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1. 发明授权

US08759200B2 Methods and apparatus for selective epitaxy of Si-containing materials and substitutionally doped crystalline Si-containing material 有权
标题翻译：含Si材料和替代掺杂结晶含Si材料的选择性外延的方法和装置
公开(公告)号：US08759200B2
公开(公告)日：2014-06-24
申请号：US13135031
申请日：2011-06-23
申请人： Terry Arthur Francis , Satoshi Hasaka , Paul David Brabant , Robert Torres, Jr. , Hong He , Alexander Reznicek , Thomas N. Adam , Devendra K. Sadana
发明人： Terry Arthur Francis , Satoshi Hasaka , Paul David Brabant , Robert Torres, Jr. , Hong He , Alexander Reznicek , Thomas N. Adam , Devendra K. Sadana
IPC分类号： H01L21/205
CPC分类号： H01L21/02532 , C23C16/30 , C23C16/325 , C30B25/02 , C30B29/06 , H01L21/0237 , H01L21/02529 , H01L21/02573 , H01L21/02576 , H01L21/02579 , H01L21/0262 , H01L21/02636
摘要： The present invention discloses that under modified chemical vapor deposition (mCVD) conditions an epitaxial silicon film may be formed by exposing a substrate contained within a chamber to a relatively high carrier gas flow rate in combination with a relatively low silicon precursor flow rate at a temperature of less than about 550° C. and a pressure in the range of about 10 mTorr-200 Torr. Furthermore, the crystalline Si may be in situ doped to contain relatively high levels of substitutional carbon by carrying out the deposition at a relatively high flow rate using tetrasilane as a silicon source and a carbon-containing gas such as dodecalmethylcyclohexasilane or tetramethyldisilane under modified CVD conditions.
摘要翻译：本发明公开了在改进的化学气相沉积（mCVD）条件下，外延硅膜可以通过将包含在腔室内的衬底暴露于相对高的载气流量与在较低的硅前体流速小于约550℃，压力范围为约10mTorr-200Torr。此外，通过在改进的CVD条件下使用四硅烷作为硅源和含碳气体如十二烷基甲基环己硅烷或四甲基二硅烷以相对高的流速进行沉积，可以将晶体Si原位掺杂以含有相对高水平的取代碳。

2. 发明授权

US08142549B2 Purification of fluorine containing gases and systems and materials thereof 有权
标题翻译：含氟气体的净化及其系统及其材料
公开(公告)号：US08142549B2
公开(公告)日：2012-03-27
申请号：US12411646
申请日：2009-03-26
申请人： Andrew Millward , Joseph V. Vininski , Robert Torres, Jr. , Tadaharu Wantanbe , Carrie L. Wyse , Mark Raynor , Dan Davia , Praveen Jha
发明人： Andrew Millward , Joseph V. Vininski , Robert Torres, Jr. , Tadaharu Wantanbe , Carrie L. Wyse , Mark Raynor , Dan Davia , Praveen Jha
IPC分类号： B01D53/02
CPC分类号： B01D53/261 , B01D53/04 , B01D2253/102 , B01D2257/2045 , B01D2257/2066 , B01D2257/50
摘要： A method of reducing moisture in a fluorine-containing gas is described. The method may include the steps of providing a purifier material that includes elemental carbon, and flowing the unpurified fluorine-containing gas having an unpurified moisture concentration over or through the carbon-based purifier material. At least a portion of the moisture is captured in the purifier material so that a purified fluorine-containing gas that emerges downstream of the purifier material has a reduced moisture concentration that is about 50% or less of the unpurified moisture concentration.
摘要翻译：描述了一种减少含氟气体中的水分的方法。该方法可以包括以下步骤：提供包括元素碳的净化剂材料，并且将未纯化的水分浓度的未纯化的含氟气体流过碳基净化器材料。至少一部分水分被捕获在净化器材料中，使得出现在净化器材料下游的纯化的含氟气体的水分浓度降低了未经净化的水分浓度的约50％或更少。

