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    • 1. 发明授权
    • Proximity detecting apparatus
    • 近似检测装置
    • US5099227A
    • 1992-03-24
    • US453271
    • 1989-12-18
    • Theodore D. GeiszlerDale Lindseth
    • Theodore D. GeiszlerDale Lindseth
    • G06K7/00G06K7/08G07C9/00H02J17/00H04B1/59H04B5/00
    • G06K7/10326G06K7/0008G06K7/10336G07C9/00111
    • A proximity detection system which combines the advantages of an electrostatic (electric) field coupling mechanism with those of an electromagnetic coupling mechanism in order to overcome the disadvantages of the respective individual coupling mechanisms. The system includes a coded tag which is excited with an induction field, i.e., by using an electromagnetic coupling mechanism as has been done in the past in such proximity identification systems, but which transmits stored data back to the receiver using both an electric field coupling mechanism and an electromagnetic field coupling mechanism. The receiver, in turn, is provided with a novel preamplifier circuit arrangement, so that it can simultaneously receive signals via either or both of these coupling mechanisms.
    • 一种接近检测系统,其结合了静电(电)场耦合机构与电磁耦合机构的优点,以克服各个单独耦合机构的缺点。 该系统包括用感应场激励的编码标签,即通过使用如在过去这样的接近识别系统中已经完成的电磁耦合机制,但是使用电场耦合来将存储的数据发送回接收机 机制和电磁场耦合机制。 接收器又被提供有新颖的前置放大器电路装置,使得其可以通过这些耦合机构中的任一个或两者同时接收信号。
    • 3. 发明授权
    • Wafer prealigner with phase sensitive detection
    • 晶圆预对准器具有相敏检测
    • US06728596B1
    • 2004-04-27
    • US10268376
    • 2002-10-09
    • Dale Lindseth
    • Dale Lindseth
    • B65G4700
    • H01L21/681Y10S414/136
    • The system and method herein provide a prealigner that has reduced sensitivity to distorting ambient light influences in the environment of a prealigner integrated in a metrology apparatus. A modulated signal is produced by a photo detector in response to modulated light that is partially shielded by wafer positioned in a gap between light source and detector. The pulsed signal is bandpass filtered and demodulated whereby only the difference between high- and low-levels of the pulsed signal are recognized. Flickering and DC components related to ambient light and other distorting operational influences are removed from the analysis unrecognized. Demodulation is synchronously accomplished together with a switching of the light source's power supply. For stable voltage levels of the power supply, a current source is buffered during off-intervals for a constant load on the current source. Also a power steering switch samples the buffers voltage level and takes it as switching condition for the next on-interval of the power supply. Preferably a switched capacitor building block is used as synchronizing element. A final analog output signal is prepared for sampling.
    • 本文的系统和方法提供了一种预定值器,其对集成在计量装置中的预对准器的环境中的环境光影响的变形具有降低的灵敏度。 响应于由位于光源和检测器之间的间隙中的晶片部分屏蔽的调制光,由光电检测器产生调制信号。 脉冲信号被带通滤波和解调,从而仅识别脉冲信号的高电平和低电平之间的差。 与环境光和其他扭曲的操作影响有关的闪烁和直流分量从未被识别的分析中去除。 解调与光源电源的切换同步完成。 对于电源的稳定电压电平,电流源在电流源的恒定负载的关断间隔期间进行缓冲。 另外,动力转向开关对缓冲器电压电平进行采样,并将其作为电源下一个间隔时间的开关条件。 优选地,开关电容器构建块用作同步元件。 准备最终的模拟输出信号进行采样。
    • 5. 发明授权
    • Digital detector data communication in an optical metrology tool
    • 光学测量工具中的数字检测器数据通信
    • US06867870B1
    • 2005-03-15
    • US10262722
    • 2002-10-02
    • Mihail MihaylovDale Lindseth
    • Mihail MihaylovDale Lindseth
    • G01B11/24
    • G01B11/24
    • A detector network for an optical metrology system includes an analog to digital converter for each photodetector or detector array. Each analog to digital converter is connected to provide digitally encoded output from its associated detector. Each analog to digital converter is also connected to a hub. The hub receives commands from a processor and distributes them to the analog to digital converters. The converters sample the output of their associated detectors and return the digitized results to the hub. In turn, the hub passes the digitized results to the processor for analysis.
    • 用于光学测量系统的检测器网络包括用于每个光电检测器或检测器阵列的模数转换器。 每个模数转换器被连接以从其相关联的检测器提供数字编码的输出。 每个模数转换器也连接到集线器。 集线器从处理器接收命令并将其分配给模数转换器。 转换器对其相关检测器的输出进行采样,并将数字化结果返回到集线器。 反过来,集线器将数字化结果传递给处理器进行分析。