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    • 9. 发明授权
    • Tiling of optical MEMS devices
    • 光学MEMS器件的平铺
    • US06873756B2
    • 2005-03-29
    • US09949210
    • 2001-09-07
    • Timothy E. BeerlingMichael J. Daneman
    • Timothy E. BeerlingMichael J. Daneman
    • G02B26/08G02B6/26
    • G02B26/0841
    • An optical microelectromechanical system (MEMS) device and a method for making it are disclosed. The device generally includes a substrate with two or more device dies attached to the substrate. Each device die includes one or more MEMS optical elements. A common clamping die is attached to the device dies such that each MEMS optical element aligns with a corresponding clamping surface on the common clamping die. The single larger clamping die, which covers all the elements on the smaller device dies, forces mirrors contained thereon to register accurately, in the “ON” state. Such a device may be made by attaching two or more device dies to a substrate, and attaching a common clamping die to the two or more device dies. The device dies may be attached to the substrate before attaching the common clamping die to the device dies. Alternatively, the common clamping die may be attached to the device dies before the device dies are attached to the substrate. High yields may be achieved since simple semiconductor process may be used to fabricate the larger clamping die.
    • 公开了一种光学微机电系统(MEMS)装置及其制造方法。 该装置通常包括具有附接到基板的两个或更多个器件裸片的衬底。 每个器件管芯包括一个或多个MEMS光学元件。 常见的夹紧模具附接到器件管芯,使得每个MEMS光学元件与公共夹紧模具上的对应夹紧表面对准。 覆盖较小器件裸片上的所有元件的单个较大的夹紧裸片在“ON”状态下迫使容纳在其上的反射镜准确地进行寄存。 这样的装置可以通过将两个或更多个器件管芯附接到衬底并且将公共夹紧管芯附接到两个或更多个器件管芯来制造。 在将公共夹紧模具附接到器件裸片之前,器件管芯可以附接到衬底。 或者,在将器件管芯附接到衬底之前,可以将公共夹紧模具附接到器件管芯。 可以实现高产率,因为可以使用简单的半导体工艺来制造更大的夹紧模具。
    • 10. 发明授权
    • Capacitive sensing scheme for digital control state detection in optical switches
    • 光开关中数字控制状态检测的电容感测方案
    • US06788520B1
    • 2004-09-07
    • US09724948
    • 2000-11-28
    • Behrang BehinMichael J. DanemanMeng-Hsiung KiangKam-Yin LauTimothy E. Beerling
    • Behrang BehinMichael J. DanemanMeng-Hsiung KiangKam-Yin LauTimothy E. Beerling
    • G02B2608
    • G02B6/358G02B6/3512G02B6/3546G02B6/357G02B6/359
    • Disclosed is an apparatus and method for detecting whether rotatable MEMS elements are in the “on” or “off” position. Embodiments of the invention have application in devices switches that employ mirrors that move between an “on” or “off” position, wherein they reflect light from an input fiber into an output fiber in the “on” position, and allow the light to pass in the “off” position. Electrodes are positioned in the device such that the mirrors are close to, and therefor capacitively coupled to, a different electrode depending on whether they are in the “on” or “off” position. This invention is especially useful for switches that already employ electrodes for electrostatic clamping of mirrors in one or more positions, since those same electrodes can be used both to electrostatically clamp the mirrors and to sense their position. The method described in this invention comprises sensing of the capacitance between the mirrors and the one or more electrodes used to clamp the mirrors in its one or more position in order to detect which of the positions the mirrors are clamped in. Furthermore, the magnitude of the capacitances can be monitored to detect improper clamping.
    • 公开了一种用于检测可旋转MEMS元件是处于“开”还是“关”位置的装置和方法。 本发明的实施例可应用于使用在“开”或“关”位置之间移动的反射镜的装置开关中,其中它们将来自输入光纤的光反射到处于“开”位置的输出光纤,并允许光通过 在“关”位置。 电极被定位在设备中,使得反射镜接近并因此电容耦合到不同的电极,这取决于它们是处于“开”还是“关”位置。 本发明对于已经使用用于在一个或多个位置中的反射镜的静电夹持的电极的开关特别有用,因为这些相同的电极可以用于静电夹紧反射镜并感测其位置。 本发明描述的方法包括检测反射镜之间的电容和用于将反射镜夹持在其一个或多个位置中的一个或多个电极,以便检测反射镜夹在哪一个位置。此外, 可以监控电容以检测不正确的夹紧。