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1. 发明申请

US20080044570A1 Method for Producing a Thin-Film Chalcopyrite Compound 有权
标题翻译：生产薄膜黄铜矿化合物的方法
公开(公告)号：US20080044570A1
公开(公告)日：2008-02-21
申请号：US11579457
申请日：2005-05-03
申请人： Tobias Meyer , Tiwari Ayodhya , Marc Kaelin
发明人： Tobias Meyer , Tiwari Ayodhya , Marc Kaelin
IPC分类号： H01L31/032
CPC分类号： H01L31/1836 , C30B7/005 , C30B29/46 , H01L31/0322 , Y02E10/541 , Y02P70/521
摘要： The invention concerns a method which consists in depositing on a substrate a solution containing metal mineral salts constituting chalcopyrite and an organic binder; then drying to obtain a solid film on the substrate; and finally contacting the film with an atmosphere containing one or more elements of group 16 of the periodic table and forming chalcopyrite by thermal reaction.
摘要翻译：本发明涉及一种方法，其包括在基底上沉积含有构成黄铜矿和有机粘合剂的金属矿物盐的溶液; 然后干燥以在基材上获得固体膜; 最后使该膜与含有周期表第16族元素的气氛接触，并通过热反应形成黄铜矿。

2. 发明授权

US08097305B2 Method for producing a thin-film chalcopyrite compound 有权
标题翻译：薄膜黄铜矿化合物的制造方法
公开(公告)号：US08097305B2
公开(公告)日：2012-01-17
申请号：US11579457
申请日：2005-05-03
申请人： Tobias Meyer , Tiwari Ayodhya , Marc Kaelin
发明人： Tobias Meyer , Tiwari Ayodhya , Marc Kaelin
IPC分类号： B05D3/02
CPC分类号： H01L31/1836 , C30B7/005 , C30B29/46 , H01L31/0322 , Y02E10/541 , Y02P70/521
摘要： The invention concerns a method which consists in depositing on a substrate a solution containing metal mineral salts constituting chalcopyrite and an organic binder; then drying to obtain a solid film on the substrate; and finally contacting the film with an atmosphere containing one or more elements of group 16 of the periodic table and forming chalcopyrite by thermal reaction.
摘要翻译：本发明涉及一种方法，其包括在基底上沉积含有构成黄铜矿和有机粘合剂的金属矿物盐的溶液; 然后干燥以在基材上获得固体膜; 最后使该膜与含有周期表第16族元素的气氛接触，并通过热反应形成黄铜矿。

3. 发明申请

US20100247745A1 METHOD FOR MANUFACTURING A COMPOUND FILM 有权
标题翻译：制造化合物膜的方法
公开(公告)号：US20100247745A1
公开(公告)日：2010-09-30
申请号：US12677665
申请日：2007-09-12
申请人： Dominik Rudmann , Marc Kaelin , Thomas Studer , Felix Budde
发明人： Dominik Rudmann , Marc Kaelin , Thomas Studer , Felix Budde
IPC分类号： C23C14/54
CPC分类号： H01L31/18 , C23C14/0623 , C23C14/545 , C23C14/548 , H01L31/0322 , H01L31/1844 , Y02E10/541 , Y02E10/544 , Y02P70/521
摘要： A method for manufacturing a compound film comprising a substrate and at least one additional layer is disclosed. The method comprising the steps of depositing at least two chemical elements on the substrate and/or on the at least one additional layer using depositions sources, maintaining depositing of the at least two chemical elements while the substrate and the deposition sources are being moved relative to each other, measuring the compound film properties, particularly being compound film thickness, compound-film overall composition, and compound-film composition in one or several positions of the compound film, comparing the predefined values for the compound film properties to the measured compound film properties, and adjusting the deposition of the at least two chemical elements in case the measured compound film properties do not match the predefined compound film properties.
摘要翻译：公开了一种制造包含基底和至少一个附加层的化合物膜的方法。该方法包括以下步骤：使用沉积源在衬底和/或至少一个附加层上沉积至少两个化学元素，保持沉积所述至少两种化学元素，同时衬底和沉积源相对于在化合物膜的一个或多个位置测定化合物膜特性，特别是复合膜厚度，复合膜整体组成和化合物膜组成，将化合物膜性质的预定值与测定的化合物膜进行比较性质，并且在测量的化合物膜性质与预定化合物膜性质不匹配的情况下调节至少两种化学元素的沉积。

