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1. 发明专利

JP2014081646A Resist liquid recovery method 有权
标题翻译：电阻液体回收方法
公开(公告)号：JP2014081646A
公开(公告)日：2014-05-08
申请号：JP2013254214
申请日：2013-12-09
申请人： Tokyo Ohka Kogyo Co Ltd , 東京応化工業株式会社
发明人： TAKETSUTSUMI TOSHINORI , HASEGAWA TORU
IPC分类号： G03F7/26 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To provide a method capable of recovering a resist liquid far more efficiently than in the prior art, of reducing the recovery cost, and of enhancing the recycling rate of the resist liquid.SOLUTION: Not only is a pail 10 provided as an exclusive vessel of a prescribed content volume used for feeding a resist liquid from a resist liquid supply facility to a resist liquid use facility but this pail 10 is also used as a resist liquid recovery vessel for recovering a used resist liquid 252 produced within the resist liquid use facility instantiated, for example, by a spin coater 250. The resist liquid use facility is a facility equipped with resist liquid coating apparatuses and executes, by the resist liquid coating apparatus unit, an operation of feeding the resist liquid into the resist liquid use facility and an operation of recovering the used resist liquid, whereas, upon the completion of the recovery, the resist liquid recovery vessel is returned to the resist liquid supply facility, and the used resist liquid is pumped and recycled from an inner vessel at the resist liquid supply facility.
摘要翻译：要解决的问题：提供一种能够比现有技术更有效地回收抗蚀剂液体的方法，降低回收成本，并提高抗蚀剂液体的再循环率。解决方案：不仅提供了一个桶10 作为用于将抗蚀剂液体从抗蚀剂液体供给设备供给到抗蚀剂液体使用设备的规定含量的专用容器，但该桶也用作用于回收在其内产生的用过的抗蚀剂液体252的抗蚀液回收容器抗蚀剂液体使用设备例如是通过旋转涂布器250实现的。抗蚀剂液体使用设备是配备有抗蚀剂涂覆设备的设备，并且通过抗蚀剂涂布设备单元执行将抗蚀剂液体进料到抗蚀剂中的操作液体使用设备和回收所使用的抗蚀剂液体的操作，而在回收完成时，抗蚀剂液体回收容器返回到抗蚀剂液体供应设备，并且使用的抗蚀剂液体在抗蚀剂供应设备处从内部容器泵送和再循环。

2. 发明专利

JP2007204101A Fluid container 有权
标题翻译：流体容器
公开(公告)号：JP2007204101A
公开(公告)日：2007-08-16
申请号：JP2006023762
申请日：2006-01-31
申请人： Tokyo Ohka Kogyo Co Ltd , 東京応化工業株式会社
发明人： HASEGAWA TORU , TAKETSUTSUMI TOSHINORI
IPC分类号： B65D83/00 , B67D1/04 , B67D3/00
CPC分类号： B67D7/0294 , B67D7/0261 , Y10T137/314
摘要： PROBLEM TO BE SOLVED: To provide a duplex storage type fluid container which allows a certain attachment of a liquid extracting tube and easy and certain connection of a fluid discharge passage formed on a dispenser to the liquid extraction tube. SOLUTION: A joint is used for a fluid container including a flexible bag 12 having a neck 11 opening to allow the injection of a liquid, and an outer container 13 which supports the neck 11 by a mouth 13a to contain the bag 12. The joint is so structured that the liquid extraction tube 15 having a collar 15a can be attached to the mouth 13a of the outer container 13 via a plug 14, and that the passage 21a built in the dispenser 2 can be connected directly to a fluid passage 15b of the tube 15. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种双重存储型流体容器，其允许液体提取管的一定的附接以及形成在分配器上的流体排出通道容易且确定地连接到液体提取管。解决方案：接头用于流体容器，其包括具有颈部11开口以允许注射液体的柔性袋12和通过口13a支撑颈部11以容纳袋12的外部容器13 该接头结构使得具有轴环15a的液体提取管15可以经由塞子14附接到外部容器13的口部13a，并且内置在分配器2中的通道21a可以直接连接到流体管15的通道15b。版权所有（C）2007，JPO＆INPIT

