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1. 发明专利

JP2007164924A Manufacturing method and manufacturing device for optical recording medium 审中-公开
标题翻译：用于光记录介质的制造方法和制造装置
公开(公告)号：JP2007164924A
公开(公告)日：2007-06-28
申请号：JP2005362351
申请日：2005-12-15
申请人： Tdk Corp , Tdk株式会社
发明人： YOKOGAWA MINORU , SATO YUZO , KOZU TSUTOMU , HARANO MITSUYOSHI , USHITA TOMOKI , TAKAHATA HIROAKI , USAMI MAMORU
IPC分类号： G11B7/26
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method and a manufacturing device for an optical recording medium that can form a cover layer to a uniform thickness without causing the cover layer to have burrs nor peel.
SOLUTION: A radiation-setting resin material 18 is supplied in a fluid state onto a substrate 14 annularly around a center hole 12 and a light-transmissive circular coating member 20 which has a center hole 22A and whose external diameter is smaller than the internal diameter of a recording area Ar is transferred onto the annular resin material 18; while air is blown to the circular coating member 20 from above, the substrate 14 and circular coating material 20 are rotated to make the resin material 18 flow radially outward with a centrifugal force and spread on the substrate 14, which is irradiated with radiation to cure the resin material 18.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：解决的问题：提供一种光学记录介质的制造方法和制造装置，其可以在不使盖层产生毛刺或剥离的情况下形成均匀厚度的覆盖层。解决方案：将辐射固化树脂材料18以流体状态供给到围绕中心孔12的环状的基板14和具有中心孔22A并且外径小于记录区域Ar的内径被转印到环状树脂材料18上; 当空气从上方吹到圆形涂层部件20上时，基板14和圆形涂层材料20旋转，使得树脂材料18以离心力径向向外流动并扩散在基板14上，辐照固化树脂材料18.版权所有（C）2007，JPO＆INPIT

2. 发明专利

JP2004327016A Optical recording disc 审中-公开
公开(公告)号：JP2004327016A
公开(公告)日：2004-11-18
申请号：JP2004108605
申请日：2004-04-01
申请人： Tdk Corp , Tdk株式会社
发明人： KOYAKE HISASHI , TAKAHATA HIROAKI , KAWAGUCHI YUICHI , MISHIMA KOJI , INOUE HIROYASU , KOMAKI TAKESHI , AOSHIMA MASAKI , KAKIUCHI HIRONORI
IPC分类号： G11B7/24 , G11B7/243 , G11B7/26
摘要： PROBLEM TO BE SOLVED: To provide an optical recording disk which allows the jitters to be suppressed within a desired range when data are reproduced, the generation of an error to be suppressed when data are reproduced, a push pull signal level to be held beyond a desired value, and desired tracking control to be performed. SOLUTION: This optical recording disk 1 comprises a support substrate 2, grooves G and lands L alternately formed on one principal plane of the support substrate, a recording layer 7 and a light transmitting layer 9 formed on the recording layer, on one principal plane of the support substrate provided with the grooves and the lands. Further, the groove and the land are formed so that the depth Gd of each groove is 15 nm or more and 25 nm or less and the half-depth width Gw of the groove is 150 nm or more and 230 nm or less, and the recording layer includes an inorganic element. COPYRIGHT: (C)2005,JPO&NCIPI

3. 发明专利

JP2004288266A Stamper manufacturing method and apparatus 审中-公开
公开(公告)号：JP2004288266A
公开(公告)日：2004-10-14
申请号：JP2003077341
申请日：2003-03-20
申请人： Tdk Corp , Tdk株式会社
发明人： KOYAKE HISASHI , TAKAHATA HIROAKI , KAWAGUCHI YUICHI
IPC分类号： B29C33/38 , G11B7/26
摘要： PROBLEM TO BE SOLVED: To provide a stamper manufacturing method with which sufficiently smooth surfaces of a groove and a land of a base material of an information recording medium can be formed.
SOLUTION: A master stamper 2 in which a recessed and projected part is formed on its surface is dipped in alkaline aqueous solution and subjected to immersion cleaning without electric current, the immersion-cleaned master stamper 2 is subjected to ultrasonic cleaning, the ultrasonically cleaned master stamper 2 is dipped in oxidation processing solution and the surface of the recessed and projected part is subjected to oxidation, an electrolytic nickel layer 11 is formed on the surface of the oxidation-treated recessed and projected part, the stamper consisting of the electrolytic nickel layer 11 for forming the base material for information recording medium is manufactured by peeling off the electrolytic nickel layer 11 in which an uneven cross-sectional shape of the recessed and projected part is transferred from the master pattern 2.
COPYRIGHT: (C)2005,JPO&NCIPI

