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    • 1. 发明授权
    • Spin polarized ion beam generation apparatus and scattering spectroscopy apparatus using the spin polarized ion beam and specimen processing apparatus
    • 旋转极化离子束产生装置和使用自旋极化离子束和样品处理装置的散射光谱装置
    • US08017920B2
    • 2011-09-13
    • US12516351
    • 2007-11-29
    • Taku SuzukiYasushi Yamauchi
    • Taku SuzukiYasushi Yamauchi
    • H01J37/08H01J37/252
    • H01J27/24G01R33/282H01J27/18H01J37/08H01J2237/0815H01J2237/24557H01J2237/25
    • A spin polarized ion beam generation apparatus (30) can efficiently generate a spin polarized ion by using a pumping light generator (33) to an ion in a high frequency discharge tube (15) to irradiate optical pumping (33,34) by circularly polarized light and linearly polarized light orthogonal to each other to a metastable atom. For example, a polarized helium ion beam having a spin polarization rate that exceeds 18% and that is as high as 25% can be generated. The spin polarized ion beam generation apparatus (30) also can be applied to a processing apparatus and an analysis apparatus that can irradiate a polarized ion beam to a specimen. According to the spin polarized ion scattering spectroscopy apparatus, the spin status in a region at a depth of about 2 to 3 atomic layers from the surface of the specimen can be measured while discriminating the elements from the atomic layer with a reduced measurement time and with a high accuracy impossible in the conventional technique.
    • 自旋极化离子束产生装置(30)可以通过使用泵送光发生器(33)对高频放电管(15)中的离子来有效地产生自旋极化离子,以通过圆偏振来照射光泵浦(33,34) 与亚稳原子相互正交的光和线偏振光。 例如,可以产生自旋极化率超过18%,高达25%的极化氦离子束。 自旋极化离子束产生装置(30)也可以应用于能够将极化离子束照射到试样的处理装置和分析装置。 根据自旋极化离子散射光谱装置,可以测量从样品表面开始在约2至3个原子层深度的区域中的自旋状态,同时以较小的测量时间来区分元素与原子层,并且与 在常规技术中不可能达到高准确度。
    • 2. 发明授权
    • Method of generating a pulsed metastable atom beam and pulsed ultraviolet radiation and an apparatus therefor
    • 产生脉冲亚稳原子束和脉冲紫外线辐射的方法及其装置
    • US06207951B1
    • 2001-03-27
    • US09161718
    • 1998-09-29
    • Yasushi YamauchiMitsunori KurahashiNaoki Kishimoto
    • Yasushi YamauchiMitsunori KurahashiNaoki Kishimoto
    • H05H300
    • H05G2/003H05H3/02
    • A pulse discharge is caused between an electrode in an insulating nozzle 2 jetting a gas in vacuum and a skimmer 8. An apparatus for performing the method includes an insulating nozzle 2 perforated with a gas jet hole 2a at a front end thereof and having a needle-like electrode 5 at an inside thereof, and includes a skimmer 8 formed in a funnel-like shape and having an opening portion 8a at a front end thereof. The opening 8a is arranged at a position remote from the gas jet hole 2a of the insulating nozzle 2 by a predetermined distance. The method and apparatus can be used in the field of measurement, material synthesis and the like with an object of surface science, and can form simultaneously and with high intensity both pulsed metastable atom beam and pulsed ultraviolet radiation which can be preferably used as a probe for investigating the electronic state at a surface of a substance and several layers on the inner side of the surface. It can also preferably be used for removing contamination or for depositing materials on the surface of a substrate by surface chemical reaction.
    • 在真空中喷射气体的绝缘喷嘴2中的电极和撇渣器8之间产生脉冲放电。用于执行该方法的装置包括:绝缘喷嘴2,其在其前端穿过气体喷射孔2a并具有针 并且包括形成为漏斗状的撇渣器8,在其前端具有开口部8a。 开口8a布置在远离绝缘喷嘴2的气体喷射孔2a的预定距离处。 该方法和装置可以用于具有表面科学对象的测量,材料合成等领域,并且可以同时并且以高强度形成脉冲亚稳原子束和脉冲紫外辐射,其可以优选用作探针 用于研究物质表面的电子状态和表面内侧上的几层。 也可优选用于通过表面化学反应去除污染物或沉积在基材表面上的材料。