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    • 3. 发明授权
    • Multi-band multiplexing intra-cavity gas sensing system and method
    • 多频带复用腔内气体传感系统及方法
    • US08934100B2
    • 2015-01-13
    • US13880731
    • 2011-12-16
    • Kun LiuTiegen LiuJunfeng JiangXiao Liang
    • Kun LiuTiegen LiuJunfeng JiangXiao Liang
    • G01N21/00G01N21/35G01N21/39
    • G01N21/3504G01N21/39G01N2021/391
    • Disclosed is a multi-band multiplexing intra-cavity gas sensing system and method. The system consists of a laser resonant cavity subsystem, a gas sensing subsystem and a detection-demodulation subsystem. The laser resonant cavity subsystem consists of the first beam splitter, two ways of gain paths composed of a pump light source, a wavelength division multiplexer, a rare earth doped fiber, an optical isolator and a tunable optical attenuator, a beam combiner and an F-P tunable optical filter. The gas sensing subsystem consists of a gas cell and an optical reflective mirror. The detection-demodulation subsystem consists of an optical coupler, the second beam splitter, two optical detectors, a data acquisition module and a computer. In this invention, different rare-earth doped fibers are multiplexing into one system, in order to cover more maser bands of different rare earth, which greatly expands the scanning range of wavelength, and is capable of detecting various gases simultaneously. New gain paths can be added to the system, to further expand the scanning range of wavelength. Hence, the present invention has strong expandability.
    • 公开了一种多频带复用腔内气体感测系统和方法。 该系统由激光谐振腔子系统,气体感测子系统和检测解调子系统组成。 激光谐振腔子系统包括第一分束器,由泵浦光源,波分复用器,稀土掺杂光纤,光隔离器和可调光衰减器组成的两种增益路径,光束组合器和FP 可调滤光片。 气体感测子系统由气体单元和光学反射镜组成。 检测解调子系统由光耦合器,第二分束器,两个光学检测器,数据采集模块和计算机组成。 在本发明中,不同的稀土掺杂光纤被复用为一个系统,以便覆盖不同稀土的更多的激光带,这大大地扩大了波长的扫描范围,并且能够同时检测各种气体。 可以向系统添加新的增益路径,以进一步扩大波长的扫描范围。 因此,本发明具有很强的可扩展性。
    • 5. 发明申请
    • SWING-STYLE AND HIGH SIGNAL-TO-NOISE RATIO DEMODULATION DEVICES AND CORRESPONDING DEMODULATION METHOD FOR THE MEASUREMENT OF LOW COHERENCE INTERFERENCE DISPLACEMENT
    • 用于测量低相干干扰位移的振荡型和高信号噪声比分解装置和相应的解调方法
    • US20140176959A1
    • 2014-06-26
    • US13880730
    • 2012-05-28
    • Tiegen LiuJunfeng JiangJinde YinKun LiuShaohua Wang
    • Tiegen LiuJunfeng JiangJinde YinKun LiuShaohua Wang
    • G01B9/02
    • G01B9/0209G01B9/02057G01B9/02065G02B5/3083G02B6/29302G02B6/32G02B2207/117
    • This invention provides a swing-style and high signal-to-noise ratio low coherence interference demodulation devices and the corresponding demodulation method for the measurement of displacement. In the displacement sensing method, the optical path difference, which is built by the light reflections from the reference surface and the test object, varies with the displacement of the test object. When the reflected signal lights is sent to a low coherence polarization interference system, the birefringent wedge formulates a spatial distribution of optical path difference, from which the optical path difference of the reflection signals thus can be demodulated. In the displacement scanning method, the reflected signal lights are collimated and transferred to a time scanner consisting of a rotating mirror and a f-θ lens, to perform thin light beam scanning along the longitudinal direction of a birefringent wedge. This innovation provides two demodulation devices that are both applicable for the measurement methods. One uses a linear camera array and the other uses a linear micropore array and single PIN photoelectric detector, to receive interference fringes. Since the energy of the scanning beam is highly concentrated, the signal-to-noise ratio for low coherence interference signal is significantly higher than that of the traditional devices. In addition, the accuracy of these demodulation devices is significantly improved, because the linear camera array and the linear micropore array maintain a consistent spatial position of the received light spot.
