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    • 1. 发明申请
    • Semiconductor Devices, Assemblies And Constructions
    • 半导体器件,组件和结构
    • US20110316091A1
    • 2011-12-29
    • US13224804
    • 2011-09-02
    • Ted TaylorXiawan Yang
    • Ted TaylorXiawan Yang
    • H01L27/088
    • H01L21/76283
    • Embodiments disclosed herein include methods in which a pair of openings are formed into semiconductor material, with the openings being spaced from one another by a segment of the semiconductor material. Liners are formed along sidewalls of the openings, and then semiconductor material is isotropically etched from bottoms of the openings to merge the openings and thereby completely undercut the segment of semiconductor material. Embodiments disclosed herein may be utilized in forming SOI constructions, and in forming field effect transistors having transistor gates entirely surrounding channel regions. Embodiments disclosed herein also include semiconductor constructions having transistor gates surrounding channel regions, as well as constructions in which insulative material entirely separates an upper semiconductor material from a lower semiconductor material.
    • 本文公开的实施例包括其中一对开口形成为半导体材料的方法,其中开口通过半导体材料的部分彼此间隔开。 衬套沿着开口的侧壁形成,然后半导体材料从开口的底部被各向同性地蚀刻以合并开口,从而完全地切割半导体材料段。 本文公开的实施例可以用于形成SOI结构,并且在形成具有完全围绕通道区域的晶体管栅极的场效应晶体管中。 本文公开的实施例还包括具有围绕通道区域的晶体管栅极的半导体结构以及其中绝缘材料将上半导体材料与下半导体材料完全分离的结构。
    • 2. 发明授权
    • Semiconductor devices, assemblies and constructions
    • 半导体器件,组件和结构
    • US08791506B2
    • 2014-07-29
    • US13224804
    • 2011-09-02
    • Ted TaylorXiawan Yang
    • Ted TaylorXiawan Yang
    • H01L27/118H01L29/80
    • H01L21/76283
    • Embodiments disclosed herein include methods in which a pair of openings are formed into semiconductor material, with the openings being spaced from one another by a segment of the semiconductor material. Liners are formed along sidewalls of the openings, and then semiconductor material is isotropically etched from bottoms of the openings to merge the openings and thereby completely undercut the segment of semiconductor material. Embodiments disclosed herein may be utilized in forming SOI constructions, and in forming field effect transistors having transistor gates entirely surrounding channel regions. Embodiments disclosed herein also include semiconductor constructions having transistor gates surrounding channel regions, as well as constructions in which insulative material entirely separates an upper semiconductor material from a lower semiconductor material.
    • 本文公开的实施例包括其中一对开口形成为半导体材料的方法,其中开口通过半导体材料的部分彼此间隔开。 衬套沿着开口的侧壁形成,然后半导体材料从开口的底部被各向同性地蚀刻以合并开口,从而完全地切割半导体材料段。 本文公开的实施例可以用于形成SOI结构,并且在形成具有完全围绕通道区域的晶体管栅极的场效应晶体管中。 本文公开的实施例还包括具有围绕通道区域的晶体管栅极的半导体结构以及其中绝缘材料将上半导体材料与下半导体材料完全分离的结构。
    • 3. 发明授权
    • Methods of forming semiconductor devices, assemblies and constructions
    • 形成半导体器件,组件和结构的方法
    • US07537994B2
    • 2009-05-26
    • US11511596
    • 2006-08-28
    • Ted TaylorXiawan Yang
    • Ted TaylorXiawan Yang
    • H01L21/8238H01L21/336H01L21/8236H01L21/3205
    • H01L21/76283
    • Embodiments disclosed herein include methods in which a pair of openings are formed into semiconductor material, with the openings being spaced from one another by a segment of the semiconductor material. Liners are formed along sidewalls of the openings, and then semiconductor material is isotropically etched from bottoms of the openings to merge the openings and thereby completely undercut the segment of semiconductor material. Embodiments disclosed herein may be utilized in forming SOI constructions, and in forming field effect transistors having transistor gates entirely surrounding channel regions. Embodiments disclosed herein also include semiconductor constructions having transistor gates surrounding channel regions, as well as constructions in which insulative material entirely separates an upper semiconductor material from a lower semiconductor material.