3. 发明授权

US06824589B2 Materials and methods for the purification of inert, nonreactive, and reactive gases 有权
标题翻译：用于纯化惰性，非反应性和反应性气体的材料和方法
公开(公告)号：US06824589B2
公开(公告)日：2004-11-30
申请号：US10284423
申请日：2002-10-29
申请人： Tadaharu Watanabe , Dan Fraenkel , Robert Torres, Jr.
发明人： Tadaharu Watanabe , Dan Fraenkel , Robert Torres, Jr.
IPC分类号： B01D5302
CPC分类号： B01J20/3204 , B01D53/00 , B01D53/02 , B01J20/0218 , B01J20/0222 , B01J20/0229 , B01J20/0237 , B01J20/0251 , B01J20/0259 , B01J20/041 , B01J20/06 , B01J20/08 , B01J20/18 , B01J20/28059 , B01J20/3078 , B01J20/3236 , B01J20/3433 , B01J2220/42 , C01B3/56 , C01B23/0057 , C01B2203/042 , C01B2203/0465 , C01B2203/047 , C01B2203/0475 , C01B2203/048 , C01B2203/0485 , C01B2203/0495 , C01B2210/0031 , C01B2210/0042 , C01B2210/0045 , C01B2210/0062 , C01C1/024 , Y02C20/10
摘要： Regenerable gas purifier materials are provided capable of reducing the level of contaminants such as oxygen and water in an inert, nonreactive or reactive gas stream to parts-per-billion levels or sub-parts-per-billion levels. The purifier materials of this invention comprise a thin layer of one or more reduced forms of a metal oxide coated on the surface of a nonreactive substrate. The thin layer may further contain the completely reduced form of the metal.
摘要翻译：提供了可再生气体净化器材料，其能够将惰性，非反应性或反应性气流中的污染物，例如氧气和水的水平降低到十亿分之十或十分之一十亿的水平。本发明的净化器材料包括涂覆在非反应性基材表面上的一种或多种还原形式的金属氧化物的薄层。薄层可以进一步包含完全还原形式的金属。

4. 发明授权

US08623148B2 NF3 chamber clean additive 失效
标题翻译： NF3室清洁添加剂
公开(公告)号：US08623148B2
公开(公告)日：2014-01-07
申请号：US12878195
申请日：2010-09-09
申请人： Glenn Mitchell , Robert Torres, Jr. , Adam Seymour
发明人： Glenn Mitchell , Robert Torres, Jr. , Adam Seymour
IPC分类号： B08B9/00
CPC分类号： C23C16/4405 , H01J37/32357 , H01J37/32862
摘要： Methods of cleaning a processing chamber with nitrogen trifluoride (NF3) are described. The methods involve a concurrent introduction of nitrogen trifluoride and a reactive diluent into the chamber. The NF3 may be excited in a plasma inside the chamber or in a remote plasma region upstream from the chamber. The reactive diluent may be introduced upstream or downstream of the remote plasma such that both NF3 and the reactive diluent (and any plasma-generated effluents) are present in the chamber during cleaning. The presence of the reactive diluent enhances the chamber-cleaning effectiveness of the NF3.
摘要翻译：描述了用三氟化氮（NF 3）清洁处理室的方法。该方法涉及将三氟化氮和反应性稀释剂同时引入室中。 NF3可以在室内的等离子体中或在室的上游的远程等离子体区域中被激发。反应性稀释剂可以在远程等离子体的上游或下游引入，使得NF 3和反应性稀释剂（和任何等离子体产生的流出物）在清洁期间存在于室中。反应性稀释剂的存在增强了NF3的室清洁效果。

5. 发明授权

US07670490B2 Fluid storage and purification method and system 失效
标题翻译：流体储存和净化方法和系统
公开(公告)号：US07670490B2
公开(公告)日：2010-03-02
申请号：US11155303
申请日：2005-06-17
申请人： Carrie L. Wyse , Robert Torres, Jr. , Tadaharu Watanabe , Joseph V. Vininski
发明人： Carrie L. Wyse , Robert Torres, Jr. , Tadaharu Watanabe , Joseph V. Vininski
IPC分类号： B01D11/00
CPC分类号： F17C11/00 , B01D11/0288 , G06Q99/00 , Y10T137/0318 , Y10T137/0379 , Y10T137/0396
摘要： A method of storing and dispensing a fluid includes providing a vessel configured for selective dispensing of the fluid therefrom. The vessel contains an ionic liquid therein. The fluid is contacted with the ionic liquid for take-up of the fluid by the ionic liquid. There is substantially no chemical change in the ionic liquid and the fluid. The fluid is released from the ionic liquid and dispensed from the vessel.
摘要翻译：存储和分配流体的方法包括提供构造用于从其中选择性地分配流体的容器。容器中含有离子液体。流体与离子液体接触，用于通过离子液体吸收流体。离子液体和流体基本上没有化学变化。流体从离子液体中释放并从容器中分配。

