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    • 10. 发明授权
    • Die seal ring structure
    • 模具密封圈结构
    • US08587090B2
    • 2013-11-19
    • US13477746
    • 2012-05-22
    • Tien-Chang ChangYu-Hua Huang
    • Tien-Chang ChangYu-Hua Huang
    • H01L23/544
    • H01L23/562H01L23/564H01L23/585H01L2924/0002H01L2924/00
    • The invention provides a die seal ring structure. The die seal ring structure includes an inner seal ring portion surrounding an integrated circuit region. An outer seal ring portion is surrounded by a scribe line, surrounding the inner seal ring portion, wherein the outer seal ring portion has an outer top metal layer pattern with a first width extending over the inner seal ring portion and connecting to an inner next-to-top metal layer pattern of the inner seal ring portion. A first redistribution pattern is disposed on the outer top metal layer pattern, having a second width which is narrower than the first width. A second redistribution pattern is disposed on the first redistribution pattern. A redistribution passivation layer covers the second redistribution pattern and the inner seal ring portion, wherein the redistribution passivation layer is separated from the scribe line by a second distance.
    • 本发明提供一种模具密封环结构。 模具密封环结构包括围绕集成电路区域的内部密封环部分。 外密封环部分由围绕内密封环部分的划线包围,其中外密封环部分具有外顶层金属层图案,第一宽度在内密封环部分上延伸并连接到内密封环部分, 内密封环部分的顶层金属层图案。 第一再分布图案设置在外顶金属层图案上,具有比第一宽度窄的第二宽度。 第二再分布图案设置在第一再分布图案上。 再分布钝化层覆盖第二再分配图案和内密封环部分,其中再分布钝化层与划线隔开第二距离。