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    • 9. 发明申请
    • Method For Forming Gallium Nitride Semiconductor Device With Improved Forward Conduction
    • 用于形成具有改进的正向传导的氮化镓半导体器件的方法
    • US20120282762A1
    • 2012-11-08
    • US13553237
    • 2012-07-19
    • TingGang Zhu
    • TingGang Zhu
    • H01L21/329H01L21/20
    • H01L29/2003H01L29/0692H01L29/417H01L29/872
    • A method for forming a gallium nitride based semiconductor diode includes forming Schottky contacts on the upper surface of mesas formed in a semiconductor body formed on a substrate. Ohmic contacts are formed on the lower surface of the semiconductor body. In one embodiment, an insulating layer is formed over the Schottky and ohmic contacts and vias are formed in the insulating layer to the Schottky and ohmic contacts to form the anode and cathode electrodes. In another embodiment, vias are formed in the insulating layer to the Schottky contacts and vias are formed in the semiconductor body to the ohmic contacts. An anode electrode is formed in electrical contact with the Schottky contacts. A cathode electrode is formed in electrical contact with the ohmic contacts on the backside of the substrate.
    • 形成氮化镓基半导体二极管的方法包括在形成在基板上的半导体本体中形成的台面的上表面上形成肖特基触点。 在半导体本体的下表面上形成欧姆接触。 在一个实施例中,在肖特基和欧姆接触之上形成绝缘层,并且在绝缘层中形成通孔至肖特基和欧姆接触以形成阳极和阴极电极。 在另一个实施例中,在绝缘层中形成通孔至肖特基接触,并且在半导体本体中形成通孔至欧姆接触。 形成与肖特基接触电接触的阳极电极。 阴极电极形成为与衬底背面上的欧姆接触电接触。
    • 10. 发明申请
    • Gallium Nitride Semiconductor Device With Improved Forward Conduction
    • 具有改进的正向传导的氮化镓半导体器件
    • US20110278589A1
    • 2011-11-17
    • US13191325
    • 2011-07-26
    • TingGang Zhu
    • TingGang Zhu
    • H01L29/872
    • H01L29/2003H01L29/0692H01L29/417H01L29/872
    • A gallium nitride based semiconductor diode includes a substrate, a semiconductor body including a first heavily doped GaN layer and a second lightly doped GaN layer. The semiconductor body includes mesas projecting upwardly from a lower surface where each of the mesas includes the second GaN layer and a portion of the first GaN layer. Schottky contacts are formed on the upper surface of the mesas and ohmic contacts are formed on the lower surface of the semiconductor body. An insulating layer is formed over the Schottky and ohmic contacts. Vias are formed in the insulating layer to the Schottky contacts and vias are formed in the semiconductor body to the Ohmic contacts. An anode electrode is formed in a first metal pad in electrical contact with the Schottky contacts. A cathode electrode is formed in a second metal pad in electrical contact with the ohmic contacts.
    • 氮化镓基半导体二极管包括衬底,包括第一重掺杂GaN层和第二轻掺杂GaN层的半导体本体。 半导体主体包括从下表面向上突出的台面,其中每个台面包括第二GaN层和第一GaN层的一部分。 在台面的上表面上形成肖特基接触,并且在半导体本体的下表面上形成欧姆接触。 绝缘层形成在肖特基和欧姆接触之上。 在绝缘层中形成有与肖特基触点相对的通孔,并且在半导体本体中形成通孔至欧姆接触。 阳极电极形成在与肖特基接触件电接触的第一金属焊盘中。 阴极电极形成在与欧姆接触件电接触的第二金属焊盘中。