    • 本文公开的实施例包括其中一对开口形成为半导体材料的方法,其中开口通过半导体材料的部分彼此间隔开。 衬套沿着开口的侧壁形成,然后半导体材料从开口的底部被各向同性地蚀刻以合并开口,从而完全地切割半导体材料段。 本文公开的实施例可以用于形成SOI结构,并且在形成具有完全围绕通道区域的晶体管栅极的场效应晶体管中。 本文公开的实施例还包括具有围绕通道区域的晶体管栅极的半导体结构以及其中绝缘材料将上半导体材料与下半导体材料完全分离的结构。
    • 4. 发明申请
    • Transistors, Semiconductor Devices, Assemblies And Constructions
    • 晶体管,半导体器件,组件和结构
    • US20090200614A1
    • 2009-08-13
    • US12424392
    • 2009-04-15
    • Ted TaylorXiawan Yang
    • Ted TaylorXiawan Yang
    • H01L27/088
    • H01L21/76283
    • Embodiments disclosed herein include methods in which a pair of openings are formed into semiconductor material, with the openings being spaced from one another by a segment of the semiconductor material. Liners are formed along sidewalls of the openings, and then semiconductor material is isotropically etched from bottoms of the openings to merge the openings and thereby completely undercut the segment of semiconductor material. Embodiments disclosed herein may be utilized in forming SOI constructions, and in forming field effect transistors having transistor gates entirely surrounding channel regions. Embodiments disclosed herein also include semiconductor constructions having transistor gates surrounding channel regions, as well as constructions in which insulative material entirely separates an upper semiconductor material from a lower semiconductor material.
    • 本文公开的实施例包括其中一对开口形成为半导体材料的方法,其中开口通过半导体材料的部分彼此间隔开。 衬套沿着开口的侧壁形成,然后半导体材料从开口的底部被各向同性地蚀刻以合并开口,从而完全地切割半导体材料段。 本文公开的实施例可以用于形成SOI结构,并且在形成具有完全围绕通道区域的晶体管栅极的场效应晶体管中。 本文公开的实施例还包括具有围绕通道区域的晶体管栅极的半导体结构以及其中绝缘材料将上半导体材料与下半导体材料完全分离的结构。
    • 5. 发明授权
    • Transistors, semiconductor devices, assemblies and constructions
    • 晶体管,半导体器件,组件和结构
    • US08044479B2
    • 2011-10-25
    • US12424392
    • 2009-04-15
    • Ted TaylorXiawan Yang
    • Ted TaylorXiawan Yang
    • H01L21/70H01L27/146
    • H01L21/76283
    • Embodiments disclosed herein include methods in which a pair of openings are formed into semiconductor material, with the openings being spaced from one another by a segment of the semiconductor material. Liners are formed along sidewalls of the openings, and then semiconductor material is isotropically etched from bottoms of the openings to merge the openings and thereby completely undercut the segment of semiconductor material. Embodiments disclosed herein may be utilized in forming SOI constructions, and in forming field effect transistors having transistor gates entirely surrounding channel regions. Embodiments disclosed herein also include semiconductor constructions having transistor gates surrounding channel regions, as well as constructions in which insulative material entirely separates an upper semiconductor material from a lower semiconductor material.
    • 本文公开的实施例包括其中一对开口形成为半导体材料的方法,其中开口通过半导体材料的部分彼此间隔开。 衬套沿着开口的侧壁形成,然后半导体材料从开口的底部被各向同性地蚀刻以合并开口,从而完全地切割半导体材料段。 本文公开的实施例可以用于形成SOI结构,并且在形成具有完全围绕通道区域的晶体管栅极的场效应晶体管中。 本文公开的实施例还包括具有围绕通道区域的晶体管栅极的半导体结构以及其中绝缘材料将上半导体材料与下半导体材料完全分离的结构。
    • 6. 发明申请
    • Semiconductor devices, assemblies and constructions, and methods of forming semiconductor devices, assemblies and constructions
    • 半导体器件,组件和结构,以及形成半导体器件,组件和结构的方法
    • US20080048298A1
    • 2008-02-28
    • US11511596
    • 2006-08-28
    • Ted TaylorXiawan Yang
    • Ted TaylorXiawan Yang
    • H01L29/06H01L23/58
    • H01L21/76283
    • Embodiments disclosed herein include methods in which a pair of openings are formed into semiconductor material, with the openings being spaced from one another by a segment of the semiconductor material. Liners are formed along sidewalls of the openings, and then semiconductor material is isotropically etched from bottoms of the openings to merge the openings and thereby completely undercut the segment of semiconductor material. Embodiments disclosed herein may be utilized in forming SOI constructions, and in forming field effect transistors having transistor gates entirely surrounding channel regions. Embodiments disclosed herein also include semiconductor constructions having transistor gates surrounding channel regions, as well as constructions in which insulative material entirely separates an upper semiconductor material from a lower semiconductor material.
    • 本文公开的实施例包括其中一对开口形成为半导体材料的方法,其中开口通过半导体材料的部分彼此间隔开。 衬套沿着开口的侧壁形成,然后半导体材料从开口的底部被各向同性地蚀刻以合并开口,从而完全地切割半导体材料段。 本文公开的实施例可以用于形成SOI结构,并且在形成具有完全围绕通道区域的晶体管栅极的场效应晶体管中。 本文公开的实施例还包括具有围绕通道区域的晶体管栅极的半导体结构以及其中绝缘材料将上半导体材料与下半导体材料完全分离的结构。