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    • 3. 发明授权
    • Liquid ejecting head and liquid ejecting apparatus
    • 液体喷头和液体喷射装置
    • US08061813B2
    • 2011-11-22
    • US11854359
    • 2007-09-12
    • Akira MatsuzawaMutsuhiko OtaTetsushi TakahashiYasuyuki Matsumoto
    • Akira MatsuzawaMutsuhiko OtaTetsushi TakahashiYasuyuki Matsumoto
    • B41J2/05
    • B41J2/14233B41J2/045B41J2202/11
    • A liquid ejecting head that includes a fluid channel formation substrate and pressure generation units. The fluid channel formation substrate is made of a silicon single crystal substrate having a crystal face orientation of. The fluid channel formation substrate has a plurality of separate flow channels that include at least pressure generation chambers demarcated by partition walls, each of the pressure generation chambers being in communication with a nozzle opening that ejects liquid drops. The fluid channel formation substrate further has a communication portion that is in communication with each of the separate flow channels. The pressure generation units are provided so as to correspond to the pressure generation chambers and generate a pressure change in the pressure generation chambers so as to cause ejection of liquid drops.
    • 一种液体喷射头,其包括流体通道形成基板和压力产生单元。 流体通道形成基板由具有晶面取向的硅单晶基板制成。 流体通道形成基板具有多个单独的流动通道,至少包括通过分隔壁划分的压力产生室,每个压力产生室与喷射液滴的喷嘴开口连通。 流体通道形成基板还具有与每个分离的流动通道连通的通信部分。 压力发生单元设置成对应于压力产生室,并且在压力产生室中产生压力变化,从而引起液滴喷射。
    • 5. 发明授权
    • Method of manufacturing liquid-jet head and liquid-jet head
    • 制造喷液头和喷液头的方法
    • US07571525B2
    • 2009-08-11
    • US11392668
    • 2006-03-30
    • Akira MatsuzawaMutsuhiko Ota
    • Akira MatsuzawaMutsuhiko Ota
    • H01L41/22H04R17/00B21D53/76G11B5/127B41J2/045
    • B41J2/14233B41J2/161B41J2/1629B41J2002/14241B41J2002/14491Y10T29/42Y10T29/49401
    • Included are the steps of: forming piezoelectric elements on a surface of a passage-forming substrate with a vibration plate in between, and forming a penetrating portion by removing an area in the vibration plate, which area will serve as a communicating portion; forming lead electrodes and sealing up the penetrating portion with an interconnect layer; joining a reservoir forming plate to a surface of a passage-forming substrate; forming liquid passages by wet-etching; forming protection films on inner surfaces of the liquid passages; detaching and removing a protection film on an interconnect layer; and causing a reservoir portion and a communicating portion to communicate with each other by removing a corresponding part of the interconnect layer, and in accordance with the manufacturing method, while the liquid passages are being formed, the communicating portion is formed in a way that an edge of an opening of the vibration plate is located outside an edge of an opening which is close to the penetrating portion, and in a way that at least the edge of the opening of the penetrating portion is thus configured of only any one of the vibration plate and the interconnect layer.
    • 包括以下步骤:在通道形成基板的表面上形成压电元件,其间具有振动板,并且通过去除振动板中的区域形成穿透部分,该区域将用作连通部分; 形成引线电极并用互连层密封穿透部分; 将储层形成板连接到通道形成基板的表面; 通过湿法蚀刻形成液体通道; 在液体通道的内表面上形成保护膜; 在互连层上分离和去除保护膜; 并且通过除去互连层的对应部分而使储存部和连通部彼此连通,并且根据制造方法,在形成液体通道的同时,形成连通部, 振动板的开口的边缘位于靠近穿透部分的开口的边缘的外侧,并且以至少穿透部分的开口的边缘仅由振动的任何一个构成 板和互连层。
    • 7. 发明授权
    • Method for producing liquid-jet head
    • 喷液头的制造方法
    • US07402256B2
    • 2008-07-22
    • US11234266
    • 2005-09-26
    • Akira MatsuzawaMutsuhiko Ota
    • Akira MatsuzawaMutsuhiko Ota
    • G01D15/00G11B5/127
    • B41J2/1631B41J2/161B41J2/1629B41J2002/14241B41J2002/14491Y10T29/49401
    • A method for producing a liquid-jet head comprises the steps of: forming a vibration plate and piezoelectric elements on one surface of a passage-forming substrate, and removing the vibration plate in a region to be a communicating portion, thereby forming an exposed portion; forming a wiring layer on the passage-forming substrate within the exposed portion, and forming lead electrodes; bonding a reservoir forming plate to the one surface of the passage-forming substrate; wet-etching the passage-forming substrate at the other surface thereof to form pressure generating chambers and the communicating portion; forming a liquid-resistant protective film on inner surfaces of the pressure generating chambers and the communicating portion; removing the protective film within the exposed portion; and performing wet etching on the communicating portion side to remove the wiring layer, thereby establishing communication between a reservoir portion and the communicating portion.
    • 一种液体喷射头的制造方法,其特征在于,在通路形成基板的一个面上形成振动板和压电元件,在作为连通部的区域中除去振动板,形成露出部 ; 在曝光部分内的通道形成基板上形成布线层,形成引线电极; 将储存器形成板结合到通道形成基板的一个表面; 在其另一个表面湿法蚀刻通道形成基板以形成压力产生室和连通部分; 在压力发生室和连通部的内表面上形成耐液体保护膜; 去除暴露部分内的保护膜; 在连通部侧进行湿式蚀刻,除去配线层,从而建立储存部与通气部之间的连通。
    • 8. 发明申请
    • Method for producing liquid-jet head
    • 喷液头的制造方法
    • US20060064873A1
    • 2006-03-30
    • US11234266
    • 2005-09-26
    • Akira MatsuzawaMutsuhiko Ota
    • Akira MatsuzawaMutsuhiko Ota
    • B21D53/76
    • B41J2/1631B41J2/161B41J2/1629B41J2002/14241B41J2002/14491Y10T29/49401
    • A method for producing a liquid-jet head comprises the steps of: forming a vibration plate and piezoelectric elements on one surface of a passage-forming substrate, and removing the vibration plate in a region to be a communicating portion, thereby forming an exposed portion; forming a wiring layer on the passage-forming substrate within the exposed portion, and forming lead electrodes; bonding a reservoir forming plate to the one surface of the passage-forming substrate; wet-etching the passage-forming substrate at the other surface thereof to form pressure generating chambers and the communicating portion; forming a liquid-resistant protective film on inner surfaces of the pressure generating chambers and the communicating portion; removing the protective film within the exposed portion; and performing wet etching on the communicating portion side to remove the wiring layer, thereby establishing communication between a reservoir portion and the communicating portion.
    • 一种液体喷射头的制造方法,其特征在于,在通路形成基板的一个面上形成振动板和压电元件,在作为连通部的区域中除去振动板,形成露出部 ; 在曝光部分内的通道形成基板上形成布线层,形成引线电极; 将储存器形成板结合到通道形成基板的一个表面; 在其另一个表面湿法蚀刻通道形成基板以形成压力产生室和连通部分; 在压力发生室和连通部的内表面上形成耐液体保护膜; 去除暴露部分内的保护膜; 在连通部侧进行湿式蚀刻,除去配线层,从而建立储存部与通气部之间的连通。