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1. 发明授权

US07401516B2 Vibration gyro sensor element with cantilever vibrator extending from substrate and positioned within opening in substrate 有权
标题翻译：具有悬臂振动器的振动陀螺传感器元件，从基板延伸并定位在基板的开口内
公开(公告)号：US07401516B2
公开(公告)日：2008-07-22
申请号：US11734459
申请日：2007-04-12
申请人： Teruo Inaguma , Junichi Honda , Takashi Tamura , Kazuo Takahashi
发明人： Teruo Inaguma , Junichi Honda , Takashi Tamura , Kazuo Takahashi
IPC分类号： G01P3/02 , G01P9/00 , H01L41/08
CPC分类号： G01C19/5656
摘要： A drive electrode to which a voltage for allowing a vibrator to vibrate is applied and first and second detection electrodes extending in the longitudinal direction of the vibrator in parallel to each other are formed as the upper electrode such that the drive electrode is interposed between the first and second detection electrodes and does not contact with the detection electrodes. In the case where there is a difference between the detection signals detected in the first and second detection electrodes when a voltage is applied between the lower electrode and drive electrode to allow the vibrator to vibrate at a vertical resonance frequency, a laser light is irradiated to a desired portion of the vibrator to apply grinding operation based on detection signals detected in the first and second detection electrodes, thereby adjusting the shape of the vibrator.
摘要翻译：施加用于允许振动器振动的电压的驱动电极，并且形成作为上电极的沿振动器的纵向方向彼此平行延伸的第一和第二检测电极，使得驱动电极插入在第一和第二检测电极，并且不与检测电极接触。当在下电极和驱动电极之间施加电压以允许振动器以垂直共振频率振动时，在第一和第二检测电极中检测到的检测信号之间存在差异的情况下，将激光照射到所述振动器的期望部分基于在所述第一和第二检测电极中检测到的检测信号进行研磨操作，从而调节所述振动器的形状。

2. 发明申请

US20050241395A1 Vibration type gyrosensor device 有权
标题翻译：振动式陀螺仪器
公开(公告)号：US20050241395A1
公开(公告)日：2005-11-03
申请号：US11088480
申请日：2005-03-24
申请人： Kazuo Takahashi , Takashi Tamura , Junichi Honda , Teruo Inaguma
发明人： Kazuo Takahashi , Takashi Tamura , Junichi Honda , Teruo Inaguma
IPC分类号： G01C19/56 , G01C19/5656 , G01C19/5663 , H01L41/08 , H01L41/18 , H01L41/22 , H01L41/29 , H01L41/311
CPC分类号： G01C19/5642
摘要： Disclosed is a small-sized vibration type gyrosensor device of high sensitivity provided with a cantilevered oscillator. A cantilevered oscillator 11, provided with a lower electrode, a piezoelectric film and an upper electrode, formed on a single-crystal silicon substrate by a thin film forming process, includes, as an upper electrode, a driving electrode 6a, formed along the length of the oscillator 11 for applying the voltage for causing oscillations of the oscillator 11, and first and second detection electrodes 6b, 6c, formed on both sides of the driving electrode 6a parallel to the longitudinal direction of the oscillator, without contacting with the driving electrode 6a. With a width W0 of the driving electrode 6a, a width W1 of the first detection electrode 6b, a width W2 of the second detection electrode 6c and with W=W0+W1+W2, the condition of 0.5
摘要翻译：公开了一种具有悬臂振荡器的高灵敏度的小型振动式陀螺仪。通过薄膜形成工艺在单晶硅衬底上形成的具有下电极，压电膜和上电极的悬臂振荡器11包括沿着上电极形成的驱动电极6a，用于施加用于引起振荡器11的振荡的电压的振荡器11的长度以及形成在驱动电极6的平行于振荡器的纵向的两侧上的第一和第二检测电极6b，6c，而不接触与驱动电极6a连接。驱动电极6a的宽度W 0，第一检测电极6b的宽度W 1，第二检测电极6c的宽度W 2，W = W 0 + W 1 + W 2，条件为0.5 <（W 0 / W）<1。