4. 发明授权

US08420979B2 Method and apparatus for laser beam processing of an element with total transmission for light of a t least 10-5 有权
标题翻译：用于激光束处理的元件的方法和装置，具有至少10-5的光的总传输
公开(公告)号：US08420979B2
公开(公告)日：2013-04-16
申请号：US12670270
申请日：2007-07-24
申请人： Felix Budde , Thomas Studer , Marc Kaelin , Dominik Rudmann
发明人： Felix Budde , Thomas Studer , Marc Kaelin , Dominik Rudmann
IPC分类号： B23K15/00
CPC分类号： B23K26/046 , B23K26/042 , B23K26/082 , B23K26/0846 , B23K26/0853 , B23K26/40 , B23K2101/18 , B23K2101/36 , B23K2103/16 , B23K2103/172 , H01L31/0322 , H01L31/0475 , H01L31/1864 , H01L31/1872 , H01L31/1884 , H05K1/0269 , H05K1/0393 , H05K3/0008 , H05K3/0026 , H05K2201/0108 , H05K2201/09918 , Y02E10/50 , Y02P70/521
摘要： A method and an apparatus for laser beam processing of an element (12) that has a total transmittance for light of at least 10−5, comprising a laser unit (1) for generating a laser beam on one side of the to-be-processed element (12), an illumination unit (7), an imaging system (10) comprising a sensor unit on the one side of the to-be-processed element (12), the sensor unit recording residual light that results from light of the illumination unit (7), a scanning unit (2) for adjusting the laser beam processing position, and a control unit. The control unit is operatively connected to the laser unit (1), the imaging system (10) and the scanning unit (2), and the illumination unit (7) is positioned on the other side of the to-be-processed element (12) in relation to the laser unit (1). Since the to-be-processed element (12) allows light to pass through an otherwise opaque or almost opaque layer, a good contrast is obtained that is used to determine the position of the laser beam with high precision.Therefore, high precision laser processing is possible for materials with low transmission for light and low mechanical stability like flexible thin film solar cells.
摘要翻译：一种用于对具有至少10-5的光的总透射率的元件（12）的激光束处理的方法和装置，包括：激光单元（1），用于在所述激光单元的一侧产生激光束; 处理元件（12），照明单元（7），在待处理元件（12）的一侧上包括传感器单元的成像系统（10），所述传感器单元记录由照明单元（7），用于调整激光束处理位置的扫描单元（2）和控制单元。控制单元可操作地连接到激光单元（1），成像系统（10）和扫描单元（2），并且照明单元（7）位于被处理元件的另一侧（ 12）相对于激光单元（1）。由于待处理元件（12）允许光通过否则不透明或几乎不透明的层，所以获得了用于以高精度确定激光束的位置的良好的对比度。因此，对于光透射率低的材料和柔性薄膜太阳能电池等低机械稳定性的材料，可以进行高精度激光加工。

5. 发明申请

US20100224604A1 METHOD AND APPARATUS FOR LASER BEAM PROCESSING OF AN ELEMENT WITH TOTAL TRANSMISSION FOR LIGHT OF A T LEAST 10-5 有权
标题翻译：用于激光束处理的方法和装置，用于轻量级传输的元件10-5
公开(公告)号：US20100224604A1
公开(公告)日：2010-09-09
申请号：US12670270
申请日：2007-07-24
申请人： Felix Budde , Thomas Studer , Marc Kaelin , Dominik Rudmann
发明人： Felix Budde , Thomas Studer , Marc Kaelin , Dominik Rudmann
IPC分类号： B23K26/06 , B23K26/02
CPC分类号： B23K26/046 , B23K26/042 , B23K26/082 , B23K26/0846 , B23K26/0853 , B23K26/40 , B23K2101/18 , B23K2101/36 , B23K2103/16 , B23K2103/172 , H01L31/0322 , H01L31/0475 , H01L31/1864 , H01L31/1872 , H01L31/1884 , H05K1/0269 , H05K1/0393 , H05K3/0008 , H05K3/0026 , H05K2201/0108 , H05K2201/09918 , Y02E10/50 , Y02P70/521
摘要： A method and an apparatus for laser beam processing of an element (12) that has a total transmittance for light of at least 10−5, comprising a laser unit (1) for generating a laser beam on one side of the to-be-processed element (12), an illumination unit (7), an imaging system (10) comprising a sensor unit on the one side of the to-be-processed element (12), the sensor unit recording residual light that results from light of the illumination unit (7), a scanning unit (2) for adjusting the laser beam processing position, and a control unit. The control unit is operatively connected to the laser unit (1), the imaging system (10) and the scanning unit (2), and the illumination unit (7) is positioned on the other side of the to-be-processed element (12) in relation to the laser unit (1). Since the to-be-processed element (12) allows light to pass through an otherwise opaque or almost opaque layer, a good contrast is obtained that is used to determine the position of the laser beam with high precision.Therefore, high precision laser processing is possible for materials with low transmission for light and low mechanical stability like flexible thin film solar cells.
摘要翻译：一种用于对具有至少10-5的光的总透射率的元件（12）的激光束处理的方法和装置，包括：激光单元（1），用于在所述激光单元的一侧产生激光束; 处理元件（12），照明单元（7），在待处理元件（12）的一侧上包括传感器单元的成像系统（10），所述传感器单元记录由照明单元（7），用于调整激光束处理位置的扫描单元（2）和控制单元。控制单元可操作地连接到激光单元（1），成像系统（10）和扫描单元（2），并且照明单元（7）位于被处理元件的另一侧（ 12）相对于激光单元（1）。由于待处理元件（12）允许光通过否则不透明或几乎不透明的层，所以获得了用于以高精度确定激光束的位置的良好的对比度。因此，对于光透射率低的材料和柔性薄膜太阳能电池等低机械稳定性的材料，可以进行高精度激光加工。

