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    • 3. 发明授权
    • Method of forming protective film on plastic part for vehicle-use and apparatus
    • 在车辆用塑料件上形成保护膜的方法及装置
    • US06294227B1
    • 2001-09-25
    • US09589879
    • 2000-06-09
    • Hidetaka AnmaYoshinori Hatanaka
    • Hidetaka AnmaYoshinori Hatanaka
    • H05H124
    • H01J37/32009C23C16/30C23C16/402H01J37/32082H01J37/32541
    • A method of forming a uniform-thickness good-quality protective film with scratch-proofness and ultraviolet cutting characteristic on a plastic part having a diversified and complex three-dimensional shape without wasteful release of an organic solvent, or the like, into the atmosphere. In a plasma chemical vapor deposition apparatus, the shape of at least one part of a surface of a cathode provided in a reaction chamber is made coincident with the shape of a surface of a plastic part such as a car headlamp lens, or the like. The plastic part is attached to the cathode in the condition that the two surfaces coincident in shape come into contact with each other. High-frequency electric power is supplied between the cathode and the reaction chamber while a hydrogen gas and hexamethyldisilane (HMDS) as a raw material gas for forming a protective film are imported into the reaction chamber. Thus, a protective film is formed on the surface of the plastic part by vapor deposition.
    • 在具有多样化且复杂的三维形状的塑料部件上形成均匀厚度的优质保护膜,具有耐划伤性和紫外线切割特性的方法,而无需有机溶剂等的浪费地释放到大气中。 在等离子体化学气相沉积装置中,设置在反应室中的阴极的表面的至少一部分的形状与诸如汽车前照灯透镜等塑料部件的表面的形状一致。 在两个表面重合的表面彼此接触的情况下,塑料部分连接到阴极。 在作为保护膜形成原料气体的氢气和六甲基二硅烷(HMDS)进入反应室的同时,在阴极和反应室之间供给高频电力。 因此,通过气相沉积在塑料部件的表面上形成保护膜。