3. 发明申请

US20070180910A1 METHOD OF MANUFACTURING VIBRATION GYRO SENSOR ELEMENT, VIBRATION GYRO SENSOR ELEMENT, AND METHOD OF ADJUSTING VIBRATION DIRECTION 有权
标题翻译：振动陀螺传感器元件的制造方法，振动陀螺传感器元件和调整振动方向的方法
公开(公告)号：US20070180910A1
公开(公告)日：2007-08-09
申请号：US11734459
申请日：2007-04-12
申请人： Teruo Inaguma , Junichi Honda , Takashi Tamura , Kazuo Takahashi
发明人： Teruo Inaguma , Junichi Honda , Takashi Tamura , Kazuo Takahashi
IPC分类号： G01P9/04 , G01P21/00 , G01P1/04
CPC分类号： G01C19/5656
摘要： A drive electrode to which a voltage for allowing a vibrator to vibrate is applied and first and second detection electrodes extending in the longitudinal direction of the vibrator in parallel to each other are formed as the upper electrode such that the drive electrode is interposed between the first and second detection electrodes and does not contact with the detection electrodes. In the case where there is a difference between the detection signals detected in the first and second detection electrodes when a voltage is applied between the lower electrode and drive electrode to allow the vibrator to vibrate at a vertical resonance frequency, a laser light is irradiated to a desired portion of the vibrator to apply grinding operation based on detection signals detected in the first and second detection electrodes, thereby adjusting the shape of the vibrator.
摘要翻译：施加用于允许振动器振动的电压的驱动电极，并且形成作为上电极的沿振动器的纵向方向彼此平行延伸的第一和第二检测电极，使得驱动电极插入在第一和第二检测电极，并且不与检测电极接触。当在下电极和驱动电极之间施加电压以允许振动器以垂直共振频率振动时，在第一和第二检测电极中检测到的检测信号之间存在差异的情况下，将激光照射到所述振动器的期望部分基于在所述第一和第二检测电极中检测到的检测信号进行研磨操作，从而调节所述振动器的形状。

4. 发明申请

US20060197415A1 Piezoelectric element and method for manufacturing piezoelectric element 失效
公开(公告)号：US20060197415A1
公开(公告)日：2006-09-07
申请号：US11367996
申请日：2006-03-03
申请人： Eiji Nakashio , Junichi Honda , Takashi Tamura , Koji Suzuki , Teruo Inaguma , Manabu Aizawa , Kazuo Takahashi , Tadashi Sakurai
发明人： Eiji Nakashio , Junichi Honda , Takashi Tamura , Koji Suzuki , Teruo Inaguma , Manabu Aizawa , Kazuo Takahashi , Tadashi Sakurai
IPC分类号： H01L41/00 , H04R17/00
CPC分类号： G01C19/5663 , H01L41/094 , H01L41/316 , Y10T29/42 , Y10T29/49155
摘要： There is a need for a piezoelectric element capable of improving a productivity and a yield without impairing the piezoelectric characteristic and a method for manufacturing the same. A piezoelectric element is provided with a substrate, a first electrode film disposed on the substrate, a piezoelectric film disposed on the first electrode film, and a second electrode film disposed on the piezoelectric film. The piezoelectric film has a laminated structure composed of a plurality of crystallized piezoelectric thin films. The piezoelectric film having a predetermined thickness is formed by repeated cycles of a film formation step of forming a piezoelectric thin film and a crystallization heat treatment step of heat-treating the piezoelectric thin film to effect crystallization. In this manner, a piezoelectric film exhibiting uniform crystallinity in the film thickness direction may be produced.

5. 发明授权

US07583012B2 Piezoelectric element and method for manufacturing piezoelectric element 失效
标题翻译：压电元件及其制造方法
公开(公告)号：US07583012B2
公开(公告)日：2009-09-01
申请号：US11367996
申请日：2006-03-03
申请人： Eiji Nakashio , Junichi Honda , Takashi Tamura , Koji Suzuki , Teruo Inaguma , Manabu Aizawa , Kazuo Takahashi , Tadashi Sakurai
发明人： Eiji Nakashio , Junichi Honda , Takashi Tamura , Koji Suzuki , Teruo Inaguma , Manabu Aizawa , Kazuo Takahashi , Tadashi Sakurai
IPC分类号： H01L41/08
CPC分类号： G01C19/5663 , H01L41/094 , H01L41/316 , Y10T29/42 , Y10T29/49155
摘要： There is a need for a piezoelectric element capable of improving a productivity and a yield without impairing the piezoelectric characteristic and a method for manufacturing the same. A piezoelectric element is provided with a substrate, a first electrode film disposed on the substrate, a piezoelectric film disposed on the first electrode film, and a second electrode film disposed on the piezoelectric film. The piezoelectric film has a laminated structure composed of a plurality of crystallized piezoelectric thin films. The piezoelectric film having a predetermined thickness is formed by repeated cycles of a film formation step of forming a piezoelectric thin film and a crystallization heat treatment step of heat-treating the piezoelectric thin film to effect crystallization. In this manner, a piezoelectric film exhibiting uniform crystallinity in the film thickness direction may be produced.
摘要翻译：需要能够在不损害压电特性的情况下提高生产率和产量的压电元件及其制造方法。压电元件设置有基板，设置在基板上的第一电极膜，设置在第一电极膜上的压电膜和设置在压电膜上的第二电极膜。压电薄膜具有由多个结晶化的压电薄膜构成的叠层结构。具有预定厚度的压电膜通过形成压电薄膜的成膜步骤和对压电薄膜进行热处理以结晶化的结晶热处理步骤的重复循环形成。以这种方式，可以产生在膜厚度方向上显示均匀结晶度的压电膜。

