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    • 1. 发明授权
    • FIB based open via analysis and repair
    • FIB基于开放式分析和修复
    • US07786436B1
    • 2010-08-31
    • US12005086
    • 2007-12-21
    • Theodore R. LundquistKetan ShahTamayasu AnayamaMark A. Thompson
    • Theodore R. LundquistKetan ShahTamayasu AnayamaMark A. Thompson
    • G01R31/304
    • G01R31/307G01R31/2853H01L22/12
    • An improved method, apparatus, and control/guiding software for localizing, characterizing, and correcting defects in integrated circuits, particularly open or resistive contact/via defects and metal bridging defects, using FIB technology. An apparatus for identifying an abnormal discontinuity in a contact/via in an integrated circuit comprising a focused ion beam system to scan the ion beam over the contact/via to do remove or deposit via material, a detector to collect a secondary particle signal from the contact/via material that gets removed, a sub-system for storing the secondary particle signal from the contact/via in time as well as x-y scan position, a sub-system for correlating secondary particle signals and identifying discontinuities in the correlated secondary particle signals, a sub-system for optimizing the display of the abnormal discontinuity; and a computer to implement software aspects of the system.
    • 一种改进的方法,装置和控制/指导软件,用于使用FIB技术来定位,表征和校正集成电路中的缺陷,特别是开路或电阻性接触/通孔缺陷和金属桥接缺陷。 一种用于识别集成电路中的接触/通孔中的异常不连续性的装置,包括:聚焦离子束系统,用于扫描接触/通孔上的离子束,以去除或沉积经由材料;检测器,用于从 接触/通过材料,用于在接触/通过时间以及xy扫描位置存储二次粒子信号的子系统,用于关联二次粒子信号和识别相关次级粒子信号中的不连续性的子系统 ,用于优化异常不连续显示的子系统; 和计算机来实现系统的软件方面。
    • 5. 发明授权
    • Nut cracking apparatus
    • 螺母开裂装置
    • US06035772A
    • 2000-03-14
    • US396498
    • 1999-09-14
    • Mark A. Thompson
    • Mark A. Thompson
    • A23N5/00A23N5/02
    • A23N5/00
    • An apparatus for cracking nuts is disclosed which employs a striker mechanism to apply a sharp force to the shell of a nut in order to fracture it. The nut is held in a chamber consisting of an anvil and a cup, with a spring-loaded striker being cocked and released by the single motion of a lever. In the lever's normal raised state, the anvil and cup are separated to allow for insertion of the uncracked nut. As the lever is lowered, the anvil is gently closed down upon the nut to secure it with a light force between the anvil and the cup. As the lever continues its travel downward, the striker is cocked and released, imparting an impulse force on the cup and the nut, thereby cracking the shell of the nut with a predetermined force independent of the size of the nut. A fragment shield integral to the lever is lowered into place along either side of the cracking chamber as the lever is lowered, providing a simple and reliable safety mechanism. The shell, shards, and nut meat are directed to a catch bowl below the cracking chamber as the lever is raised and as the anvil releases the cracked nut.
    • 公开了一种用于破裂螺母的装置,其采用撞击机构将螺旋力施加到螺母的外壳上以使其断裂。 螺母被保持在由砧座和杯子组成的腔室中,弹簧加载的撞针被起动并通过杆的单个动作释放。 在杠杆的正常升高状态下,砧座和杯子分开以允许插入未裂缝的螺母。 当杠杆下降时,将砧座轻轻地关闭在螺母上,以在砧座和杯子之间的轻微力量固定它。 当杠杆继续向下行进时,撞击器被起动和释放,在杯和螺母上施加冲击力,从而以与螺母尺寸无关的预定力破坏螺母的外壳。 当杠杆下降时,与杠杆整合的碎片屏蔽层在裂解室的任一侧下降到位,提供简单可靠的安全机构。 当杠杆升起时,壳,碎片和坚果肉被引导到裂解室下面的捕获碗中,并且随着砧座释放破裂的螺母。
    • 7. 发明申请
    • Method and system for communicating status in a service queue
    • 用于在服务队列中传达状态的方法和系统
    • US20090286559A1
    • 2009-11-19
    • US12152757
    • 2008-05-15
    • Jonathan P. JanasMark A. Thompson
    • Jonathan P. JanasMark A. Thompson
    • H04Q7/20
    • G06Q30/02
    • A queuing system to notify customers of the status of requested service includes an input terminal operated by a service advisor. The service advisor communicates with each customer, and enters service parameters for customer service. The service advisor's input terminal is coupled by a computer network to a remote server which computes service completion data. The queuing system includes a display monitor coupled to the remote server by the computer network to display queue status in a customer waiting area. Notifications can also be sent via email or text message to a customer's mobile wireless device. Also disclosed is a method for informing customers of queue status that displays a service status on a display monitor in a waiting room, and which optionally transmits service status to a customer's mobile wireless device or networked computer.
