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    • 1. 发明申请
    • LASER EXPOSURE DEVICE AND OPTICAL AXIS ADJUSTMENT METHOD IN LASER EXPOSURE DEVICE
    • 激光曝光装置和激光曝光装置中的光轴调整方法
    • US20090238605A1
    • 2009-09-24
    • US12477961
    • 2009-06-04
    • Takeshi EndoTakahiro KojimaKazutoshi Takahashi
    • Takeshi EndoTakahiro KojimaKazutoshi Takahashi
    • G03G15/00
    • G03G15/04072G03G15/0435
    • In a laser exposure device according to the present invention, a positioning pin, which is formed in a lens holder supporting a lens system, is inserted through an elongated hole for restriction of a board holder supporting a laser diode. An eccentric cam is inserted into an elongated hole for rotation movement formed in a board holder and a circular hole for rotation movement which is formed in the lens holder and which faces the elongated hole for rotation movement. An eccentric cam is inserted into an elongated hole for slide movement formed in the board holder and a circular hole for slide movement which is formed in the lens holder and which faces the elongated hole for slide movement. The eccentric cams are rotated to relatively move the board holder and lens holder with respect to each other to thereby establish alignment between the optical axes of the laser diode and lens system. In a state where the eccentric cams are fitted into the elongated holes, the board holder and lens holder are fixed to each other by screws.
    • 在根据本发明的激光曝光装置中,形成在支撑透镜系统的透镜支架中的定位销被插入通过长孔,用于限制支撑激光二极管的板支架。 偏心凸轮被插入到用于旋转运动的长孔中,形成在板保持器中的旋转运动和用于旋转运动的圆形孔,其形成在透镜保持器中并面向用于旋转运动的细长孔。 偏心凸轮被插入到用于滑动运动的细长孔中,形成在板保持器中,并且用于滑动运动的圆形孔形成在透镜保持器中并面对用于滑动运动的长孔。 偏心凸轮旋转以相对于彼此相对地移动板保持器和透镜保持器,从而在激光二极管和透镜系统的光轴之间建立对准。 在将偏心凸轮装配到细长孔中的状态下,通过螺钉将板保持器和透镜保持器彼此固定。
    • 4. 发明授权
    • Laser exposure device and optical axis adjustment method in laser exposure device
    • 激光曝光装置中的激光曝光装置和光轴调整方法
    • US08054326B2
    • 2011-11-08
    • US12477961
    • 2009-06-04
    • Takeshi EndoTakahiro KojimaKazutoshi Takahashi
    • Takeshi EndoTakahiro KojimaKazutoshi Takahashi
    • B41J2/44
    • G03G15/04072G03G15/0435
    • In a laser exposure device according to the present invention, a positioning pin, which is formed in a lens holder supporting a lens system, is inserted through an elongated hole for restriction of a board holder supporting a laser diode. An eccentric cam is inserted into an elongated hole for rotation movement formed in a board holder and a circular hole for rotation movement which is formed in the lens holder and which faces the elongated hole for rotation movement. An eccentric cam is inserted into an elongated hole for slide movement formed in the board holder and a circular hole for slide movement which is formed in the lens holder and which faces the elongated hole for slide movement. The eccentric cams are rotated to relatively move the board holder and lens holder with respect to each other to thereby establish alignment between the optical axes of the laser diode and lens system. In a state where the eccentric cams are fitted into the elongated holes, the board holder and lens holder are fixed to each other by screws.
