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    • 5. 发明授权
    • Semiconductor laser device and method for manufacturing the same
    • 半导体激光装置及其制造方法
    • US07050472B2
    • 2006-05-23
    • US09795959
    • 2001-02-28
    • Kenji OritaAtsunori MochidaMasaaki Yuri
    • Kenji OritaAtsunori MochidaMasaaki Yuri
    • H01S5/00
    • H01S5/12H01S5/209H01S5/2231H01S5/32316
    • The invention provides a semiconductor laser device including an active layer, a semiconductor layer provided with a diffraction grating, an etch-stop layer, a cladding layer provided with a stripe structure, and a current blocking layer arranged at least on a side of said stripe structure, formed in that order on a substrate. In this semiconductor laser device, the etching-stop layer is formed on the semiconductor layer with the diffraction grating, so that damage of the diffraction grating due to etching can be prevented. The invention also provides a distributed Bragg reflection semiconductor laser device, including an active layer, and a current blocking layer having a stripe-shaped window and a diffraction grating formed at least near an end face thereof. This semiconductor laser device can be manufactured with fewer crystal growth processes than conventional semiconductor laser devices.
    • 本发明提供一种半导体激光器件,其包括有源层,设置有衍射光栅的半导体层,蚀刻停止层,设置有条纹结构的覆层,以及至少设置在所述条纹侧的电流阻挡层 结构,在基板上依次形成。 在该半导体激光器件中,利用衍射光栅在半导体层上形成蚀刻停止层,从而可以防止由蚀刻引起的衍射光栅的损伤。 本发明还提供一种分布式布拉格反射半导体激光器件,其包括有源层,以及具有条状窗口的电流阻挡层和至少形成在其端面附近的衍射光栅。 该半导体激光器件可以制造成比常规半导体激光器件更少的晶体生长工艺。