3. 发明专利

JP2009177057A Resist liquid supply/recycling method 有权
标题翻译：耐液体供应/回收方法
公开(公告)号：JP2009177057A
公开(公告)日：2009-08-06
申请号：JP2008016151
申请日：2008-01-28
申请人： Tokyo Ohka Kogyo Co Ltd , 東京応化工業株式会社
发明人： HASEGAWA TORU , TAKETSUTSUMI TOSHINORI , SHO YOSHIAKI
IPC分类号： H01L21/027 , B05C11/10
摘要： PROBLEM TO BE SOLVED: To provide a system for improving efficiency in the recycling of a resist liquid greatly as compared with before and improving the recycle rate of the resist liquid by reducing recycling costs. SOLUTION: The resist liquid supply/recycling system comprises: a resist liquid coating device, such as a spin coater 250; an exclusive vessel 1 that is a supply/recycling vessel having a prescribed capacity used for supplying a resist liquid to the resist liquid coating device and for recycling a used resist liquid from the resist liquid coating device; supply piping that is used when supplying a resist liquid and can be connected to the exclusive vessel 1 in an airtight state; and recycling piping 253 that is used when recycling a used resist liquid and can be connected to the exclusive vessel 1 in an airtight state. Therefore, recycling at a user side and the burden of facilities for recycling are not required, thus greatly reducing recycling expenses and labor. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种与以前相比大大提高抗蚀剂液体回收效率的系统，通过降低再循环成本来提高抗蚀剂液体的再循环率。抗蚀剂液体供给/再循环系统包括：抗蚀剂液体涂布装置，例如旋转涂布机250; 专用容器1，其是具有规定容量的供给/再循环容器，用于向抗蚀剂涂料装置供给抗蚀剂液体，并且用于从抗蚀剂涂料装置再循环使用的抗蚀剂液体; 供应管道，在供应抗蚀剂液体时使用，并且可以在气密状态下连接到专用容器1; 以及在再循环使用的抗蚀剂液体时使用的再循环管道253，并且能够以气密状态连接到专用容器1。因此，不需要用户回收和回收设施的负担，大大降低了回收费用和劳动力。版权所有（C）2009，JPO＆INPIT

4. 发明专利

JP2007142133A Resist dilution system 有权
标题翻译：耐腐蚀系统
公开(公告)号：JP2007142133A
公开(公告)日：2007-06-07
申请号：JP2005333617
申请日：2005-11-18
申请人： Tokyo Ohka Kogyo Co Ltd , 東京応化工業株式会社
发明人： MORIO KIMITAKA , HASEGAWA TORU , MUROFUSHI EIJI
IPC分类号： H01L21/027 , G03F7/16
摘要： PROBLEM TO BE SOLVED: To provide a resist dilution system equipped with pipes where easy-to-dry liquids such as highly viscous resists flow. SOLUTION: A resist dilution system 1 consists of a pipe 3 equipped with a highly viscous resist pipe 3a, a diluent solvent pipe 3b, and a discharger 3e; and a preparation tank 2 for mixing a highly viscous resist fed via the highly viscous resist pipe 3a and discharged via the discharger 3e, and a diluent solvent fed via the diluent solvent pipe 3b and discharged via the discharger 3e. Consequently, highly viscous resists on the pipe are constantly washed away by the diluent solvent during use. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种配备有易于干燥的液体如高粘度抗蚀剂流动的管道的抗蚀剂稀释系统。解决方案：抗蚀剂稀释系统1由配备有高粘度抗蚀剂管3a，稀释剂溶剂管3b和排放器3e的管3组成; 以及用于混合通过高粘度抗蚀剂管3a供给并通过排出器3e排出的高粘性抗蚀剂的制备罐2和经由稀释剂溶剂管3b供给的稀释溶剂，并通过排出器3e排出。因此，在使用过程中，管道上的高粘度抗蚀剂被稀释剂溶剂不断地冲走。版权所有（C）2007，JPO＆INPIT