6. 发明授权

US07291511B2 Method of manufacturing vibration gyro sensor element, vibration gyro sensor element, and method of adjusting vibration direction 有权
标题翻译：制造振动陀螺传感器元件，振动陀螺仪传感器元件的方法和调整振动方向的方法
公开(公告)号：US07291511B2
公开(公告)日：2007-11-06
申请号：US11066014
申请日：2005-02-25
申请人： Teruo Inaguma , Junichi Honda , Takashi Tamura , Kazuo Takahashi
发明人： Teruo Inaguma , Junichi Honda , Takashi Tamura , Kazuo Takahashi
IPC分类号： H01L21/00 , H01L41/00
CPC分类号： G01C19/5656
摘要： A drive electrode to which a voltage for allowing a vibrator to vibrate is applied and first and second detection electrodes extending in the longitudinal direction of the vibrator in parallel to each other are formed as the upper electrode such that the drive electrode is interposed between the first and second detection electrodes and does not contact with the detection electrodes. In the case where there is a difference between the detection signals detected in the first and second detection electrodes when a voltage is applied between the lower electrode and drive electrode to allow the vibrator to vibrate at a vertical resonance frequency, a laser light is irradiated to a desired portion of the vibrator to apply grinding operation based on detection signals detected in the first and second detection electrodes, thereby adjusting the shape of the vibrator.
摘要翻译：施加用于允许振动器振动的电压的驱动电极，并且形成作为上电极的沿振动器的纵向方向彼此平行延伸的第一和第二检测电极，使得驱动电极插入在第一和第二检测电极，并且不与检测电极接触。当在下电极和驱动电极之间施加电压以允许振动器以垂直共振频率振动时，在第一和第二检测电极中检测到的检测信号之间存在差异的情况下，将激光照射到所述振动器的期望部分基于在所述第一和第二检测电极中检测到的检测信号进行研磨操作，从而调节所述振动器的形状。

7. 发明申请

US20080222865A1 PIEZOELECTRIC ELEMENT AND METHOD FOR MANUACTURING PIEZOELECTRIC ELEMENT 审中-公开
标题翻译：压电元件和制造压电元件的方法
公开(公告)号：US20080222865A1
公开(公告)日：2008-09-18
申请号：US12123109
申请日：2008-05-19
申请人： Eiji Nakashio , Junichi Honda , Takashi Tamura , Koji Suzuki , Teruo Inaguma , Manabu Aizawa , Kazuo Takahashi , Tadashi Sakurai
发明人： Eiji Nakashio , Junichi Honda , Takashi Tamura , Koji Suzuki , Teruo Inaguma , Manabu Aizawa , Kazuo Takahashi , Tadashi Sakurai
IPC分类号： H01L41/22
CPC分类号： G01C19/5663 , H01L41/094 , H01L41/316 , Y10T29/42 , Y10T29/49155
摘要： A piezoelectric element with a substrate, a first electrode film disposed on the substrate, a piezoelectric film disposed on the first electrode film, and a second electrode film disposed on the piezoelectric film, and a method of forming same. The piezoelectric film has a laminated structure composed of a plurality of crystallized piezoelectric thin films. The piezoelectric film has a predetermined thickness and is formed by repeated cycles of a film formation step of forming a piezoelectric thin film and a crystallization heat treatment step of heat-treating the piezoelectric thin film to effect crystallization.
摘要翻译：具有基板的压电元件，设置在基板上的第一电极膜，设置在第一电极膜上的压电膜和设置在压电膜上的第二电极膜及其形成方法。压电薄膜具有由多个结晶化的压电薄膜构成的叠层结构。压电膜具有预定的厚度，并且通过形成压电薄膜的成膜步骤和对压电薄膜进行热处理以进行结晶的结晶热处理步骤的重复循环形成。

