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1. 发明申请

US20120115317A1 PLASMA DOPING METHOD AND APPARATUS THEREOF 有权
标题翻译：等离子喷涂方法及其设备
公开(公告)号：US20120115317A1
公开(公告)日：2012-05-10
申请号：US13291186
申请日：2011-11-08
申请人： Tomohiro OKUMURA , Mitsuo Saitoh , Ichiro Nakayama , Taro Kitaoka
发明人： Tomohiro OKUMURA , Mitsuo Saitoh , Ichiro Nakayama , Taro Kitaoka
IPC分类号： H01L21/223 , C23C16/455 , C23C16/458 , C23C16/50
CPC分类号： H01J37/32412 , H01L21/2236 , H01L31/18
摘要： In a plasma torch unit, a conductor rod having a spiral shape is disposed inside a quartz pipe having a surface coated with boron glass, and a brass block is disposed on the periphery thereof. While a gas is being supplied into a cylindrical chamber, a high-frequency power is supplied to the conductor rod and a plasma is generated in the cylindrical chamber, so that a base material is irradiated with the plasma.
摘要翻译：在等离子体焰炬单元中，具有螺旋形状的导体棒设置在具有硼玻璃的表面的石英管的内部，并且在其周边设置有黄铜块。当气体被供应到圆柱形腔室中时，向导体杆供应高频电力，并且在圆柱形腔室中产生等离子体，使得等离子体照射基材。

2. 发明申请

US20120285818A1 PLASMA DOPING METHOD WITH GATE SHUTTER 失效
标题翻译：等离子切割方法与门开关
公开(公告)号：US20120285818A1
公开(公告)日：2012-11-15
申请号：US13560648
申请日：2012-07-27
申请人： Tomohiro OKUMURA , Yuichiro Sasaki , Katsumi Okashita , Bunji Mizuno , Hiroyuki Ito , Ichiro Nakayama , Cheng-Guo Jin
发明人： Tomohiro OKUMURA , Yuichiro Sasaki , Katsumi Okashita , Bunji Mizuno , Hiroyuki Ito , Ichiro Nakayama , Cheng-Guo Jin
IPC分类号： C23C14/34
CPC分类号： H01L21/2236 , H01J37/321 , H01J37/32412 , H01J37/32458 , H01J37/32623 , H01J37/32633
摘要： In a plasma doping device according to the invention, a vacuum chamber is evacuated with a turbo-molecular pump as an exhaust device via a exhaust port while a predetermined gas is being introduced from a gas supply device in order to maintain the inside of the vacuum chamber to a predetermined pressure with a pressure regulating valve. A high-frequency power of 13.56 MHz is supplied by a high-frequency power source to a coil provided in the vicinity of a dielectric window opposed to a sample electrode to generate inductive-coupling plasma in the vacuum chamber. A high-frequency power source for supplying a high-frequency power to the sample electrode is provided. Uniformity of processing is enhanced by driving a gate shutter and covering a through gate.
摘要翻译：在根据本发明的等离子体掺杂装置中，在从气体供给装置引入预定气体的同时，通过排气口将涡轮分子泵作为排气装置抽真空室，以保持真空内部通过压力调节阀到达预定压力。 13.56MHz的高频功率由高频电源提供给设置在与样品电极相对的电介质窗口附近的线圈，以在真空室中产生电感耦合等离子体。提供了用于向样品电极提供高频电力的高频电源。通过驱动闸门并覆盖通过门来增强处理的均匀性。

3. 发明申请

US20110081787A1 PLASMA PROCESSING METHOD AND APPARATUS 失效
标题翻译：等离子体处理方法和装置
公开(公告)号：US20110081787A1
公开(公告)日：2011-04-07
申请号：US12950048
申请日：2010-11-19
申请人： Tomohiro OKUMURA , Ichiro Nakayama , Satoshi Maeshima , Bunji Mizuno , Yuichiro Sasaki
发明人： Tomohiro OKUMURA , Ichiro Nakayama , Satoshi Maeshima , Bunji Mizuno , Yuichiro Sasaki
IPC分类号： H01L21/223
CPC分类号： H01J37/3244 , H01J37/32412 , H01L21/2236
摘要： With evacuation of interior of a vacuum chamber halted and with gas supply into the vacuum chamber halted, in a state that a mixed gas of helium gas and diborane gas is sealed in the vacuum chamber, a plasma is generated in a vacuum vessel and simultaneously a high-frequency power is supplied to a sample electrode. By the high-frequency power supplied to the sample electrode, boron is introduced to a proximity to the substrate surface.
摘要翻译：在真空室的内部抽真空，并且在真空室中供气进入中止状态下，在真空室内密封氦气和乙硼烷气体的混合气体的状态下，在真空容器中产生等离子体，同时向样品电极提供高频电力。通过提供给样品电极的高频功率，将硼引入到衬底表面附近。

