度。 在压电层中,第一结晶层的第一导电层侧的氧浓度高于第二结晶层的第二导电层侧的氧浓度。