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    • 9. 发明申请
    • ELECTRON EMISSION ELEMENT AND IMAGING DEVICE HAVING THE SAME
    • 电子发射元件及其成像装置
    • US20120235113A1
    • 2012-09-20
    • US13512890
    • 2009-12-17
    • Masaki Yoshinari
    • Masaki Yoshinari
    • H01L31/0264H01L49/02
    • H01J29/04H01J29/467H01J29/481H01J31/127H01J2329/4604H01J2329/4669
    • An electron emission element has an electron emission layer that emits an electron from a surface emission portion, a focusing electrode layer that is film-formed on a surface of the electron emission layer via a first insulation layer and focuses the emitted electron, a gate electrode layer that is film-formed on a surface of the focusing electrode layer via a second insulation layer, an emission concave portion that penetrates the gate electrode layer, the second insulation layer, the focusing electrode layer and the first insulation layer and opens in a concave shape on a surface of the surface emission portion, a carbon layer that is film-formed from a surface of the gate electrode layer over an inner peripheral surface of the emission concave portion, and a partial insulation portion that insulates the focusing electrode layer from the carbon layer.
    • 电子发射元件具有从表面发射部分发射电子的电子发射层,经由第一绝缘层在电子发射层的表面上成膜并聚焦发射电子的聚焦电极层,栅电极 层,其经由第二绝缘层在聚焦电极层的表面上成膜,穿过栅极电极层的发光凹部,第二绝缘层,聚焦电极层和第一绝缘层,并且在凹部 形成在表面发射部分的表面上的碳层,从发光凹部的内周面上的栅电极层的表面成膜的碳层和使聚焦电极层与发光凹部绝缘的部分绝缘部 碳层。