    • 通知客户所要求服务状态的排队系统包括由服务顾问操作的输入终端。 服务顾问与每个客户进行通信,并输入客户服务的服务参数。 服务顾问的输入终端由计算机网络耦合到计算服务完成数据的远程服务器。 排队系统包括由计算机网络耦合到远程服务器的显示监视器,以在客户等待区域中显示队列状态。 通知也可以通过电子邮件或短信发送给客户的移动无线设备。 还公开了一种用于向客户通知在等待室中的显示监视器上显示服务状态的队列状态的方法,并且可选地向客户的移动无线设备或联网计算机传送服务状态。
    • 8. 发明授权
    • Method and apparatus for forming a cavity in a semiconductor substrate using a charged particle beam
    • 使用带电粒子束在半导体衬底中形成空腔的方法和装置
    • US06855622B2
    • 2005-02-15
    • US10160606
    • 2002-05-30
    • Erwan Le RoyMark A. Thompson
    • Erwan Le RoyMark A. Thompson
    • H01J37/30H01J37/305H01L21/263H01L21/265H01L21/3065H01L21/311H01L21/425
    • H01J37/3005H01J37/228H01J37/3056H01J2237/2482H01J2237/30455H01J2237/31737H01J2237/3174H01J2237/31744H01L21/2633H01L21/26506H01L21/3065H01L21/31105
    • Apparatus and method for exposing a selected feature of an integrated circuit device such as a selected portion of the metallization layer, from the backside of the integrated circuit substrate without disturbing adjacent features of the device such as the active semiconductor regions. This is performed using an FIB (focused ion beam) etching process in conjunction with observation by an optical microscope to form a trench through the substrate. The floor of the trench is formed so as to be as smooth and planar as possible, thereby preventing undesirable exposure of the underlying active regions through any unknown or undesired cavity caused by scratches or pits or a deeper than desired sidewall. The smoothness and planarity of the floor of the trench is established by, prior to forming the trench, removing any surface defect initially present by using an FIB etching without use of assist gas to eliminate most scratches or impurities on the surface of the silicon, followed by removal of implanted ions using a gas-injected assisted FIB etch. Then the actual trench is formed using an assisted etch using a more aggressive injected gas.
    • 用于从集成电路衬底的背面暴露诸如金属化层的选定部分的集成电路器件的选定特征的装置和方法,而不干扰诸如有源半导体区域的器件的相邻特征。 这是通过FIB(聚焦离子束)蚀刻工艺结合光学显微镜的观察来进行的,以通过衬底形成沟槽。 沟槽的底部形成为尽可能平坦和平坦,从而防止潜在的有源区域通过由划痕或凹坑或更深于期望的侧壁引起的任何未知或不期望的空腔的不希望的暴露。 通过在形成沟槽之前,通过使用FIB蚀刻而不使用辅助气体来除去最初存在的任何表面缺陷,以消除硅表面上的大多数划痕或杂质,建立沟槽底板的平滑度和平坦度,随后 通过使用气体注入的辅助FIB蚀刻去除注入的离子。 然后使用更积极的注入气体的辅助蚀刻形成实际沟槽。