8. 发明授权

US07263884B2 Vibration type gyrosensor device 有权
标题翻译：振动式陀螺仪器
公开(公告)号：US07263884B2
公开(公告)日：2007-09-04
申请号：US11088480
申请日：2005-03-24
申请人： Kazuo Takahashi , Takashi Tamura , Junichi Honda , Teruo Inaguma
发明人： Kazuo Takahashi , Takashi Tamura , Junichi Honda , Teruo Inaguma
IPC分类号： G01P3/02 , G01P9/00 , H01L41/08
CPC分类号： G01C19/5642
摘要： Disclosed is a small-sized vibration type gyrosensor device of high sensitivity provided with a cantilevered oscillator. A cantilevered oscillator 11, provided with a lower electrode, a piezoelectric film and an upper electrode, formed on a single-crystal silicon substrate by a thin film forming process, includes, as an upper electrode, a driving electrode 6a, formed along the length of the oscillator 11 for applying the voltage for causing oscillations of the oscillator 11, and first and second detection electrodes 6b, 6c, formed on both sides of the driving electrode 6a parallel to the longitudinal direction of the oscillator, without contacting with the driving electrode 6a. With a width W0 of the driving electrode 6a, a width W1 of the first detection electrode 6b, a width W2 of the second detection electrode 6c and with W=W0+W1+W2, the condition of 0.5
摘要翻译：公开了一种具有悬臂振荡器的高灵敏度的小型振动式陀螺仪。通过薄膜形成工艺在单晶硅衬底上形成的具有下电极，压电膜和上电极的悬臂振荡器11包括沿着上电极形成的驱动电极6a，用于施加用于引起振荡器11的振荡的电压的振荡器11的长度以及形成在驱动电极6的平行于振荡器的纵向的两侧上的第一和第二检测电极6b，6c，而不接触与驱动电极6a连接。驱动电极6a的宽度W 0，第一检测电极6b的宽度W 1，第二检测电极6c的宽度W 2，W = W 0 + W 1 + W 2，条件为0.5 <（W 0 / W）<1。

9. 发明申请

US20050193817A1 Method of manufacturing vibration gyro sensor element, vibration gyro sensor element, and method of adjusting vibration direction 有权
标题翻译：制造振动陀螺传感器元件，振动陀螺仪传感器元件的方法和调整振动方向的方法
公开(公告)号：US20050193817A1
公开(公告)日：2005-09-08
申请号：US11066014
申请日：2005-02-25
申请人： Teruo Inaguma , Junichi Honda , Takashi Tamura , Kazuo Takahashi
发明人： Teruo Inaguma , Junichi Honda , Takashi Tamura , Kazuo Takahashi
IPC分类号： G01C19/56 , G01C19/5656 , G01C19/5663 , G01P15/08 , H01L41/08 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/253 , H01L41/29 , H01L41/312 , H01L41/316
CPC分类号： G01C19/5656
摘要： A drive electrode to which a voltage for allowing a vibrator to vibrate is applied and first and second detection electrodes extending in the longitudinal direction of the vibrator in parallel to each other are formed as the upper electrode such that the drive electrode is interposed between the first and second detection electrodes and does not contact with the detection electrodes. In the case where there is a difference between the detection signals detected in the first and second detection electrodes when a voltage is applied between the lower electrode and drive electrode to allow the vibrator to vibrate at a vertical resonance frequency, a laser light is irradiated to a desired portion of the vibrator to apply grinding operation based on detection signals detected in the first and second detection electrodes, thereby adjusting the shape of the vibrator.
摘要翻译：施加用于允许振动器振动的电压的驱动电极，并且形成作为上电极的沿振动器的纵向方向彼此平行延伸的第一和第二检测电极，使得驱动电极插入在第一和第二检测电极，并且不与检测电极接触。当在下电极和驱动电极之间施加电压以允许振动器以垂直共振频率振动时，在第一和第二检测电极中检测到的检测信号之间存在差异的情况下，将激光照射到所述振动器的期望部分基于在所述第一和第二检测电极中检测到的检测信号进行研磨操作，从而调节所述振动器的形状。

10. 发明申请

US20110146401A1 ANGULAR VELOCITY SENSOR AND ELECTRONIC APPARATUS 审中-公开
标题翻译：角速度传感器和电子设备
公开(公告)号：US20110146401A1
公开(公告)日：2011-06-23
申请号：US12968700
申请日：2010-12-15
申请人： Teruo Inaguma , Junichi Honda , Takanori Aoto , Koki Hino , Kazuo Takahashi , Hiroshi Onuma
发明人： Teruo Inaguma , Junichi Honda , Takanori Aoto , Koki Hino , Kazuo Takahashi , Hiroshi Onuma
IPC分类号： G01C19/56
CPC分类号： G01C19/5628
摘要： Provided is an angular velocity sensor including a first vibration element, a second vibration element, and a support substrate. The first vibration element detects a first angular velocity about an axis parallel to a first direction. The second vibration element detects a second angular velocity about an axis parallel to a second direction obliquely intersecting with the first direction, and generates an output signal corresponding to a third angular velocity about an axis parallel to a third direction orthogonal to the first direction. The support substrate supports the first vibration element and the second vibration element.
摘要翻译：提供了包括第一振动元件，第二振动元件和支撑基板的角速度传感器。第一振动元件围绕平行于第一方向的轴线检测第一角速度。第二振动元件检测围绕平行于与第一方向倾斜相交的第二方向的轴的第二角速度，并且产生对应于平行于与第一方向正交的第三方向的轴的第三角速度的输出信号。支撑基板支撑第一振动元件和第二振动元件。

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