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    • 7. 发明申请
    • Nanotube-on-gate fet structures and applications
    • 纳米管对门结构和应用
    • US20050056877A1
    • 2005-03-17
    • US10811373
    • 2004-03-26
    • Thomas RueckesBrent SegalBernhard VogeliDarren BrockVenkatachalam JaiprakashClaude Bertin
    • Thomas RueckesBrent SegalBernhard VogeliDarren BrockVenkatachalam JaiprakashClaude Bertin
    • G11C13/02G11C16/04G11C23/00H01L27/108H01L29/06H01L29/423H01L29/76H01L29/94H01L31/119H01L51/00
    • H01L51/055B82Y10/00G11C13/025G11C16/0416G11C23/00G11C2213/17H01L29/0665H01L29/0673H01L29/42324H01L51/0048H01L51/0052
    • Nanotube on gate FET structures and applications of such, including n2 crossbars requiring only 2n control lines. A non-volatile transistor device includes a source region and a drain region of a first semiconductor type of material and a channel region of a second semiconductor type of material disposed between the source and drain region. A gate structure is made of at least one of semiconductive or conductive material and is disposed over an insulator over the channel region. A control gate is made of at least one of semiconductive or conductive material. An electromechanically-deflectable nanotube switching element is in fixed contact with one of the gate structure and the control gate structure and is not in fixed contact with the other of the gate structure and the control gate structure. The device has a network of inherent capacitances, including an inherent capacitance of an undeflected nanotube switching element in relation to the gate structure. The network is such that the nanotube switching element is deflectable into contact with the other of the gate structure and the control gate structure in response to signals being applied to the control gate and one of the source region and drain region. Certain embodiments of the device have an area of about 4 F2. Other embodiments include a release line is positioned in spaced relation to the nanotube switching element, and having a horizontal orientation that is parallel to the orientation of the source and drain diffusions. Other embodiments provide an n2 crossbar array having n2 non-volatile transistor devices, but require only 2n control lines.
    • 纳米管栅极FET结构及其应用,包括仅需要2n条控制线的n <2条交叉点。 非挥发性晶体管器件包括第一半导体类型的材料的源极区域和漏极区域以及设置在源极和漏极区域之间的第二半导体类型的材料的沟道区域。 栅极结构由半导体或导电材料中的至少一种制成,并且设置在沟道区域上方的绝缘体上。 控制门由半导体或导电材料中的至少一种制成。 机电偏转型纳米管开关元件与栅极结构和控制栅极结构中的一个固定接触,并且不与栅极结构和控制栅极结构中的另一个固定接触。 该器件具有固有电容的网络,包括相对于栅极结构的未折射的纳米管开关元件的固有电容。 网络使得纳米管开关元件响应于施加到控制栅极和源极区域和漏极区域之一的信号而偏转成与栅极结构和控制栅极结构中的另一个接触。 该装置的某些实施例具有约4F 2的面积。 其他实施例包括释放线与纳米管开关元件间隔开定位,并且具有平行于源极和漏极扩散的取向的水平取向。 其他实施例提供了具有n 2个非易失性晶体管器件的n <2>交叉开关阵列,但是仅需要2n个控制线。
    • 10. 发明申请
    • Sensor platform using a horizontally oriented nanotube element
    • 传感器平台采用水平取向的纳米管元件
    • US20060237805A1
    • 2006-10-26
    • US11333426
    • 2006-01-17
    • Brent SegalThomas RueckesBernhard VogeliDarren BrockVenkatachalam JaiprakashClaude Bertin
    • Brent SegalThomas RueckesBernhard VogeliDarren BrockVenkatachalam JaiprakashClaude Bertin
    • H01L21/00B32B5/02
    • G01N27/4146B82Y15/00G11C13/025Y10S977/902Y10S977/904Y10S977/92Y10S977/921Y10S977/922Y10S977/924Y10T29/43Y10T29/49082
    • Sensor platforms and methods of making them are described, and include platforms having horizontally oriented sensor elements comprising nanotubes or other nanostructures, such as nanowires. Under certain embodiments, a sensor element has an affinity for an analyte. Under certain embodiments, such a sensor element comprises one or more pristine nanotubes, and, under certain embodiments, it comprises derivatized or functionalized nanotubes. Under certain embodiments, a sensor is made by providing a support structure; providing a collection of nanotubes on the structure; defining a pattern within the nanotube collection; removing part of the collection so that a patterned collection remains to form a sensor element; and providing circuitry to electrically sense the sensor's electrical characterization. Under certain embodiments, the sensor element comprises pre-derivatized or pre-functionalized nanotubes. Under certain embodiments, sensor material is derivatized or functionalized after provision on the structure or after patterning. Under certain embodiments, a large-scale array includes multiple sensors.
    • 描述了传感器平台及其制造方法,并且包括具有包括纳米管或其他纳米结构(例如纳米线)的水平定向的传感器元件的平台。 在某些实施方案中,传感器元件对分析物具有亲和力。 在某些实施方案中,这种传感器元件包括一个或多个原始纳米管,并且在某些实施方案中,其包含衍生化或官能化的纳米管。 在某些实施例中,通过提供支撑结构来制造传感器; 在结构上提供纳米管的集合; 定义纳米管集合内的图案; 去除部分集合,使得图案化的集合保持形成传感器元件; 以及提供用于电感测传感器电特性的电路。 在某些实施方案中,传感器元件包括预衍生的或预功能化的纳米管。 在某些实施方案中,传感器材料在提供在结构上或在图案化之后被衍生化或官能化。 在某些实施例中,大规模阵列包括多个传感器。