6. 发明授权

US08927051B2 Method for manufacturing a compound film 有权
标题翻译：复合膜的制造方法
公开(公告)号：US08927051B2
公开(公告)日：2015-01-06
申请号：US12677665
申请日：2007-09-12
申请人： Dominik Rudmann , Marc Kaelin , Thomas Studer , Felix Budde
发明人： Dominik Rudmann , Marc Kaelin , Thomas Studer , Felix Budde
IPC分类号： C23C16/52 , H01L31/18 , C23C14/06 , C23C14/54 , H01L31/032
CPC分类号： H01L31/18 , C23C14/0623 , C23C14/545 , C23C14/548 , H01L31/0322 , H01L31/1844 , Y02E10/541 , Y02E10/544 , Y02P70/521
摘要： A method for manufacturing a compound film comprising a substrate and at least one additional layer is disclosed. The method comprising the steps of depositing at least two chemical elements on the substrate and/or on the at least one additional layer using depositions sources, maintaining depositing of the at least two chemical elements while the substrate and the deposition sources are being moved relative to each other, measuring the compound film properties, particularly being compound film thickness, compound-film overall composition, and compound-film composition in one or several positions of the compound film, comparing the predefined values for the compound film properties to the measured compound film properties, and adjusting the deposition of the at least two chemical elements in case the measured compound film properties do not match the predefined compound film properties.
摘要翻译：公开了一种制造包含基底和至少一个附加层的化合物膜的方法。该方法包括以下步骤：使用沉积源在衬底和/或至少一个附加层上沉积至少两个化学元素，保持沉积所述至少两种化学元素，同时衬底和沉积源相对于在化合物膜的一个或多个位置测定化合物膜特性，特别是复合膜厚度，复合膜整体组成和化合物膜组成，将化合物膜性质的预定值与测定的化合物膜进行比较性质，并且在测量的化合物膜性质与预定化合物膜性质不匹配的情况下调节至少两种化学元素的沉积。

7. 发明授权

US08895100B2 Method for manufacturing a compound film 有权
公开(公告)号：US08895100B2
公开(公告)日：2014-11-25
申请号：US12677665
申请日：2007-09-12
申请人： Dominik Rudmann , Marc Kaelin , Thomas Studer , Felix Budde
发明人： Dominik Rudmann , Marc Kaelin , Thomas Studer , Felix Budde
IPC分类号： C23C16/52 , H01L31/18 , C23C14/06 , C23C14/54 , H01L31/032
摘要： A method for manufacturing a compound film comprising a substrate and at least one additional layer is disclosed. The method comprising the steps of depositing at least two chemical elements on the substrate and/or on the at least one additional layer using depositions sources, maintaining depositing of the at least two chemical elements while the substrate and the deposition sources are being moved relative to each other, measuring the compound film properties, particularly being compound film thickness, compound-film overall composition, and compound-film composition in one or several positions of the compound film, comparing the predefined values for the compound film properties to the measured compound film properties, and adjusting the deposition of the at least two chemical elements in case the measured compound film properties do not match the predefined compound film properties.

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