5. 发明专利

JP2012041093A Container for fluid, and container filled with fluid using the same 有权
标题翻译：用于流体的容器和使用该流体的容器填充流体
公开(公告)号：JP2012041093A
公开(公告)日：2012-03-01
申请号：JP2011262431
申请日：2011-11-30
申请人： Tokyo Ohka Kogyo Co Ltd , 東京応化工業株式会社
发明人： TAKETSUTSUMI TOSHINORI , HASEGAWA TORU , IRIE KIYOTAKA , TAKESHITA SHIGERU
IPC分类号： B65D77/06 , B65D83/00
摘要： PROBLEM TO BE SOLVED: To provide a container for a fluid which is free from any breakage caused by storage or transport, excellent in cleanness to contents, easily attachable/detachable to/from an exterior container of a packaging bag with a spout, and is excellent in workability or the like.SOLUTION: The container for a fluid includes an exterior container having an opening portion and a packaging bag 10 having a spout with the spout 11 being jointed with a packaging bag body 12. The packaging bag body 12 is accommodated in the exterior container, and the spout 11 is attachable/detachable to/from the opening portion of the exterior container. The packaging bag body 12 forms a bag body while a heat sealing portion 122 is formed on outer peripheries of at least two or more films 121, and a part of the spout 11 is jointed between sealing surfaces of the heat sealing portion 122. A part of the spout 11 has a spout fitting portion 111 face-jointed with the sealing surface. A taper Tis formed on the heat sealing portion 122 so that the seal width of right and left sealing portions Aother than the sealing portion Ais larger than the seal width of the sealing portion Awith which the spout fitting portion 111 is jointed.
摘要翻译：要解决的问题：提供一种用于流体的容器，其不会由于储存或运输而导致的任何破损，对内容物的清洁性能优异，可容易地附接/拆卸到具有喷口的包装袋的外部容器，可加工性等优异。解决方案：用于流体的容器包括具有开口部分的外部容器和具有喷口11的包装袋10的包装袋10，其中喷嘴11与包装袋主体12连接。包装袋主体12容纳在外部容器，并且喷口11可与外部容器的开口部分附接/拆卸。包装袋主体12形成袋体，同时在至少两个或更多个膜121的外周上形成热封部分122，并且喷嘴11的一部分接合在热封部分122的密封表面之间。部件喷嘴11具有与密封面面接合的喷口配合部111。在热封部分122上形成锥形T 1 ，使得左右密封部分A 2 的密封宽度比密封部分A 1 大于密封部分A的密封宽度（SB POS =“POST”> 1 ），喷嘴配合部分111 接合。版权所有（C）2012，JPO＆INPIT

6. 发明专利

JP2010256746A Method for recovering resist liquid 有权
标题翻译：回收液体的方法
公开(公告)号：JP2010256746A
公开(公告)日：2010-11-11
申请号：JP2009108790
申请日：2009-04-28
申请人： Tokyo Ohka Kogyo Co Ltd , 東京応化工業株式会社
发明人： TAKETSUTSUMI TOSHINORI , HASEGAWA TORU
IPC分类号： G03F7/26 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To provide a method for more efficiently recovering a resist liquid than conventional methods and increasing a recycle ratio of the resist liquid while reducing the recovery cost. SOLUTION: A pail 10 being a dedicated container having a prescribed capacity is used to supply the resist liquid from resist liquid supply equipment to resist liquid use equipment and is used also as a resist liquid recovery container for recovering a used resist liquid 252 generated in the resist liquid use equipment, for example, a spin coater 250. Thus the equipment burden for recovery and recycling on the user side is unnecessary, and an existing resist liquid supply system can be used as it is to recover the resist liquid, so that recovery costs and efforts can be considerably reduced. A pail including a cylindrically formed inner container made of a synthetic resin and a metallic outer container constituting a shell of the inner container is used as the pail 10, so that the manufacturing cost is reduced and the pail is easily separated/decomposed into the inner container and the outer container. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种比常规方法更有效地回收抗蚀剂液体的方法，并且在降低回收成本的同时提高抗蚀剂液体的再循环比。解决方案：使用具有规定容量的专用容器的桶10来供应来自抗蚀剂供应设备的抗蚀剂液体以抵抗液体使用设备，并且还用作用于回收使用过的抗蚀剂液体252的抗蚀液回收容器在抗蚀剂液体使用设备中产生的例如旋涂器250.因此，用户侧的回收和回收的设备负担是不必要的，并且可以直接使用现有的抗蚀剂液体供应系统来回收抗蚀剂液体，从而可以大大减少恢复成本和努力。使用包括由合成树脂制成的圆筒形的内部容器和构成内部容器的外壳的金属外部容器的桶作为桶10，使得制造成本降低，并且桶易于分离/分解成内部容器和外容器。版权所有（C）2011，JPO＆INPIT