    • 本发明提供了一种摆幅式和高信噪比的低相干干扰解调装置及相应的位移测量解调方法。 在位移感测方法中,由参考面和被测物体的光反射构成的光程差随测试对象的位移而变化。 当反射信号光被发送到低相干偏振干涉系统时,双折射楔形成光程差的空间分布,从而可以解调反射信号的光程差。 在位移扫描方法中,反射信号光被准直并传送到由旋转镜和f-面组成的时间扫描仪; 透镜,以沿着双折射楔的纵向进行薄光束扫描。 该创新提供了两种既适用于测量方法的解调设备。 一个使用线性相机阵列,另一个使用线性微孔阵列和单PIN光电探测器来接收干涉条纹。 由于扫描光束的能量高度集中,因此低相干干涉信号的信噪比显着高于传统器件的信噪比。 另外,这些解调装置的精度显着提高,因为线性相机阵列和线性微孔阵列保持接收光斑的一致的空间位置。
    • 6. 发明授权
    • High stable fiber fabry-perot pressure sensor with glue-free packing and its fabrication method
    • 高稳定纤维法布里 - 珀罗压力传感器,无胶包装及其制造方法
    • US09074957B2
    • 2015-07-07
    • US13880733
    • 2012-05-28
    • Junfeng JiangTiegen LiuJinde YinKun LiuYu Liu
    • Junfeng JiangTiegen LiuJinde YinKun LiuYu Liu
    • G02B27/00G02B1/00G01L11/02G02B26/00G02B5/28G02B6/293
    • G01L11/025G01L11/02G02B5/28G02B5/284G02B6/29358G02B26/001
    • The present invention relates to a high stable fiber fabry-perot pressure sensor with glue-free packing and its fabrication method. The sensor includes a sensor head, a sensor body with a through-hole in the axial direction and a optical fiber. The sensor head is a 4-layer structure, which includes the first silicon wafer, the first Pyrex glass wafer, the second silicon wafer and the second Pyrex glass wafer. The rear surface of the first silicon wafer forms the first reflecting surface of the fabry-perot (F-P) cavity, and the second silicon wafer provides the second reflecting surface for the F-P cavity. The second Pyrex glass wafer is welded together with the sensor body. The optical fiber is fixed in the sensor body by a CO2 laser welding to achieve the glue-free packing. When the external pressure is applied to deform the first layer silicon wafer, the F-P cavity length will change. When a broad band source is used, the variation of the cavity length can be obtained by collecting the reflection spectrum or low-coherence interference fringe of the sensor, thus the pressure information can be obtained. The structure of the invention can effectively eliminate the affect of environmental factors, such as temperature and humidity, and greatly promoting the measuring accuracy.
    • 本发明涉及具有无胶包装的高稳定性纤维法布里 - 珀罗压力传感器及其制造方法。 传感器包括传感器头,在轴向具有通孔的传感器本体和光纤。 传感器头是4层结构,其包括第一硅晶片,第一Pyrex玻璃晶片,第二硅晶片和第二Pyrex玻璃晶片。 第一硅晶片的后表面形成fabry-perot(F-P)腔的第一反射表面,而第二硅晶片为F-P腔提供第二反射表面。 第二个Pyrex玻璃晶片与传感器主体焊接在一起。 光纤通过CO2激光焊接固定在传感器主体中,实现无胶包装。 当施加外部压力以使第一层硅晶片变形时,F-P腔体长度将改变。 当使用宽带源时,可以通过收集传感器的反射光谱或低相干干涉条纹来获得腔长度的变化,从而可以获得压力信息。 本发明的结构能有效消除温湿度等环境因素的影响,大大提高了测量精度。
    • 7. 发明申请
    • High stable fiber fabry-perot pressure sensor with glue-free packing and its fabrication method
    • 高稳定纤维法布里 - 珀罗压力传感器,无胶包装及其制造方法
    • US20140208858A1
    • 2014-07-31
    • US13880733
    • 2012-05-28
    • Junfeng JiangTiegen LiuJinde YinKun LiuYu Liu
    • Junfeng JiangTiegen LiuJinde YinKun LiuYu Liu
    • G01L11/02
    • G01L11/025G01L11/02G02B5/28G02B5/284G02B6/29358G02B26/001
    • The present invention relates to a high stable fiber fabry-perot pressure sensor with glue-free packing and its fabrication method. The sensor includes a sensor head, a sensor body with a through-hole in the axial direction and a optical fiber. The sensor head is a 4-layer structure, which includes the first silicon wafer, the first Pyrex glass wafer, the second silicon wafer and the second Pyrex glass wafer. The rear surface of the first silicon wafer forms the first reflecting surface of the fabry-perot (F-P) cavity, and the second silicon wafer provides the second reflecting surface for the F-P cavity. The second Pyrex glass wafer is welded together with the sensor body. The optical fiber is fixed in the sensor body by a CO2 laser welding to achieve the glue-free packing When the external pressure is applied to deform the first layer silicon wafer, the F-P cavity length will change. When a broad band source is used, the variation of the cavity length can be obtained by collecting the reflection spectrum or low-coherence interference fringe of the sensor, thus the pressure information can be obtained. The structure of the invention can effectively eliminate the affect of environmental factors, such as temperature and humidity, and greatly promoting the measuring accuracy.