4. 发明专利

JP2004013973A Manufacturing method of photoresist master disk, manufacturing method of stamper for producing optical recording medium, stamper, photoresist master disk, stamper intermediate body and optical recording medium 审中-公开
公开(公告)号：JP2004013973A
公开(公告)日：2004-01-15
申请号：JP2002164019
申请日：2002-06-05
申请人： Tdk Corp , Tdk株式会社
发明人： KOYAKE HISASHI , TAKAHATA HIROAKI , SHIRASAGO KENJI
IPC分类号： G11B7/24 , G03F7/00 , G11B7/26
CPC分类号： G03F7/0017 , G11B7/261
摘要： PROBLEM TO BE SOLVED: To manufacture a stamper for producing an optical recording medium by forming a projecting and recessing pattern without a developing process of a photoresist layer. SOLUTION: The manufacturing method of the stamper for producing the optical recording medium includes: a process in which a light absorbing layer 14 and a photoresist layer 16 are formed on a glass substrate 10 in this order; a process in which the layer 16 is irradiated with laser light beams from the opposite side of the layer 14 to remove a portion of the layer 16 by the laser energy and a photoresist master disk 26 is manufactured by forming a projecting and recessing pattern 22 made of undeveloped photoresist; a process in which a metallic thin film 28 is formed on the pattern 22 of the disk 26; a process in which a metallic film 30 is formed on the film 28 by electric field plating; and a process in which the films 28 and 30 are pealed off from the disk 26 to form the stamper 36. COPYRIGHT: (C)2004,JPO

5. 发明专利

JP2007066385A Manufacturing method of optical recording medium, manufacturing device, and optical recording medium 有权
标题翻译：光学记录介质的制造方法，制造设备和光学记录介质
公开(公告)号：JP2007066385A
公开(公告)日：2007-03-15
申请号：JP2005249709
申请日：2005-08-30
申请人： Tdk Corp , Tdk株式会社
发明人： SATO YUZO , KOZU TSUTOMU , HARANO MITSUYOSHI , USAMI MAMORU , USHITA TOMOKI , TAKAHATA HIROAKI
IPC分类号： G11B7/26 , G11B7/24 , G11B7/254 , G11B7/257
CPC分类号： B29C65/1435 , B29C65/1403 , B29C65/1406 , B29C65/1483 , B29C65/4845 , B29C65/521 , B29C66/1122 , B29C66/452 , B29C66/472 , B29C66/71 , B29C66/8322 , B29L2017/005 , B29K2067/00 , B29K2067/003 , B29K2069/00 , B29K2077/00 , B29K2077/10 , B29K2079/08
摘要： PROBLEM TO BE SOLVED: To provide the manufacturing method of an optical recording medium by which a cover layer can be formed in a uniform thickness so that a burr and peeling are not produced, to provide a manufacturing device and to provide the optical recording medium wherein damage and peeling of the cover layer are hardly caused. SOLUTION: A radiation curing resin material 16 is supplied on a substrate 12 annularly on the periphery of a center hole 12A in a fluid state, a light transmissive circular coat member 20 having a circular plate shape having a center hole 20A, an inside diameter equal to or larger than the diameter of the center hole 12A of the substrate 12 and an outside diameter smaller than an inside diameter of a recording area Ar is transferred and placed on the annular resin material 16, the resin material 16 is fluidized on the outer side in the diameter direction and spread on the substrate 12 by centrifugal force obtained by rotating the substrate 12 and the circular coat member 20 and the substrate 12 is irradiated with a radiation to cure the resin material 16. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：解决的问题：为了提供能够以均匀厚度形成覆盖层的光记录介质的制造方法，从而不产生毛刺和剥离，提供制造装置并提供光学其中难以引起覆盖层的损伤和剥离的记录介质。解决方案：辐射固化树脂材料16以流体状态环形地供应在中心孔12A的周边的基板12上，具有中心孔20A的圆板形状的透光圆形涂层部件20，内径等于或大于基板12的中心孔12A的直径和小于记录区域Ar的内径的外径被转移并放置在环形树脂材料16上，树脂材料16在通过旋转基板12和圆形涂层部件20以及基板12而获得的离心力，沿直径方向的外侧扩散在基板12上，照射辐射使树脂材料16固化。（版权所有） C）2007，JPO＆INPIT