4. 发明申请

US20130022759A1 PLASMA PROCESSING METHOD AND APPARATUS 失效
标题翻译：等离子体处理方法和装置
公开(公告)号：US20130022759A1
公开(公告)日：2013-01-24
申请号：US13611939
申请日：2012-09-12
申请人： Tomohiro OKUMURA , Yuichiro SASAKI , Satoshi MAESHIMA , Ichiro NAKAYAMA , Bunji MIZUNO
发明人： Tomohiro OKUMURA , Yuichiro SASAKI , Satoshi MAESHIMA , Ichiro NAKAYAMA , Bunji MIZUNO
IPC分类号： C23C16/50
CPC分类号： H01J37/3244 , H01J37/32412 , H01L21/2236
摘要： With the evacuation of an interior of a vacuum chamber halted and with gas supply into the vacuum chamber halted, in a state that a mixed gas of helium gas and diborane gas is sealed in the vacuum chamber, a plasma is generated in a vacuum vessel and simultaneously a high-frequency power is supplied to a sample electrode. By the high-frequency power supplied to the sample electrode, boron is introduced to a proximity to a substrate surface.
摘要翻译：随着真空室内部的抽真空，并且气体供应到真空室中停止，在氦气和乙硼烷气体的混合气体被密封在真空室中的状态下，在真空容器中产生等离子体，同时向样品电极提供高频电力。通过提供给样品电极的高频电力，将硼引入到衬底表面附近。

5. 发明申请

US20120058649A1 PLASMA PROCESSING APPARATUS AND METHOD THEREOF 失效
标题翻译：等离子体处理装置及其方法
公开(公告)号：US20120058649A1
公开(公告)日：2012-03-08
申请号：US13215276
申请日：2011-08-23
申请人： Tomohiro OKUMURA , Ichiro NAKAYAMA , Hiroshi KAWAURA , Tetsuya YUKIMOTO
发明人： Tomohiro OKUMURA , Ichiro NAKAYAMA , Hiroshi KAWAURA , Tetsuya YUKIMOTO
IPC分类号： H01L21/268 , C23C16/50
CPC分类号： H01L21/02667 , H05H1/28 , H05H1/34 , H05H1/3405
摘要： In a plasma torch unit, copper rods forming a coil as a whole are disposed inside copper rod inserting holes formed in a quartz block so that the quartz block is cooled by water flowing inside the copper rod inserting holes and cooling water pipes. A plasma ejection port is formed on the lowermost portion of the torch unit. While a gas is being supplied into a space inside an elongated chamber, high-frequency power is supplied to the copper rods to generate plasma in the space inside the elongated chamber so that the plasma is applied to a substrate.
摘要翻译：在等离子体焰炬单元中，形成线圈的铜棒整体设置在形成于石英块中的铜棒插入孔的内部，使得石英块由在铜杆插入孔和冷却水管内流动的水冷却。等离子体喷射口形成在割炬单元的最下部。当气体被供应到细长室内的空间中时，向铜棒供应高频功率以在细长室内的空间中产生等离子体，使得将等离子体施加到基底。