    • 本发明涉及具有无胶包装的高稳定性纤维法布里 - 珀罗压力传感器及其制造方法。 传感器包括传感器头,在轴向具有通孔的传感器本体和光纤。 传感器头是4层结构,其包括第一硅晶片,第一Pyrex玻璃晶片,第二硅晶片和第二Pyrex玻璃晶片。 第一硅晶片的后表面形成fabry-perot(F-P)腔的第一反射表面,而第二硅晶片为F-P腔提供第二反射表面。 第二个Pyrex玻璃晶片与传感器主体焊接在一起。 光纤通过CO2激光焊接固定在传感器主体中,实现无胶包装当施加外部压力使第一层硅晶片变形时,F-P腔体长度将发生变化。 当使用宽带源时,可以通过收集传感器的反射光谱或低相干干涉条纹来获得腔长度的变化,从而可以获得压力信息。 本发明的结构能有效消除温湿度等环境因素的影响,大大提高了测量精度。
    • 8. 发明申请
    • MULTI-BAND MULTIPLEXING INTRA-CAVITY GAS SENSING SYSTEM AND METHOD
    • 多层多路径气体感测系统及方法
    • US20140176951A1
    • 2014-06-26
    • US13880731
    • 2011-12-16
    • Kun LiuTiegen LiuJungeng JiangXiao Liang
    • Kun LiuTiegen LiuJungeng JiangXiao Liang
    • G01N21/35
    • G01N21/3504G01N21/39G01N2021/391
    • Disclosed is a multi-band multiplexing intra-cavity gas sensing system and method. The system consists of a laser resonant cavity subsystem, a gas sensing subsystem and a detection-demodulation subsystem. The laser resonant cavity subsystem consists of the first beam splitter, two ways of gain paths composed of a pump light source, a wavelength division multiplexer, a rare earth doped fiber, an optical isolator and a tunable optical attenuator, a beam combiner and an F-P tunable optical filter. The gas sensing subsystem consists of a gas cell and an optical reflective mirror. The detection-demodulation subsystem consists of an optical coupler, the second beam splitter, two optical detectors, a data acquisition module and a computer. In this invention, different rare-earth doped fibers are multiplexing into one system, in order to cover more maser bands of different rare earth, which greatly expands the scanning range of wavelength, and is capable of detecting various gases simultaneously. New gain paths can be added to the system, to further expand the scanning range of wavelength. Hence, the present invention has strong expandability.
    • 公开了一种多频带复用腔内气体感测系统和方法。 该系统由激光谐振腔子系统,气体感测子系统和检测解调子系统组成。 激光谐振腔子系统包括第一分束器,由泵浦光源,波分复用器,稀土掺杂光纤,光隔离器和可调光衰减器组成的两种增益路径,光束组合器和FP 可调滤光片。 气体感测子系统由气体单元和光学反射镜组成。 检测解调子系统由光耦合器,第二分束器,两个光学检测器,数据采集模块和计算机组成。 在本发明中,不同的稀土掺杂光纤被复用为一个系统,以便覆盖不同稀土的更多的激光带,这大大地扩大了波长的扫描范围,并且能够同时检测各种气体。 可以向系统添加新的增益路径,以进一步扩大波长的扫描范围。 因此,本发明具有很强的可扩展性。