7. 发明专利

JP2010235197A Liquid container 有权
标题翻译：液体容器
公开(公告)号：JP2010235197A
公开(公告)日：2010-10-21
申请号：JP2009088316
申请日：2009-03-31
申请人： Tokyo Ohka Kogyo Co Ltd , 東京応化工業株式会社
发明人： TAKETSUTSUMI TOSHINORI , HASEGAWA TORU
IPC分类号： B65D77/06
摘要： PROBLEM TO BE SOLVED: To provide a liquid container having a packaging bag reliably filled with a predetermined amount of liquid. SOLUTION: The liquid container includes: an external container that is hollow inside and has an opening in an upper part thereof; and the packaging bag 10 with an outlet/inlet 11, which can be accommodated in the external container via the opening. The bag portion 12 of the packaging bag 10 has sheetlike first surface 13 and second surface 14, and the outlet/inlet 11 is joined to the upper sides 15 of these surfaces. In the initial state before the accommodation, the surfaces 13 and 14 of the bag portion 12 are slackened by a predetermined length L from base lines 13a and 14a parallel to the upper sides 15 of the surfaces and of the bag portion, respectively, thereby extending tongue portions 13b and 14b. Then, these tongue portions are folded downward. Thereafter, while maintaining these folded states, the bag portion 12 is accommodated inside the external container via the opening. Consequently, after the bag portion is accommodated in the container, the surfaces 13 and 14 of the tongue portions 13b and 14b naturally separate from each other and a space is left between them. This improves the percentage of the liquid filled in the external container. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供具有可靠地填充有预定量的液体的包装袋的液体容器。解决方案：液体容器包括：外部容器，其在内部是中空的，并且在其上部具有开口; 以及具有出口/入口11的包装袋10，其可经由开口容纳在外部容器中。包装袋10的袋部12具有片状的第一表面13和第二表面14，并且出口/入口11接合到这些表面的上侧15。在收纳之前的初始状态下，袋部12的表面13和14分别从与表面和袋部分的上侧15平行的基线13a和14a松弛预定长度L，由此延伸舌部13b和14b。然后，这些舌部向下折叠。此后，在保持这些折叠状态的同时，袋部12经由开口容纳在外部容器的内部。因此，在袋部容纳在容器中之后，舌部13b和14b的表面13和14自然地彼此分离并且在它们之间留有空间。这改善了填充在外部容器中的液体的百分比。版权所有（C）2011，JPO＆INPIT