    • 在根据本发明的激光曝光装置中,形成在支撑透镜系统的透镜支架中的定位销被插入通过长孔以限制支撑激光二极管的板支架。 偏心凸轮被插入到用于旋转运动的长孔中,形成在板保持器中的旋转运动和用于旋转运动的圆形孔,其形成在透镜保持器中并面向用于旋转运动的细长孔。 偏心凸轮被插入到用于滑动运动的细长孔中,形成在板保持器中,并且用于滑动运动的圆形孔形成在透镜保持器中并面对用于滑动运动的长孔。 偏心凸轮旋转以相对于彼此相对地移动板保持器和透镜保持器,从而在激光二极管和透镜系统的光轴之间建立对准。 在将偏心凸轮装配到细长孔中的状态下,通过螺钉将板保持器和透镜保持器彼此固定。
    • 5. 发明申请
    • LASER EXPOSURE DEVICE AND OPTICAL AXIS ADJUSTMENT METHOD IN LASER EXPOSURE DEVICE
    • 激光曝光装置和激光曝光装置中的光轴调整方法
    • US20070195212A1
    • 2007-08-23
    • US11675421
    • 2007-02-15
    • Takeshi EndoTakahiro KojimaKazutoshi Takahashi
    • Takeshi EndoTakahiro KojimaKazutoshi Takahashi
    • G02F1/1335
    • G03G15/04072G03G15/0435
    • In a laser exposure device according to the present invention, a positioning pin, which is formed in a lens holder supporting a lens system, is inserted through an elongated hole for restriction of a board holder supporting a laser diode. An eccentric cam is inserted into an elongated hole for rotation movement formed in a board holder and a circular hole for rotation movement which is formed in the lens holder and which faces the elongated hole for rotation movement. An eccentric cam is inserted into an elongated hole for slide movement formed in the board holder and a circular hole for slide movement which is formed in the lens holder and which faces the elongated hole for slide movement. The eccentric cams are rotated to relatively move the board holder and lens holder with respect to each other to thereby establish alignment between the optical axes of the laser diode and lens system. In a state where the eccentric cams are fitted into the elongated holes, the board holder and lens holder are fixed to each other by screws.
    • 在根据本发明的激光曝光装置中,形成在支撑透镜系统的透镜支架中的定位销被插入通过长孔,用于限制支撑激光二极管的板支架。 偏心凸轮被插入到用于旋转运动的长孔中,形成在板保持器中的旋转运动和用于旋转运动的圆形孔,其形成在透镜保持器中并面向用于旋转运动的细长孔。 偏心凸轮被插入到用于滑动运动的细长孔中,形成在板保持器中,并且用于滑动运动的圆形孔形成在透镜保持器中并面对用于滑动运动的长孔。 偏心凸轮旋转以相对于彼此相对地移动板保持器和透镜保持器,从而在激光二极管和透镜系统的光轴之间建立对准。 在将偏心凸轮装配到细长孔中的状态下,通过螺钉将板保持器和透镜保持器彼此固定。
    • 6. 发明授权
    • Laser exposure device and optical axis adjustment method in laser exposure device
    • 激光曝光装置中的激光曝光装置和光轴调整方法
    • US07557821B2
    • 2009-07-07
    • US11675421
    • 2007-02-15
    • Takeshi EndoTakahiro KojimaKazutoshi Takahashi
    • Takeshi EndoTakahiro KojimaKazutoshi Takahashi
    • B41J2/44
    • G03G15/04072G03G15/0435
    • In a laser exposure device according to the present invention, a positioning pin, which is formed in a lens holder supporting a lens system, is inserted through an elongated hole for restriction of a board holder supporting a laser diode. An eccentric cam is inserted into an elongated hole for rotation movement formed in a board holder and a circular hole for rotation movement which is formed in the lens holder and which faces the elongated hole for rotation movement. An eccentric cam is inserted into an elongated hole for slide movement formed in the board holder and a circular hole for slide movement which is formed in the lens holder and which faces the elongated hole for slide movement. The eccentric cams are rotated to relatively move the board holder and lens holder with respect to each other to thereby establish alignment between the optical axes of the laser diode and lens system. In a state where the eccentric cams are fitted into the elongated holes, the board holder and lens holder are fixed to each other by screws.
    • 在根据本发明的激光曝光装置中,形成在支撑透镜系统的透镜支架中的定位销被插入通过长孔,用于限制支撑激光二极管的板支架。 偏心凸轮被插入到用于旋转运动的长孔中,形成在板保持器中的旋转运动和用于旋转运动的圆形孔,其形成在透镜保持器中并面向用于旋转运动的细长孔。 偏心凸轮被插入到用于滑动运动的细长孔中,形成在板保持器中,并且用于滑动运动的圆形孔形成在透镜保持器中并面对用于滑动运动的长孔。 偏心凸轮旋转以相对于彼此相对地移动板保持器和透镜保持器,从而在激光二极管和透镜系统的光轴之间建立对准。 在将偏心凸轮装配到细长孔中的状态下,通过螺钉将板保持器和透镜保持器彼此固定。