6. 发明申请

US20100098837A1 PLASMA DOPING METHOD AND APPARATUS 失效
标题翻译：等离子喷涂方法和装置
公开(公告)号：US20100098837A1
公开(公告)日：2010-04-22
申请号：US12648142
申请日：2009-12-28
申请人： Tomohiro OKUMURA , Yuichiro Sasaki , Katsumi Okashita , Hiroyuki Ito , Bunji Mizuno , Cheng-Guo Jin , Ichiro Nakayama
发明人： Tomohiro OKUMURA , Yuichiro Sasaki , Katsumi Okashita , Hiroyuki Ito , Bunji Mizuno , Cheng-Guo Jin , Ichiro Nakayama
IPC分类号： C23C16/52 , H05H1/24 , C23C16/448
CPC分类号： H01L21/2236 , H01J37/321 , H01J37/32412 , H01J2237/2001
摘要： It is intended to provide a plasma doping method and apparatus which are superior in the controllability of the concentration of an impurity that is introduced into a surface layer of a sample.A prescribed gas is introduced into a vacuum container 1 from a gas supply apparatus 2 while being exhausted by a turbomolecular pump 3 as an exhaust apparatus. The pressure in the vacuum container 1 is kept at a prescribed value by a pressure regulating valve 4. High-frequency electric power of 13.56 MHz is supplied from a high-frequency power source 5 to a coil 8 disposed close to a dielectric window 7 which is opposed to a sample electrode 6, whereby induction-coupled plasma is generated in the vacuum container 1. A high-frequency power source 10 for supplying high-frequency electric power to the sample electrode 6 is provided. Every time a prescribed number of samples have been processed, a dummy sample is subjected to plasma doping and then to heating. The conditions for processing of a sample are controlled so that the measurement value of the surface sheet resistance becomes equal to a prescribed value, whereby the controllability of the impurity concentration can be increased.
摘要翻译：旨在提供一种等离子体掺杂方法和装置，该等离子体掺杂方法和装置在引入样品的表面层中的杂质的浓度的可控性方面是优异的。将规定的气体从作为排气装置的涡轮分子泵3排出而从气体供给装置2引入真空容器1。真空容器1中的压力通过压力调节阀4保持在规定值。13.56MHz的高频电力从高频电源5供给到靠近电介质窗7设置的线圈8，与样品电极6相对，从而在真空容器1中产生感应耦合等离子体。提供了用于向样品电极6提供高频电力的高频电源10。每当处理规定数量的样品时，将虚拟样品进行等离子体掺杂，然后进行加热。控制处理样品的条件使得表面薄层电阻的测量值等于规定值，从而可以提高杂质浓度的可控性。

7. 发明申请

US20090102787A1 DISPLAY DEVICE 有权
标题翻译：显示设备
公开(公告)号：US20090102787A1
公开(公告)日：2009-04-23
申请号：US12254306
申请日：2008-10-20
申请人： Tomohiro OKUMURA , Ryoichi Nishikawa , Takaaki Muramatsu , Shinji Suganuma
发明人： Tomohiro OKUMURA , Ryoichi Nishikawa , Takaaki Muramatsu , Shinji Suganuma
IPC分类号： G09G5/08
CPC分类号： B60K35/00 , B60K37/02 , B60K2350/1072 , B60K2350/203
摘要： A display device includes a display panel and a control unit. The control unit is configured to control a display condition of the display panel by successively switching a plurality of frames, thereby to display a pointer image indicating a pointer and a path image indicating a path of motion of the pointer image. The path image of a first frame, which is any one of the plurality of frames, is provided continuously from a second location where the pointer image of a second frame, which is another one of the multiple frames and immediately before the first frame, is displayed to a first location where the pointer image of the first frame is displayed.
摘要翻译：显示装置包括显示面板和控制单元。控制单元被配置为通过连续切换多个帧来控制显示面板的显示状态，从而显示指示指针的指针图像和指示指针图像的运动路径的路径图像。作为多个帧中的任何一个的第一帧的路径图像从第二位置连续地提供，其中第二帧的指针图像是第二帧的指针图像，其是多个帧中的另一个并且紧接在第一帧之前的指针图像是显示到显示第一帧的指针图像的第一位置。

