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    • 2. 发明授权
    • Deflection electromagnet for a charged particle device
    • 用于充电颗粒装置的偏转电极
    • US5111173A
    • 1992-05-05
    • US578790
    • 1990-09-07
    • Tetsuya MatsudaShunji YamamotoTadatoshi YamadaToshie Ushijima
    • Tetsuya MatsudaShunji YamamotoTadatoshi YamadaToshie Ushijima
    • G21K1/093H05H7/04H05H13/04
    • H05H7/04
    • Semicircular superconducting deflection magnets for deflecting electron beams along a semiconductor orbit. The magnet 1 comprises a pair of race-track shaped main coils 2 and 3 disposed symmetrically with respect to the plane of the orbit S. Each one of the main coils 2 and 3 is divided into two parts 21 and 22 or 31 and 32, the end portions 21a and 22a or 31a and 32a being displaced from each other in the direction of the orbit S, so that the magnetomotive force thereof is distributed evenly along the orbit S (FIGS. 12 through 14). According to another aspect, rectangular cancellation coils 25, 26, 35, and 36 are provided at the end portions 21a, 22a, 31a, and 32a, respectively, of the coil parts 21, 22, 31, and 32, such that the magnetomotive force of each one of the end portions is cancelled by the magnetomotive force of the adjacent parallel running side of a cancellation coil (FIGS. 21 through 23). According to still another aspect, sextupole correction coils 5 are disposed near the end portions 2a of the main coils 2 along the orbit S.
    • 半导体超导偏转磁体,用于沿半导体轨道偏转电子束。 磁体1包括相对于轨道S的平面对称设置的一对赛道形状的主线圈2和3.主线圈2和3中的每一个被分成两部分21和22或31和32, 端部21a,22a或31a,32a在轨道S的方向上彼此偏移,使得其磁动势沿着轨道S均匀分布(图12〜图14)。 根据另一方面,矩形消除线圈25,26,35和36分别设置在线圈部分21,22,31和32的端部21a,22a,31a和32a处,使得磁动势 每个端部的力被消除线圈的相邻平行运行侧的磁通势消除(图21至23)。 根据另一方面,六极校正线圈5沿着轨道S设置在主线圈2的端部2a附近。
    • 6. 发明授权
    • Electromagnet for charged-particle apparatus
    • 充电器装置用电磁铁
    • US5117212A
    • 1992-05-26
    • US463585
    • 1990-01-11
    • Shunji YamamotoTadatoshi Yamada
    • Shunji YamamotoTadatoshi Yamada
    • H01F6/00H01F7/20H05H7/04
    • H05H7/04H01F6/00H01F7/202
    • An electromagnet for a charged-particle apparatus. The electromagnet of the first form of this invention may consist of a deflecting electromagnet comprising an iron core equipped with clamping plates having cavities through which a vacuum chamber runs. Provided in these cavities are small-sized coils using the iron core as the magnetic path and adapted to adjust the orbit for charged particles. The electromagnet of the second form of this invention consists of a deflecting electromagnet equipped with a banana-shaped principal coil whose radius of curvature is larger in its end sections than in its middle section, thereby leveling the magnetic-field distribution on the equilibrium orbit. In the electromagnet of the third form of this invention, the thickness of the iron core, surrounding the principal coil, is different at different positions along the equilibrium orbit for charged particles, thereby making it possible to obtain some desired magnetic-field distribution. The first and third forms of the electromagnet, in particular, are not restricted to a deflecting electromagnet in a charged-particle apparatus but is applicable to other types of electromagnets in a charged-particle apparatus.
    • 一种用于带电粒子装置的电磁体。 本发明第一形式的电磁体可以由偏转电磁铁组成,该偏转电磁铁包括一个铁芯,该铁芯配备有具有真空室穿过的空腔的夹板。 在这些空腔中设置有使用铁芯作为磁路并适于调整带电粒子的轨道的小尺寸线圈。 本发明第二种形式的电磁铁由一个偏转电磁铁组成,该偏转电磁铁装配有一个香蕉形主线圈,其曲率半径比其中间部分大,其平衡轨道上的磁场分布。 在本发明第三形式的电磁体中,围绕主线圈的铁芯的厚度在带电粒子的平衡轨道的不同位置是不同的,从而可以获得一些期望的磁场分布。 特别地,电磁体的第一和第三形式不限于带电粒子装置中的偏转电磁体,而是适用于带电粒子装置中的其它类型的电磁体。