6. 发明授权

US07553355B2 Methods and materials for the reduction and control of moisture and oxygen in OLED devices 失效
标题翻译：用于减少和控制OLED器件中水分和氧气的方法和材料
公开(公告)号：US07553355B2
公开(公告)日：2009-06-30
申请号：US10875671
申请日：2004-06-23
申请人： Robert Torres, Jr. , Tadaharu Watanabe , Joseph V. Vininski
发明人： Robert Torres, Jr. , Tadaharu Watanabe , Joseph V. Vininski
IPC分类号： B01D53/00
CPC分类号： B01J20/06 , B01J20/0259 , B01J20/08 , B01J20/223 , B01J20/26 , B01J20/261 , B01J20/264 , B01J20/265 , B01J20/267 , B01J20/28004 , B01J20/28016 , B01J20/2803 , B01J20/28035 , B01J20/28057 , B01J20/3042 , B01J20/3204 , B01J20/321 , B01J20/3223 , B01J20/3234 , B01J20/3236 , B01J20/3265 , B01J20/3293 , B01J20/3297 , B01J2220/46 , B01J2220/49 , H01L23/26 , H01L51/5246 , H01L51/5259 , H01L2924/0002 , H01L2924/12044 , H01L2924/00
摘要： Novel uses and methods of use for inorganic and macroreticulate polymer bonding to metals to control moisture and oxygen in OLED, and other like devices, are provided. Materials having color change capacity are also provided for the removal of moisture from an OLED, where the material changes color upon reaching its capacity and thereby signals the user that the OLED is no longer protected from moisture damage.
摘要翻译：提供了用于无机和大理石聚合物粘合金属以控制OLED和其它类似装置中的水分和氧气的新用途和使用方法。还提供具有变色能力的材料用于从OLED去除水分，其中材料在达到其容量时改变颜色，从而向用户发出指示，OLED不再受保护而不受水分损害。

7. 发明授权

US07387663B2 Method and system for supplying high purity fluid 失效
标题翻译：供应高纯度流体的方法和系统
公开(公告)号：US07387663B2
公开(公告)日：2008-06-17
申请号：US11082482
申请日：2005-03-17
申请人： Tadaharu Watanabe , Robert Torres, Jr. , Joseph Vininski
发明人： Tadaharu Watanabe , Robert Torres, Jr. , Joseph Vininski
IPC分类号： B01D53/04
CPC分类号： F17C9/00 , B01D53/02 , B01J4/04 , C23C16/4402 , F17C5/00 , F17C6/00 , F17C7/00 , F17C13/026 , F17C2201/0104 , F17C2201/032 , F17C2203/0617 , F17C2205/0149 , F17C2205/0314 , F17C2205/0317 , F17C2205/0323 , F17C2205/0332 , F17C2205/0335 , F17C2205/0341 , F17C2205/0391 , F17C2221/05 , F17C2250/0631 , F17C2265/012 , Y02E60/321
摘要： A fluid purifying apparatus that includes a manifold that includes a first branch and a second branch, a first check valve coupled to the first branch of the manifold, and a purifier unit that includes a first end and a second end, wherein the first end is coupled to the second branch of the manifold. Also, a fluid purifying apparatus that includes a vessel that includes a first interior compartment for containing a purifier material and a second interior compartment for containment of a fluid containing impurities, wherein the first interior compartment is separated from the second interior compartment by a fluid permeable support, and a rupturable seal.
摘要翻译：一种流体净化装置，包括：歧管，包括第一分支和第二分支;第一止回阀，其联接到所述歧管的第一分支;以及净化器单元，其包括第一端和第二端，其中所述第一端为耦合到歧管的第二分支。此外，一种流体净化装置，其包括容器，该容器包括用于容纳净化剂材料的第一内部隔室和用于容纳含有杂质的流体的第二内部隔室，其中所述第一内部隔室与所述第二内部隔室分离，支持和可破裂的印章。