8. 发明申请

US20070292634A1 PLASMA DISPLAY PANEL AND METHOD OF MANUFACTURING THE SAME 失效
标题翻译：等离子显示面板及其制造方法
公开(公告)号：US20070292634A1
公开(公告)日：2007-12-20
申请号：US11762879
申请日：2007-06-14
申请人： Takayuki ABE , Yoshiyasu HONMA , Tomohiro OKUMURA , Keisuke OKADA , Kazuto FUKUDA
发明人： Takayuki ABE , Yoshiyasu HONMA , Tomohiro OKUMURA , Keisuke OKADA , Kazuto FUKUDA
IPC分类号： C09K19/00
CPC分类号： H01J11/12 , H01J9/242 , H01J11/36 , H01J2211/361 , Y10T428/1059
摘要： A plasma display panel (PDP) and a method of manufacturing the same suppresses variation in the height of the intersecting barrier walls with a simple method and that prevents cross talk from occurring between the discharge cells. A concave part is formed at a position contacting an intersecting part of a first barrier wall before baking and a second barrier wall before baking orthogonal to the first barrier wall before baking. When such concave part is formed, the values of the surface area per volume of the intersecting part and the surface area per volume of the first barrier wall before baking and the second barrier wall before baking between the intersecting part and the intersecting part adjacent to the intersecting part become substantially equal. As a result, the height of the intersecting part does not become high after baking, a barrier wall of aligned height is obtained, and cross talk does not occur between the discharge cells.
摘要翻译：等离子体显示面板（PDP）及其制造方法以简单的方法抑制交叉阻挡壁的高度变化，并且防止在放电单元之间发生串扰。在烘烤之前，在与第一阻挡壁正交的烘烤前的第一阻挡壁的交叉部与第二阻挡壁接触的位置形成凹部，当形成这样的凹部时，交叉部分的每个体积的表面积和烘烤前的第一阻挡壁的体积的表面积和烘烤前的交叉部分和邻近的交叉部分的交叉部分之间的值相交部分变得基本相等。结果，烘烤后交叉部分的高度不变高，获得排列高度的阻挡壁，并且在放电单元之间不发生串扰。

9. 发明申请

US20110048631A1 METHOD FOR PRODUCING PLASMA DISPLAY PANEL 失效
标题翻译：生产等离子显示面板的方法
公开(公告)号：US20110048631A1
公开(公告)日：2011-03-03
申请号：US12868786
申请日：2010-08-26
申请人： Tomohiro OKUMURA
发明人： Tomohiro OKUMURA
IPC分类号： B32B37/06 , B32B37/04
CPC分类号： H01J9/02 , H01J11/12 , H01J11/40
摘要： A method for producing a plasma display panel, the method comprising: (i) preparing a front panel and a rear panel, the front panel being a panel wherein an electrode A, a dielectric layer A and a protective layer are formed on a substrate A, and the rear panel being a panel wherein an electrode B, a dielectric layer B, a partition wall and a phosphor layer are formed on a substrate B; and (ii) opposing the front and rear panels with each other, and sealing them along their peripheries by a sealing material wherein the protective layer is heated to a temperature ranging from 1600° C. to 3600° C. before the sealing of the front and rear panels.
摘要翻译：一种等离子体显示面板的制造方法，该方法包括：（i）制备前面板和后面板，前面板是面板，其中在基板A上形成电极A，电介质层A和保护层并且后面板是在基板B上形成电极B，电介质层B，隔壁和荧光体层的面板; 和（ii）将前面板和后面板彼此相对，并且通过密封材料沿着它们的周边密封它们，其中在密封正面之前将保护层加热到1600℃至3600℃的温度和后面板。

10. 发明申请

US20110279030A1 PLASMA DISPLAY PANEL AND MANUFACTURING METHOD THEREOF 审中-公开
标题翻译：等离子显示面板及其制造方法
公开(公告)号：US20110279030A1
公开(公告)日：2011-11-17
申请号：US13098524
申请日：2011-05-02
申请人： Takayuki ASHIDA , Tomohiro OKUMURA , Shuzo TSUCHIDA , Mamoru WATANABE
发明人： Takayuki ASHIDA , Tomohiro OKUMURA , Shuzo TSUCHIDA , Mamoru WATANABE
IPC分类号： H01J17/49 , B32B17/00
CPC分类号： H01J11/12 , H01J9/385 , H01J9/40 , H01J11/54
摘要： A front plate and a back plate are superposed with each other in parallel, and pressed onto each other. Moreover, the back plate and a gas-blowing jig are brought into close contact with each other. The glass pipe in which a glass fiber filter paper is placed is pressed onto the back plate, with a solid-state glass frit ring interposed therebetween. Thus, by using a glass pipe, a nitrogen, Xe, or Ne gas is supplied into the panel, or the inside of the panel is evacuated.
摘要翻译：前板和后板彼此平行叠置并彼此挤压。此外，背板和气吹夹具彼此紧密接触。将玻璃纤维滤纸放置在其中的玻璃管被压在背板上，其间插入固态玻璃料环。因此，通过使用玻璃管，将氮，Xe或Ne气体供给到面板中，或者将面板的内部抽真空。

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