6. 发明专利

JP2005063526A Stamper, recording media, and their manufacturing method 审中-公开
标题翻译：冲压器，记录媒体及其制造方法
公开(公告)号：JP2005063526A
公开(公告)日：2005-03-10
申请号：JP2003290442
申请日：2003-08-08
申请人： Tdk Corp , Tdk株式会社
发明人： KOYAKE HISASHI , TAKAHATA HIROAKI
IPC分类号： G11B7/24 , G11B7/0045 , G11B7/26
摘要： PROBLEM TO BE SOLVED: To realize the narrowing of a track pitch by a simple process. SOLUTION: A photoresist master disk 204 formed with a thermal storage layer 202 and a photoresist layer 203 is first manufactured on a glass substrate 201. The photoresist master disk 204 is then subjected to laser cutting. A far UV region laser beam 220 is used in the laser cutting and the laser cutting is performed by irradiating the master disk with the laser beam 220 at an irradiation rate within a prescribed range. A projecting part 203Y is formed in a region where the central part of the beam passes by setting the irradiation rate of the laser beam within the prescribed range. Consequently, two grooves are simultaneously formed. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：通过简单的过程实现轨道间距的变窄。解决方案：首先在玻璃基板201上制造形成有热存储层202和光致抗蚀剂层203的光致抗蚀剂母盘204.然后对光致抗蚀剂母盘204进行激光切割。在激光切割中使用远紫外区域激光束220，并且通过以规定范围内的照射速率用激光束220照射母盘来执行激光切割。通过将激光束的照射速率设定在规定范围内，在光束的中心部分通过的区域中形成突出部分203Y。因此，同时形成两个凹槽。版权所有（C）2005，JPO＆NCIPI

7. 发明专利

JP2004295959A Method and device for manufacturing stamper for information recording medium 审中-公开
公开(公告)号：JP2004295959A
公开(公告)日：2004-10-21
申请号：JP2003084218
申请日：2003-03-26
申请人： Tdk Corp , Tdk株式会社
发明人： TAKAHATA HIROAKI , KOYAKE HISASHI , KAWAGUCHI YUICHI
IPC分类号： G11B7/26
摘要： PROBLEM TO BE SOLVED: To manufacture a stamper for an information recording medium which has an uneven pattern with sharp and high surface smoothness and is, moreover, evenly polished on the front and rear sides thereof. SOLUTION: The stamper for the information recording medium is manufactured by exposing a part of a glass plate from a photo-resist layer by developing it after having formed a latent image on the photo-resist layer on the glass plate, forming recessed parts by dry-etching the glass plate using the photo-resist layer as a mask, removing the residual photo-resist layer on the glass plate, manufacturing a glass original disk 15 by forming a resin layer 14, which is formed with a reversed uneven pattern of the uneven pattern on the glass plate, on the surface of another glass plate 13 by a 2P method, forming a conductive film 16 on the surface of the resin layer 14 on the glass original disk 15, forming a metal film 17 on the conductive film 16, polishing the front and rear sides of the metal film 17 in that state, and thereafter, stripping the laminated body of the conductive film 16 and the metal film 17 from the glass original disk 15. COPYRIGHT: (C)2005,JPO&NCIPI

8. 发明专利

JP2003272255A Manufacturing method of stamper for manufacturing information medium, stamper and photoresist master disk 审中-公开
标题翻译：用于制造信息中心，冲压器和光电主机的打印机的制造方法
公开(公告)号：JP2003272255A
公开(公告)日：2003-09-26
申请号：JP2003001516
申请日：2003-01-07
申请人： Tdk Corp , Tdk株式会社
发明人： KOYAKE HISASHI , TAKAHATA HIROAKI , YONEYAMA KENJI , KAWAGUCHI YUICHI
IPC分类号： G11B7/26
摘要： PROBLEM TO BE SOLVED: To obtain a stamper on which a sharp rugged pattern is formed and to manufacture an information medium of high precision by using the stamper.
SOLUTION: A light absorbing layer 103 and a photoresist layer 104 are formed on a substrate 102, a latent image is formed in the photoresist layer 104 and then is developed to form the rugged pattern 106. Thus a photoresist master disk 100 is manufactured and further a Ni thin film 108 is formed on the rugged pattern 106 in the photoresist master disk 100 by electroless plating, a Ni film 110 is formed on the Ni thin film 108 and then the Ni thin film 108 and the Ni film 110 are exfoliated from the photoresist master disk 100 to form the stamper 120. In this method for manufacturing the stamper, a metallic catalyst is imparted onto a surface of the rugged pattern 106 as pretreatment of a process for forming the Ni thin film 108 on the photoresist layer 104, the metallic catalyst is activated and the surface of the rugged pattern 106 on which the metallic catalyst is imparted is washed with ultrapure water or the like.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：为了获得形成有尖锐的凹凸图案的压模，并且通过使用压模来制造高精度的信息介质。解决方案：在衬底102上形成光吸收层103和光致抗蚀剂层104，在光致抗蚀剂层104中形成潜像，然后显影以形成凹凸图案106.因此，光致抗蚀剂母盘100是通过无电解电镀在光致抗蚀剂母盘100的凹凸图案106上形成Ni薄膜108，在Ni薄膜108上形成Ni膜110，然后将Ni薄膜108和Ni膜110 从光致抗蚀剂母盘100剥离以形成压模120.在用于制造压模的方法中，在凹凸图案106的表面上施加金属催化剂作为在光致抗蚀剂层上形成Ni薄膜108的工艺的预处理如图104所示，金属催化剂被活化，并且用超纯水等洗涤赋予金属催化剂的凹凸图案106的表面。版权所有（C）2003，JPO

