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    • 8. 发明授权
    • Capacitive dynamic quantity sensor device
    • 电容式动态传感器装置
    • US06935176B2
    • 2005-08-30
    • US10834166
    • 2004-04-29
    • Keisuke GotoTameharu Ohta
    • Keisuke GotoTameharu Ohta
    • G01P15/08G01P15/125H01L29/84H01G7/00
    • G01P15/125G01P2015/0814
    • A sensor chip (100) includes comb-toothed movable electrodes (24) displaceable in a Y-direction, and comb-toothed stationary electrodes (30, 31, 40, 41) arranged to confront those movable electrodes (24), on one face side of a semiconductor substrate (10). The sensor chip (100) detects acceleration on the basis of a capacity change accompanying an acceleration application in the Y-direction between the movable electrodes (24) and the stationary electrodes (30, 31, 41, 42). The stationary electrodes (30, 31, 41, 42) are individually disposed to confront each other on one and other sides of the direction taken along the Y-direction in the individual movable electrodes (24). The individual electrode pads (25a, 30a, 31a, 40a, 41a) and the circuit chip (200) are electrically connected by bump electrodes (300) so that one face of the substrate (10) confronts the circuit chip (200).
    • 传感器芯片(100)包括可沿Y方向移位的梳齿可动电极(24),以及梳齿固定电极(30,31,40,41),其布置成在一个面上与所述可动电极(24)相对 一侧的半导体衬底(10)。 传感器芯片(100)基于伴随着可动电极(24)和固定电极(30,31,41,42)之间的Y方向上的加速度施加的容量变化来检测加速度。 固定电极(30,31,41,42)分别设置成在各个可动电极(24)中沿着Y方向取向的方向的一侧和另外侧彼此面对。 单独的电极焊盘(25 a,30 a,31 a,40 a,41 a)和电路芯片(200)通过凸块电极(300)电连接,使得衬底(10)的一个面与电路芯片 (200)。
    • 9. 发明授权
    • Sensor device and method of producing the same using lead frame
    • 传感器装置及其使用引线框的方法
    • US6035712A
    • 2000-03-14
    • US38906
    • 1998-03-12
    • Tameharu OhtaHiromi Ariyoshi
    • Tameharu OhtaHiromi Ariyoshi
    • G01P15/12G01P1/02G01P15/08H05K1/18
    • G01P1/023H01L2224/48091H01L2224/48247H01L2224/49171H01L2924/1815H05K1/181
    • An acceleration sensor device includes a molded package mounted on a circuit board and first and second leads protruding from the molded package and joined to the circuit board. The molded package retains an island portion of a lead frame in a state where a chip mounting surface of the island portion is perpendicular to the circuit board. An acceleration sensor is mounted on the chip mounting surface of the island portion. After attaching the acceleration sensor chip to the island portion, the island portion is bent up in the lead frame. Then, the island portion, the acceleration sensor chip, and the first and second leads are integrally molded to make the molded package. Accordingly, a detection axis of the acceleration sensor device can be arbitrary set, and the molded package is stably mounted on the circuit board.
    • 加速度传感器装置包括安装在电路板上的模制封装件和从模制封装突出并连接到电路板的第一和第二引线。 模制包装在岛部的芯片安装表面垂直于电路板的状态下保持引线框架的岛部。 加速度传感器安装在岛部的芯片安装面上。 在将加速度传感器芯片附接到岛部之后,岛部在引线框架中向上弯曲。 然后,将岛部,加速度传感器芯片以及第一和第二引线一体地模制成模制封装。 因此,可以任意设定加速度传感器装置的检测轴,并且将模制包装稳定地安装在电路板上。