8. 发明专利

JP2008087769A Liquid storage tank 有权
标题翻译：液体储存罐
公开(公告)号：JP2008087769A
公开(公告)日：2008-04-17
申请号：JP2006267192
申请日：2006-09-29
申请人： Tokyo Ohka Kogyo Co Ltd , 東京応化工業株式会社
发明人： HASEGAWA TORU , TAKETSUTSUMI TOSHINORI
IPC分类号： B65D83/00
CPC分类号： B67D7/025 , B67D7/0216
摘要： PROBLEM TO BE SOLVED: To provide liquid storage tank for which a socket for distribution can easily be fitted without applying an unreasonable force.
SOLUTION: When a liquid is taken out from the inside of a flexible bag 2, a gas is fed from the gas feeding port of a port member 30. The fed gas is introduced into a space S2 between an external container 1 and the flexible bag 2 through a gas flow passage 31 between the internal surface of the socket main body 21 and the external surface of a valve seat member 27, a flow passage 13 which is formed in the plug 5, and a hole 12 which is formed on a bracket 3. When the gas has been introduced to the space S2, the flexible bag 2 shrinks, and the liquid filled inside is taken out to the outside through the inside of a tube 8, a flow passage between a valve 24 and the valve seat, a smaller diameter flow passage 26 and a flow passage 23.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：为了提供液体储罐，其容易安装用于分配的插座，而不施加不合理的力。解决方案：当从柔性袋2的内部取出液体时，从端口构件30的气体供给口供给气体。将供给的气体引入到外部容器1和柔性袋2通过插座主体21的内表面和阀座构件27的外表面之间的气体流路31，形成在插塞5中的流路13和形成的孔12 当气体已经被引入空间S2时，柔性袋2收缩，并且内部填充的液体通过管8的内部被取出到外部，阀24和阀24之间的流动通道阀座，较小直径的流动通道26和流动通道23.版权所有（C）2008，JPO＆INPIT

9. 发明专利

JP2008007154A Packaging bag with spout 有权
标题翻译：包装袋与SPOUT
公开(公告)号：JP2008007154A
公开(公告)日：2008-01-17
申请号：JP2006178816
申请日：2006-06-28
申请人： Dainippon Printing Co Ltd , Tokyo Ohka Kogyo Co Ltd , 大日本印刷株式会社 , 東京応化工業株式会社
发明人： IRIE KIYOTAKA , TAKETSUTSUMI TOSHINORI , TAKESHITA SHIGERU , HASEGAWA TORU
IPC分类号： B65D33/38
摘要： PROBLEM TO BE SOLVED: To provide a packaging bag with a spout which is not broken by a pin hole or an edge cut during storage or transportation and keeps its content clean.
SOLUTION: This packaging bag 1 with a spout used as an inside bag of an outer container has a packaging bag body 3 joined with a synthetic resin spout 4. The body 3 is storable in the outer container and the spout engaging part 41 of the spout 4 is detachably engaged with an opening of the outer container. The body 3 is formed in a bag body by forming a heat seal part 10 on outer peripheral edges of at least two film sheets. The spout mounting part 40 of the spout 4 is joined preferably by heat fusion with the area between seal faces at the top of the heat seal part 10.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供具有喷嘴的包装袋，其在储存或运输期间不被针孔或边缘切断而破坏并保持其内容物清洁。解决方案：具有用作外部容器的内袋的喷嘴的包装袋1具有与合成树脂喷口4连接的包装袋主体3.主体3可存储在外部容器中，并且喷口接合部41 喷嘴4可拆卸地与外容器的开口接合。主体3通过在至少两个薄膜片的外围边缘上形成热密封部分10而形成在袋体中。喷嘴4的喷口安装部分40优选地通过与热封部分10的顶部处的密封面之间的区域的热熔融连接。版权所有（C）2008，JPO＆INPIT

10. 发明专利

JP2013120238A Production method of resist for spinless coating 有权
标题翻译：无纺布耐腐蚀生产方法
公开(公告)号：JP2013120238A
公开(公告)日：2013-06-17
申请号：JP2011267214
申请日：2011-12-06
申请人： Tokyo Ohka Kogyo Co Ltd , 東京応化工業株式会社
发明人： TAKETSUTSUMI TOSHINORI , HASEGAWA TORU , HIKITA JIRO
IPC分类号： G03F7/26 , B05D3/00 , G03F7/004 , G03F7/16 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To provide a production method of a resist for spinless coating made from a used resist for spin coating.SOLUTION: If a solvent of a used resist for spin coating is mainly composed of propylene glycol monomethyl ether acetate (PGMEA) and a rinse liquid contains another solvent having the boiling temperature lower than the PGMEA, a used mixture containing the used resist for spin coating and a waste liquid of the rinse liquid is recovered and concentrated, and then a resist for spinless coating having high coating uniformity can be produced by adding a surface active agent to a concentrated liquid.

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