9. 发明专利

JP2003272250A Manufacturing method of stamper for manufacturing information medium, stamper and stamper intermediate with master disk 有权
标题翻译：制造用于制造信息媒介的冲压器的制造方法，具有主盘的冲压器和冲压器
公开(公告)号：JP2003272250A
公开(公告)日：2003-09-26
申请号：JP2003001515
申请日：2003-01-07
申请人： Tdk Corp , Tdk株式会社
发明人： KOYAKE HISASHI , TAKAHATA HIROAKI , UTSUNOMIYA HAJIME
IPC分类号： G11B7/26
摘要： PROBLEM TO BE SOLVED: To obtain a stamper on which a sharp rugged pattern is formed and which has excellent surface state.
SOLUTION: A light absorbing layer 103 and a photoresist layer 104 are formed on a substrate 102 in this order, a latent image is formed in the photoresist layer 104 and then is developed to form the rugged pattern 106. Thus a photoresist master disk 100 is manufactured and further a Ni thin film 108 is formed on the rugged pattern 106 in the photoresist master disk 100 by sputtering or by vapor deposition, a Ni film 110 is formed on the Ni thin film 108 and then the Ni thin film 108 and the Ni film 110 are exfoliated from the photoresist master disk 100 to form the stamper 120.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：获得形成有尖锐凹凸图案且具有优异表面状态的压模。解决方案：在衬底102上依次形成光吸收层103和光致抗蚀剂层104，在光致抗蚀剂层104中形成潜像，然后显影以形成凹凸图案106.因此，光致抗蚀剂母版制造盘100，并且通过溅射或气相沉积在光致抗蚀剂母盘100中的凹凸图案106上形成Ni薄膜108，在Ni薄膜108上形成Ni膜110，然后形成Ni薄膜108 并且Ni膜110从光致抗蚀剂母盘100剥离以形成压模120.版权所有（C）2003，JPO

10. 发明专利

JP2005285176A Photoresist master disk and its manufacturing method, manufacturing method of stamper and manufacturing method of optical recording medium 审中-公开
标题翻译：光刻胶主板及其制造方法，制造方法及制作方法光记录介质
公开(公告)号：JP2005285176A
公开(公告)日：2005-10-13
申请号：JP2004094459
申请日：2004-03-29
申请人： Tdk Corp , Tdk株式会社
发明人： KOYAKE HISASHI , TAKAHATA HIROAKI
IPC分类号： G03F7/11 , G11B7/26
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method of a photoresist master disk by which omission of a projection pattern is prevented even if pitch of an irregular pattern is narrowed, while a surface shape of a recessed pattern is excellent. SOLUTION: This manufacturing method of a photoresist master disk comprises a first process in which an organic layer 22 including polyvinyl phenol group resin including dissolution restraining material is formed on a glass substrate 20, a second process in which a photoresist layer 23 is formed on the organic layer 22 and an exposed region 23a and an unexposed region 23b are formed by irradiating the photoresist layer 23 with a laser beam having wavelength of 248 to 266 nm, and a third process in which the exposed region 23a of the photoresist region 23 is removed and the projection pattern 24a and the recessed pattern 24b are formed. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：解决的问题：为了提供光致抗蚀剂母盘的制造方法，即使凹凸图案的表面形状优异，即使不规则图案的间距变窄，也能够防止突出图案的省略。光致抗蚀剂母盘的制造方法包括在玻璃基板20上形成包含溶解抑制材料的含有聚乙烯基苯酚类树脂的有机层22的第一工序，光刻胶层23为通过用波长248〜266nm的激光束照射光致抗蚀剂层23，形成有机层22上的曝光区域23a和未曝光区域23b，以及第三工序，其中光致抗蚀剂区域并且形成突起图案24a和凹形图案24b。版权所有（C）2006，JPO＆NCIPI

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