8. 发明授权

US08137438B2 Methods and materials for the reduction and control of moisture and oxygen in OLED devices 失效
标题翻译：用于减少和控制OLED器件中水分和氧气的方法和材料
公开(公告)号：US08137438B2
公开(公告)日：2012-03-20
申请号：US13023786
申请日：2011-02-09
申请人： Robert Torres, Jr. , Tadaharu Watanabe , Joseph V. Vininski
发明人： Robert Torres, Jr. , Tadaharu Watanabe , Joseph V. Vininski
IPC分类号： B01D53/04
CPC分类号： B01J20/06 , B01J20/0259 , B01J20/08 , B01J20/223 , B01J20/26 , B01J20/261 , B01J20/264 , B01J20/265 , B01J20/267 , B01J20/28004 , B01J20/28016 , B01J20/2803 , B01J20/28035 , B01J20/28057 , B01J20/3042 , B01J20/3204 , B01J20/321 , B01J20/3223 , B01J20/3234 , B01J20/3236 , B01J20/3265 , B01J20/3293 , B01J20/3297 , B01J2220/46 , B01J2220/49 , H01L23/26 , H01L51/5246 , H01L51/5259 , H01L2924/0002 , H01L2924/12044 , H01L2924/00
摘要： Embodiments of the invention provide an electronic device which may include an interior compartment housing at least one electronic component that may be reactive to target impurities. The electronic component may include at least a cathode and an anode. A purifier material may be interspersed within a conducting polymer layer between the cathode and the anode. The purifier material may decrease target impurities within the interior compartment of the electronic device from a first level to a second level.
摘要翻译：本发明的实施例提供一种电子设备，其可以包括容纳至少一个可能与目标杂质反应的电子部件的内部隔室。电子部件可以至少包括阴极和阳极。净化器材料可以散布在阴极和阳极之间的导电聚合物层内。净化器材料可以将电子设备的内部隔间内的目标杂质从第一级降低到第二级。

9. 发明授权

US07938968B2 Fluid storage and purification method 失效
标题翻译：流体储存和净化方法
公开(公告)号：US07938968B2
公开(公告)日：2011-05-10
申请号：US12050472
申请日：2008-03-18
申请人： Carrie L. Wyse , Robert Torres, Jr. , Tadaharu Watanabe , Joseph V. Vininski
发明人： Carrie L. Wyse , Robert Torres, Jr. , Tadaharu Watanabe , Joseph V. Vininski
IPC分类号： B01D15/00 , B09B5/00
CPC分类号： F17C11/00 , B01D11/0288 , G06Q99/00 , Y10T137/0318 , Y10T137/0379 , Y10T137/0396
摘要： A method of storing and dispensing a fluid includes providing a vessel configured for selective dispensing of the fluid therefrom. The vessel contains an ionic liquid therein. The fluid is contacted with the ionic liquid for take-up of the fluid by the ionic liquid. There is substantially no chemical change in the ionic liquid and the fluid. The fluid is released from the ionic liquid and dispensed from the vessel.
摘要翻译：存储和分配流体的方法包括提供构造用于从其中选择性地分配流体的容器。容器中含有离子液体。流体与离子液体接触，用于通过离子液体吸收流体。离子液体和流体基本上没有化学变化。流体从离子液体中释放并从容器中分配。

10. 发明授权

US07752892B2 Leak characterization apparatuses and methods for fluid storage containers 失效
标题翻译：流体储存容器的泄漏表征装置和方法
公开(公告)号：US07752892B2
公开(公告)日：2010-07-13
申请号：US11470868
申请日：2006-09-07
申请人： Stuart Muller , Robert Torres, Jr.
发明人： Stuart Muller , Robert Torres, Jr.
IPC分类号： G01M3/04
CPC分类号： G01M3/229
摘要： According to the invention, an apparatus to characterize leaks in a fluid storage container is disclosed. The apparatus may include a valve coupler, a gas manifold and a processor. The valve coupler may couple the apparatus with a closed valve on the fluid storage container. The gas manifold may be coupled with the valve coupler and may include a first branch connected with a gas monitoring device. The gas monitoring device may scan for a plurality of gases that may be emitted by the closed valve of the fluid storage container. The processor may be operable to receive gas monitoring device data representing masses for one or more of the plurality of gases detected by the monitor.
摘要翻译：根据本发明，公开了一种用于表征流体储存容器中泄漏的装置。该装置可以包括阀联接器，气体歧管和处理器。阀联接器可将装置与液体储存容器上的封闭阀联接。气体歧管可以与阀联接器联接，并且可以包括与气体监测装置连接的第一分支。气体监测装置可以扫描可由流体储存容器的封闭阀发射的多种气体。处理器可以可操作地接收表示由监视器检测到的多个气体中的一个或多个气体的质量的气体监测装置数据。

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