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    • 7. 发明授权
    • Three terminal magnetic sensing devices having base lead layers in-plane with collector substrate materials and methods of making the same
    • 具有与集电体基板材料在一起的基极引线层的三端子磁感测装置及其制造方法
    • US07635599B2
    • 2009-12-22
    • US11239178
    • 2005-09-29
    • Robert E. Fontana, Jr.Jui-Lung LiJeffrey S. LilleSergio Nicoletti
    • Robert E. Fontana, Jr.Jui-Lung LiJeffrey S. LilleSergio Nicoletti
    • H01L21/00
    • G11B5/398B82Y10/00B82Y25/00G01R33/093G11B5/3903H01L29/66984
    • Three terminal magnetic sensing devices (TTMs) having base lead layers in-plane with collector substrate materials, and methods of making the same, are disclosed. In one illustrative example, a collector substrate having an elevated region and a recessed region adjacent the elevated region is provided. An insulator layer is formed in full-film over the collector substrate, and a base lead layer is formed in full-film over the insulator layer and in-plane with semiconductor materials of the elevated region. The insulator materials and the base lead materials that are formed over the elevated region are removed. A sensor stack structure having an emitter region and a base region is then formed over the elevated region such that part of the base region is formed over an end of the base lead layer. A base conductive via may be formed to contact base lead materials of the base lead layer at a suitable distance away from the sensor stack structure. Advantageously, the base conductive via formation may occur without causing damage to the sensor stack structure. Also, the base lead layer is formed in the recessed region of the collector substrate prior to the formation of the sensor stack structure such that the TTM may be entirely in-situ manufactured. Furthermore, the trackwidth of the TTM may be defined directly by the elevated region of the collector substrate. The TTM is suitable for incorporation into nanoscale devices which increase areal recording densities, therefore aiding the revolution in magnetic storage.
    • 公开了具有与集电器基板材料在一起的基极引线层的三端子磁感测装置(TTM)及其制造方法。 在一个说明性示例中,提供了具有升高区域和与升高区域相邻的凹陷区域的收集器基板。 在集电体基板上形成绝缘体层,并且在绝缘体层上形成基极引线层,并且与升高区域的半导体材料在同一平面内形成基极引线层。 去除在升高区域上形成的绝缘体材料和基底引线材料。 然后在升高的区域上形成具有发射极区域和基极区域的传感器堆叠结构,使得基极区域的一部分形成在基极引线层的一端上。 可以形成基底导电通孔,以在离传感器堆叠结构适当的距离处接触基底引线层的基底引线材料。 有利地,可以在不会对传感器堆叠结构造成损害的情况下发生基底导电通孔形成。 此外,在形成传感器堆叠结构之前,基极引线层形成在集电体基板的凹陷区域中,使得TTM可以完全原位制造。 此外,TTM的轨道宽度可以由收集器基板的升高区域直接定义。 TTM适合纳入纳米级器件,增加面积记录密度,从而有助于磁存储的革命。
    • 9. 发明授权
    • Thin film inductor with integrated gaps
    • 具有集成间隙的薄膜电感器
    • US08102236B1
    • 2012-01-24
    • US12968118
    • 2010-12-14
    • Robert E. Fontana, Jr.William J. GallagherPhilipp HergetBucknell C. Webb
    • Robert E. Fontana, Jr.William J. GallagherPhilipp HergetBucknell C. Webb
    • H01F5/00
    • H01F17/0006H01F3/14
    • A thin film inductor according to one embodiment includes one or more arms; one or more conductors passing through each arm; a first ferromagnetic yoke wrapping partially around the one or more conductors in a first of the one or more arms, the first ferromagnetic yoke comprising a magnetic top section, a magnetic bottom section, and via regions positioned on opposites sides of the one or more conductors in the first of the one or more arms, wherein the magnetic top section and magnetic bottom section are coupled together through a low reluctance path in the via regions; and one or more non-magnetic gaps between the top section and the bottom section in at least one of the via regions. Additional systems and methods are also provided.
    • 根据一个实施例的薄膜电感器包括一个或多个臂; 穿过每个臂的一个或多个导体; 所述第一铁磁磁轭围绕所述一个或多个臂中的第一个中的所述一个或多个导体包围,所述第一铁磁轭包括磁性顶部,磁性底部部分和位于所述一个或多个导体的相​​对侧上的通孔区域 在一个或多个臂中的第一个中,其中磁性顶部部分和磁性底部部分通过通孔区域中的低磁阻路径耦合在一起; 以及在至少一个通孔区域中的顶部和底部之间的一个或多个非磁性间隙。 还提供了附加的系统和方法。