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    • 3. 发明申请
    • EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
    • 曝光装置和装置制造方法
    • US20110102754A1
    • 2011-05-05
    • US12908377
    • 2010-10-20
    • Atsushi TAKAGIYoya MURAGUCHITomomi FUNAYOSHI
    • Atsushi TAKAGIYoya MURAGUCHITomomi FUNAYOSHI
    • G03B27/42
    • G03F7/70341G03B27/42G03F7/70933G03F9/7088G03F9/7096
    • An exposure apparatus includes an atmosphere maintaining unit which maintains an exposure chamber in an air atmosphere, a gas supply unit which supplies air or a mixed gas containing air and an inert gas to a local space, between a final surface of a projection optical system and a substrate, a detector which detects an alignment mark and a reference mark formed on the substrate stage, and a controller. The controller controls the gas supply unit not to supply the mixed gas to the local space when the detector detects the reference mark, and controls the gas supply unit to supply the mixed gas to the local space when an instruction to detect the alignment mark upon setting the local space in a mixed gas atmosphere, and expose the substrate based on the detection results of the reference mark and the alignment mark is issued from the recipe.
    • 曝光装置包括在空气气氛中保持曝光室的气氛保持单元,在投影光学系统的最终表面和投影光学系统的最终表面之间,将空气或含有空气和惰性气体的混合气体供给到局部空间的气体供给单元 基板,检测对准标记的检测器和形成在基板台上的基准标记,以及控制器。 当检测器检测到参考标记时,控制器控制气体供应单元不将混合气体供应到局部空间,并且当设置时检测对准标记的指令时,控制气体供应单元将混合气体供应到局部空间 从配方中发出混合气体气氛中的局部空间,并且基于参考标记和对准标记的检测结果露出基板。
    • 4. 发明申请
    • IMAGE PROJECTION SYSTEM
    • 图像投影系统
    • US20150381955A1
    • 2015-12-31
    • US14729210
    • 2015-06-03
    • Atsushi TAKAGI
    • Atsushi TAKAGI
    • H04N9/31H04N13/02
    • H04N9/3185H04N9/3147H04N9/3194
    • An image projection system includes an image projection means to project an image on a projection surface to form a reference image thereon; an capturing means to image the reference image to obtain an capturing result; a projection conditions correction means to correct projection conditions of the image projection mean on the basis of the capturing result; an intervening member detection means to detect an intervening member lying between the image projection means and the projection surface to obtain a detection result; and an capturing result correction means to correct the capturing result on the basis of the detection result. The projection conditions correction means corrects the projection conditions on the basis of the capturing result corrected by the capturing result correction means when the intervening member is detected by the intervening member detection means.
    • 图像投影系统包括图像投影装置,用于在投影表面上投影图像以在其上形成参考图像; 用于对参考图像进行成像以获得捕获结果的捕获装置; 投影条件校正装置,用于基于拍摄结果校正图像投影均值的投影条件; 中间构件检测装置,用于检测位于图像投影装置和投影表面之间的中间构件,以获得检测结果; 以及捕获结果校正装置,用于根据检测结果校正捕获结果。 投影条件校正装置根据由捕获结果校正装置校正的捕获结果,当中间构件检测装置检测到居间构件时,校正投影条件。