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    • 3. 发明授权
    • Meso-microelectromechanical system package
    • 中微机电系统封装
    • US06859119B2
    • 2005-02-22
    • US10329907
    • 2002-12-26
    • Manes EliacinTomasz KlosowiakRobert LempkowskiKe Lian
    • Manes EliacinTomasz KlosowiakRobert LempkowskiKe Lian
    • B81B7/00H01P1/10
    • B81C1/00333H01H2001/0073
    • A mesoscale microelectromechanical system (MEMS) package for a micro-machine. The mesoscale micro-machine is formed on a printed circuit board (10) at the same time and of the same materials as the mesoscale micro-machine package. Both the micro-machine and the package have a first metal layer (12, 16), an insulating member (22, 26) formed on the first metal layer, and a second metal layer (32, 36) situated on the insulating layer. The package consists of a perimeter wall surrounding the micro-machine and a low-flow capping adhesive layer (40). The first metal layers of both the micro-machine and the package are formed in the same process sequence, and the insulating layers of both the micro-machine and the package are formed in the same process sequence, and the second metal layers of both the micro-machine and the package are formed in the same process sequence. The low-flow capping adhesive secures an optional cover (46) on the package to provide an environmental seal.
    • 用于微机的中尺度微机电系统(MEMS)封装。 中等尺寸的微型机器同时形成在印刷电路板(10)上并且与中等尺寸的微型机器包装材料相同。 微机和封装均具有第一金属层(12,16),形成在第一金属层上的绝缘构件(22,26)和位于绝缘层上的第二金属层(32,36)。 包装由围绕微机器的周边壁和低流量封盖粘合剂层(40)组成。 微机和封装的第一金属层以相同的工艺顺序形成,微机和封装的绝缘层以相同的工艺顺序形成,并且两者的第二金属层 微机和封装以相同的工艺顺序形成。 低流量封盖粘合剂将可选的盖(46)固定在包装上以提供环境密封。
    • 5. 发明授权
    • Wafer coating and singulation method
    • 晶圆涂层和切片方法
    • US06649445B1
    • 2003-11-18
    • US10241265
    • 2002-09-11
    • Jing QiJanice DanvirTomasz Klosowiak
    • Jing QiJanice DanvirTomasz Klosowiak
    • H01L2144
    • H01L21/561H01L21/304H01L21/3043H01L21/56H01L21/563H01L21/78H01L23/3114H01L24/29H01L24/96H01L24/97H01L2224/16H01L2224/274H01L2224/73104H01L2224/73203H01L2224/83191H01L2224/97H01L2924/01005H01L2924/01006H01L2924/01015H01L2924/01027H01L2924/01033H01L2924/01078H01L2924/10329H01L2924/12041H01L2924/14H01L2924/18161H01L2924/3511H01L2924/00
    • A method for providing an underfill material on an integrated circuit chip at the wafer level. The wafer (10) typically contains one or more integrated circuit chips (12), and each integrated circuit chip typically has a plurality of solder bumps (34) on its active surface. The wafer is first diced (22) on the active surface side to form channels (38) that will ultimately define the edges (39) of each individual integrated circuit chip, the dicing being of such a depth that it only cuts part-way through the wafer. The front side (36) of the wafer is then coated (24) with an underfill material (40). Generally, a portion (45) of each solder bump remains uncoated, but in certain cases the bumps can be completely covered. The back side of the wafer is then lapped, ground, polished or otherwise treated (26) so as to remove material down to the level of the previously diced channels. This reduction in the thickness of the wafer causes the original diced channels to now extend completely from the front side to the back side of the wafer. The wafer is then singulated (28) by cutting the underfill material (92) that was deposited in the channels during the coating step, so that the integrated circuit chip (12) is released from the wafer, and the underfill material that was coated on the active side remains affixed to the active surface of each individual integrated circuit chip.
    • 一种用于在晶片级的集成电路芯片上提供底部填充材料的方法。 晶片(10)通常包含一个或多个集成电路芯片(12),并且每个集成电路芯片在其有源表面上通常具有多个焊料凸块(34)。 晶片首先在有源表面侧切割(22)以形成最终限定每个单独的集成电路芯片的边缘(39)的通道(38),切割具有这样的深度,使得其仅切割 晶圆。 然后用底部填充材料(40)涂覆(24)晶片的前侧(36)。 通常,每个焊料凸块的一部分(45)保持未涂覆,但在某些情况下,凸块可被完全覆盖。 然后将晶片的背面研磨,研磨,抛光或以其他方式处理(26),以便将材料移除到先前切割的通道的水平。 晶片厚度的这种减小使得原来的切割通道现在完全从晶片的正面延伸到背面。 然后通过切割在涂布步骤期间沉积在通道中的底部填充材料(92)将晶片分割(28),使得集成电路芯片(12)从晶片释放,并将涂覆的底部填充材料 有源侧保持固定到每个单独的集成电路芯片的有源表面。
    • 9. 发明申请
    • AC powered self organizing wireless node
    • 交流供电自组织无线节点
    • US20060006817A1
    • 2006-01-12
    • US11126686
    • 2005-05-11
    • Marc ChasonJanice DanvirKatherine DevanieDavid HumeTomasz KlosowiakKevin McDunn
    • Marc ChasonJanice DanvirKatherine DevanieDavid HumeTomasz KlosowiakKevin McDunn
    • G05F1/00H05B37/02
    • H04W52/0296H04W84/18H04W88/02Y02D70/144Y02D70/162
    • An alternating current (AC) powered self organizing wireless node (100, 400, 600) includes a self organizing wireless receiver-transmitter (115), an AC branch connection (105), an AC to direct current (DC) converter (110), a secondary power function (120), and a housing (150). The self organizing wireless receiver-transmitter can communicate information throughout a network of compatible self organizing nodes solely using radio transmission to and reception from nearby self-organizing nodes. The secondary power function can couple power to the AC to DC converter for powering the self organizing wireless receiver-transmitter when AC power is not provided. The AC powered self organizing wireless node is designed and fabricated for agency certification. The AC powered self organizing wireless node may include one or more sensors (125), sensor inputs (135), transducers (130), or control outputs (155).
    • 交流(AC)供电的自组织无线节点(100,400,600)包括自组织无线接收器 - 发射器(115),AC分支连接(105),AC至直流(DC)转换器(110) ,辅助电力功能(120)和壳体(150)。 自组织无线接收机 - 发射机可以通过使用到附近的自组织节点的无线电传输和从其接收的相容自组织节点的网络来传送信息。 辅助电源功能可以连接AC到DC转换器的电源,以便在不提供交流电源时给自组织无线接收器 - 发射器供电。 交流供电的自组织无线节点是为代理认证设计和制造的。 AC供电的自组织无线节点可以包括一个或多个传感器(125),传感器输入(135),换能器(130)或控制输出(155)。